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Phase retardation symmetric design of a refractive and diffractive element for linearizing sinusoidal scanning
Simultaneous measurement of film surface topography and thickness variation using white-light interferometry
Development of super-resolution optical inspection system for semiconductor defects using standing wave illumination shift
Repeated phase-offset measurement for error compensation in two-step triangular phase-shifting profilometry
An active vision sensor system employing adaptive digital fringe pattern generated by SLM pattern projector