PROCEEDINGS VOLUME 6188
SPIE PHOTONICS EUROPE | 3-7 APRIL 2006
Optical Micro- and Nanometrology in Microsystems Technology
Proceedings Volume 6188 is from: Logo
SPIE PHOTONICS EUROPE
3-7 April 2006
Strasbourg, France
Digital Holographic Microscopy
Proc. SPIE 6188, Tomography using multiple wavelengths in digital holography: method, simulations, and experiments, 618802 (25 April 2006); doi: 10.1117/12.663253
Proc. SPIE 6188, Digital in-line holography for dynamic micrometrology, 618803 (27 April 2006); doi: 10.1117/12.664812
Proc. SPIE 6188, Measurements of corner cubes microstructures by high-magnification digital holographic microscopy, 618804 (28 April 2006); doi: 10.1117/12.662030
Proc. SPIE 6188, Automatic procedure for aberrations compensation in digital holographic microscopy, 618805 (27 April 2006); doi: 10.1117/12.662068
Proc. SPIE 6188, Miniaturized low-cost digital holographic interferometer, 618806 (27 April 2006); doi: 10.1117/12.663414
Gratings and Nanostructures
Proc. SPIE 6188, Fabrication technique of nanograting using AFM, 618807 (27 April 2006); doi: 10.1117/12.663058
Proc. SPIE 6188, Continuous writing technique of long gratings for metrological applications, 618808 (27 April 2006); doi: 10.1117/12.662207
Proc. SPIE 6188, Pulsed-force mode AFM characterization of photopatterned polymer films for holographic data storage application, 618809 (27 April 2006); doi: 10.1117/12.663251
Proc. SPIE 6188, An integrated approach for photonic crystal inspection and characterization, 61880A (27 April 2006); doi: 10.1117/12.664930
Surface Inspection
Proc. SPIE 6188, A comparison of surface metrology techniques, 61880B (27 April 2006); doi: 10.1117/12.663390
Proc. SPIE 6188, Interferometric and confocal techniques for testing of silicon wafers, 61880C (27 April 2006); doi: 10.1117/12.662234
Proc. SPIE 6188, An optical differential probe for measurement of MEMS topography, 61880D (27 April 2006); doi: 10.1117/12.662985
Proc. SPIE 6188, One-shot line-profiling white light interferometer with spatial phase shift for measuring rough surfaces, 61880E (27 April 2006); doi: 10.1117/12.662322
Proc. SPIE 6188, Automated variable wavelength interferometry in reflected light mode, 61880F (27 April 2006); doi: 10.1117/12.662238
Optical Tomography
Proc. SPIE 6188, Application of photoelastic tomography to measurement of refractive indices in optical anisotropic microelements, 61880H (27 April 2006); doi: 10.1117/12.660916
Proc. SPIE 6188, Discussion of the finite element method in optical diffraction tomography, 61880I (27 April 2006); doi: 10.1117/12.662102
Proc. SPIE 6188, Design, modeling, and prototyping of microinterferometric tomography system for optical fiber inspection, 61880J (27 April 2006); doi: 10.1117/12.663958
Proc. SPIE 6188, Experimental proof-of-principle 3D measurements of micro-objects by digital holographic tomography, 61880K (28 April 2006); doi: 10.1117/12.663394
High-resolution Metrology
Proc. SPIE 6188, Metrological scanning probe microscope, 61880L (27 April 2006); doi: 10.1117/12.664407
Proc. SPIE 6188, Interferometric measurement of thermal expansion coefficients and thermo-optic coefficients in ferroelectric crystals, 61880O (28 April 2006); doi: 10.1117/12.664037
Inspection of MEMS
Proc. SPIE 6188, High-resolution stress measurements for microsystem and semiconductor applications, 61880P (28 April 2006); doi: 10.1117/12.669637
Proc. SPIE 6188, Measurement of thermal expansion of MEMS and electronic components, 61880Q (28 April 2006); doi: 10.1117/12.662827
Proc. SPIE 6188, Interferometric measurement of thickness of silicon nitride layer in bi-morph silicon MEMS, 61880R (28 April 2006); doi: 10.1117/12.664096
Proc. SPIE 6188, Fabrication, characterization, and reliability study of AlN-driven cantilevers, 61880S (28 April 2006); doi: 10.1117/12.663526
Proc. SPIE 6188, Nanometrology for MEMS: combination of optical interference, atomic force microscopy, and nanoindentor-based actuator, 61880T (28 April 2006); doi: 10.1117/12.662868
