PROCEEDINGS VOLUME 6186
SPIE PHOTONICS EUROPE | 3-7 APRIL 2006
MEMS, MOEMS, and Micromachining II
IN THIS VOLUME

0 Sessions, 32 Papers, 0 Presentations
Bio-MEMS  (3)
Telecom  (4)
Fabrication  (4)
Proceedings Volume 6186 is from: Logo
SPIE PHOTONICS EUROPE
3-7 April 2006
Strasbourg, France
Display and Imaging
Proc. SPIE 6186, Active focusing device based on MOEMS technology, 618601 (21 April 2006); doi: 10.1117/12.659826
Proc. SPIE 6186, New generation of fully integrated optical microscopes on-chip: application to confocal microscope, 618602 (21 April 2006); doi: 10.1117/12.663770
Proc. SPIE 6186, A 2D MEMS stage for optical applications, 618603 (21 April 2006); doi: 10.1117/12.664777
Proc. SPIE 6186, A large deflection translatory actuator for optical path length modulation, 618604 (21 April 2006); doi: 10.1117/12.662853
Proc. SPIE 6186, MEMS microdisplays: overview and markets, 618605 (21 April 2006); doi: 10.1117/12.661105
Microsystems/Sensors I
Proc. SPIE 6186, Compact triangulation sensor realized by bending wafer with metal hinge, 618606 (21 April 2006); doi: 10.1117/12.662466
Proc. SPIE 6186, Butt coupled microcantilever in sensing applications, 618607 (21 April 2006); doi: 10.1117/12.662393
Proc. SPIE 6186, Tunable Fabry-Perot filters operating in the 3 to 5 μm range for infrared micro-spectrometer applications, 618608 (21 April 2006); doi: 10.1117/12.662539
Proc. SPIE 6186, Application of a micromachined translatory actuator to an optical FTIR spectrometer, 618609 (21 April 2006); doi: 10.1117/12.662008
Proc. SPIE 6186, Noise in MgB<sub>2</sub> thin film: a candidate material for space-borne infrared detector development, 61860A (21 April 2006); doi: 10.1117/12.663668
Microsystems/Sensors II
Proc. SPIE 6186, Parallel atomic force microscopy using optical heterodyne detection, 61860B (21 April 2006); doi: 10.1117/12.664452
Proc. SPIE 6186, A MEMS based visible-NIR Fourier transform microspectrometer, 61860C (21 April 2006); doi: 10.1117/12.664781
Proc. SPIE 6186, Appearance of a Moore's law in MEMS? Trends affecting the MNT supply chain, 61860D (21 April 2006); doi: 10.1117/12.662191
Bio-MEMS
Proc. SPIE 6186, Microspectroscopy with terahertz bioMEMS, 61860E (21 April 2006); doi: 10.1117/12.662966
Proc. SPIE 6186, Integrating photonic and microfluidic structures on a device fabricated using proton beam writing, 61860F (21 April 2006); doi: 10.1117/12.662495
Proc. SPIE 6186, MEMS-based sensor and method for optical detection of peptides bio-reaction time, 61860G (21 April 2006); doi: 10.1117/12.662810
Telecom
Proc. SPIE 6186, Compact and stress-released piston tip-tilt mirror, 61860H (21 April 2006); doi: 10.1117/12.666511
Proc. SPIE 6186, Tunable InP/air MOEMS filter with record breaking selectivity, 61860I (21 April 2006); doi: 10.1117/12.662815
Proc. SPIE 6186, Low power high extinction electrothermal MEMS iris VOA, 61860J (21 April 2006); doi: 10.1117/12.662093
Proc. SPIE 6186, Tunable mechanical resonator with aluminium nitride piezoelectric actuation, 61860K (21 April 2006); doi: 10.1117/12.664444
Testing and Reliability
Proc. SPIE 6186, Optical probing of nano-electromechanical systems (NEMS), 61860M (21 April 2006); doi: 10.1117/12.665299
Proc. SPIE 6186, Digital holographic microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS, 61860N (21 April 2006); doi: 10.1117/12.660029
Proc. SPIE 6186, The distorted helix: thin film extraction from scanning white light interferometry, 61860O (3 May 2006); doi: 10.1117/12.664036
Proc. SPIE 6186, Optical MEMS reliability in space environment, 61860P (21 April 2006); doi: 10.1117/12.661458
Fabrication
Proc. SPIE 6186, Fresnel lenses: study and fabrication in silicon technology for medium-IR applications, 61860R (21 April 2006); doi: 10.1117/12.662793
Proc. SPIE 6186, Management and verification for MEMS fabrication processes, 61860S (21 April 2006); doi: 10.1117/12.661919
Proc. SPIE 6186, MEMS-based micro direct methanol fuel cell using microfabrication technology, 61860T (21 April 2006); doi: 10.1117/12.662487
Proc. SPIE 6186, Performance research of a silicon-based micro direct methanol fuel cell, 61860U (21 April 2006); doi: 10.1117/12.662351
Poster Session
Proc. SPIE 6186, The influences of thickness on piezoresistive properties of poly-Si nanofilms, 61860V (21 April 2006); doi: 10.1117/12.662348
Proc. SPIE 6186, The PDMS micro valve driven by PZT piezoelectric actuator on the silicon wafer, 61860W (21 April 2006); doi: 10.1117/12.662410
Proc. SPIE 6186, Study of capillary electrophoresis chip with conductivity detection, 61860X (21 April 2006); doi: 10.1117/12.662433
Proc. SPIE 6186, Tunable Bragg grating based on MOEMS technology, 61860Y (21 April 2006); doi: 10.1117/12.663205
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