Specialised Techniques
Proc. SPIE 6188, Local protein/gene density measurements using SMI microscopy, 61880W (27 April 2006); doi: 10.1117/12.668023
Proc. SPIE 6188, X-ray diffraction in optical microsystems technology, 61880X (28 April 2006); doi: 10.1117/12.662498
Proc. SPIE 6188, Influence of the physico-chemical and photonic parameters on mechanical and optical properties of end-of-fiber polymer tips, 61880Y (28 April 2006); doi: 10.1117/12.662719
Proc. SPIE 6188, In-process 3D assessment of micromoulding features, 61880Z (28 April 2006); doi: 10.1117/12.662566
3D Imaging, Image Reconstruction, and Signal Processing
Proc. SPIE 6188, Three dimensional optics for three dimensional imaging: physics, fabrication, and computation, 618810 (28 April 2006); doi: 10.1117/12.665753
Proc. SPIE 6188, Systematic effects in coherence peak and phase evaluation of signals obtained with a vertical scanning white-light Mirau interferometer, 618811 (28 April 2006); doi: 10.1117/12.660892
Proc. SPIE 6188, Image formation in digital holography, 618812 (28 April 2006); doi: 10.1117/12.664862
Proc. SPIE 6188, Aberration-free reconstruction algorithm for high numerical aperture digital hologram, 618814 (28 April 2006); doi: 10.1117/12.664856
New Micro-components and Sensors
Proc. SPIE 6188, Reliability engineering: basics and applications for optoelectronic components and systems, 618815 (28 April 2006); doi: 10.1117/12.671878
Proc. SPIE 6188, Characterization of cylindrical microlenses in transmitted light and with grazing incidence interferometry in reflected light, 618816 (28 April 2006); doi: 10.1117/12.662691
Proc. SPIE 6188, Optical characterization of spherical microlenses: a round robin experiment within the EC Network of Excellence on Micro-Optics (NEMO), 618818 (28 April 2006); doi: 10.1117/12.663597
Proc. SPIE 6188, Benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics (NEMO), 618819 (28 April 2006); doi: 10.1117/12.663888
Proc. SPIE 6188, A new fiber optic modular sensing system for pressure, strain, and temperature measurements, 61881A (28 April 2006); doi: 10.1117/12.664929
Proc. SPIE 6188, A new wireless and miniaturized high-resolution optical displacement sensor, 61881B (28 April 2006); doi: 10.1117/12.661913
Proc. SPIE 6188, LCOS as a reference element in Twyman-Green laser interferometer, 61881C (28 April 2006); doi: 10.1117/12.663389
Poster Session
Proc. SPIE 6188, Comparison of various optical characterization techniques for the surface analysis of optical-grade germanium infrared materials, 61881D (28 April 2006); doi: 10.1117/12.663598
Proc. SPIE 6188, Thermal characterization of power transistors by close-infrared thermography method, 61881E (28 April 2006); doi: 10.1117/12.663500
Proc. SPIE 6188, Fast wavelength-scanning interferometry technique with derivative detection of quadrature signals, 61881F (28 April 2006); doi: 10.1117/12.663129
Proc. SPIE 6188, Characterization of dents and grooves on polymer films using scanning white light interferometry, 61881G (28 April 2006); doi: 10.1117/12.662089
Proc. SPIE 6188, Characterization of particle contamination for optical application, 61881H (28 April 2006); doi: 10.1117/12.661621
Proc. SPIE 6188, A novel optical detection system for chromatography applications, 61881I (27 April 2006); doi: 10.1117/12.660763
Proc. SPIE 6188, Generation of high-order optical vortices, 61881J (27 April 2006); doi: 10.1117/12.663016
Proc. SPIE 6188, AFM benchmark for the profile characterisation of subwavelength diffractive elements within the EC Network of Excellence on Micro-Optics (NEMO), 61881K (27 April 2006); doi: 10.1117/12.668466
Proc. SPIE 6188, Optical system for weld-piece distortion measurement during pulsed laser welding, 61881N (27 April 2006); doi: 10.1117/12.662911
Proc. SPIE 6188, Real-time surface deformations control during laser processing, 61881O (27 April 2006); doi: 10.1117/12.662635
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