PROCEEDINGS VOLUME 6415
SPIE SMART MATERIALS, NANO- AND MICRO-SMART SYSTEMS | 10-13 DECEMBER 2006
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
IN THIS VOLUME

0 Sessions, 49 Papers, 0 Presentations
Front Matter  (1)
Photonics  (4)
Applications  (5)
Fabrication  (3)
Materials  (4)
Proceedings Volume 6415 is from: Logo
SPIE SMART MATERIALS, NANO- AND MICRO-SMART SYSTEMS
10-13 December 2006
Adelaide, Australia
Front Matter
Proc. SPIE 6415, Front Matter: Volume 6415, 641501 (11 January 2007); doi: 10.1117/12.724842
Nanotechnology
Proc. SPIE 6415, Effect of annealing temperature on the formation of silicon nanocrystals in a nitride matrix, 641502 (20 December 2006); doi: 10.1117/12.695760
Proc. SPIE 6415, Effect of sonication on the mechanical properties of poly (vinyl alcohol)/carbon nanotube composites, 641503 (20 December 2006); doi: 10.1117/12.695317
Proc. SPIE 6415, Optical properties of covalently anchored single-walled carbon nanotube arrays on silicon (100) surfaces, 641504 (20 December 2006); doi: 10.1117/12.695611
Photonics
Proc. SPIE 6415, In(Ga)As/GaAs quantum dots for optoelectronic devices, 641506 (20 December 2006); doi: 10.1117/12.706526
Proc. SPIE 6415, Effects of silicon nanocrystallite density on the Raman-scattering spectra of silicon quantum dot superlattices, 641508 (20 December 2006); doi: 10.1117/12.695701
Proc. SPIE 6415, GaN membrane MSM ultraviolet photodetectors, 641509 (20 December 2006); doi: 10.1117/12.695086
Proc. SPIE 6415, Analysis of low-dimensional semiconductor nanostructures with a self-consistent iterative scheme, 64150A (20 December 2006); doi: 10.1117/12.720660
Applications
Proc. SPIE 6415, Millimeter-wave monolithic integrated receivers based on GaAs micromachining, 64150C (20 December 2006); doi: 10.1117/12.695166
Proc. SPIE 6415, Theoretical and experimental investigation of thermocapillary actuation for microplugs, 64150D (20 December 2006); doi: 10.1117/12.696491
Proc. SPIE 6415, A fluidic micro-actuator with an integrated inductive position sensor, 64150F (20 December 2006); doi: 10.1117/12.695525
Proc. SPIE 6415, Characterisation of a CMP nanoscale planarisation-based process for RF MEMS resonators, 64150G (20 December 2006); doi: 10.1117/12.699116
Fabrication
Proc. SPIE 6415, Microfabrication of PLLA polymer by x-ray lithography, 64150H (20 December 2006); doi: 10.1117/12.694855
Proc. SPIE 6415, High-productivity DRIE solutions for 3D-SiP and MEMS volume manufacturing, 64150I (27 December 2006); doi: 10.1117/12.695242
Proc. SPIE 6415, Surface morphology and stress analysis of piezoelectric strontium-doped lead zirconate titanate thin films, 64150J (20 December 2006); doi: 10.1117/12.695941
Materials
Proc. SPIE 6415, Low-stress silicon nitride layers for MEMS applications, 64150L (20 December 2006); doi: 10.1117/12.696350
Proc. SPIE 6415, Structural and magnetic properties of cobalt implanted TiO2 thin films, 64150M (20 December 2006); doi: 10.1117/12.695191
Proc. SPIE 6415, Retrofittable T-ray antireflection coatings, 64150N (20 December 2006); doi: 10.1117/12.695949
Proc. SPIE 6415, Development of MgSiO3 biocompatible piezoelectric film for bio-MEMS actuator, 64150P (20 December 2006); doi: 10.1117/12.695753
Packaging and Manufacturing
Proc. SPIE 6415, Optimization of MEMS fabrication process design by virtual experiments, 64150R (20 December 2006); doi: 10.1117/12.695427
Proc. SPIE 6415, Aspects of laser micromachining for sensor prototyping, 64150S (20 December 2006); doi: 10.1117/12.696536
Proc. SPIE 6415, Maskless lithography using off-the-shelf inkjet printer, 64150T (20 December 2006); doi: 10.1117/12.696487
Fluidics/Bio-applications
Proc. SPIE 6415, Microfluidic device with asymmetric electrodes for cell and reagent delivery, 64150U (20 December 2006); doi: 10.1117/12.695598
Proc. SPIE 6415, BioMEMS for the determination of rheological properties of biological fluids, 64150V (20 December 2006); doi: 10.1117/12.705353
Proc. SPIE 6415, A novel technique for preparing a mono-particle layer on a substrate through the epoxy-amino cross-linking, 64150W (20 December 2006); doi: 10.1117/12.695415
Proc. SPIE 6415, A ferrofluid seal technology for fluidic microactuators, 64150X (20 December 2006); doi: 10.1117/12.695524
Poster Session
Proc. SPIE 6415, Stabilization of amphiphilic block copolymer nanotubes and vesicles by photopolymerization, 64150Y (20 December 2006); doi: 10.1117/12.695301
Proc. SPIE 6415, Managing design for manufacture and assembly in the development of MEMS-based products, 64150Z (20 December 2006); doi: 10.1117/12.696230
Proc. SPIE 6415, Low-temperature synthesis and thermal study of manganese-zinc ferrite nanoparticles by a ferrioelate precursor method, 641510 (20 December 2006); doi: 10.1117/12.692326
Proc. SPIE 6415, Self-operated blood plasma separation using micropump in polymer-based microfluidic device, 641511 (20 December 2006); doi: 10.1117/12.693475
Proc. SPIE 6415, Structural studies of SnS films prepared by thermal evaporation, 641512 (20 December 2006); doi: 10.1117/12.694343
Proc. SPIE 6415, Development of nanostructured titanium oxide thin-films using a gas carving technique, 641514 (20 December 2006); doi: 10.1117/12.695539
Proc. SPIE 6415, Fabrication processes of MEMS phase shifters on polymer-based substrates, 641515 (20 December 2006); doi: 10.1117/12.695577
Proc. SPIE 6415, Feature extraction from terahertz pulses for classification of RNA data via support vector machines, 641516 (20 December 2006); doi: 10.1117/12.695629
Proc. SPIE 6415, Computational thermal analysis of a continuous-flow micropolymerase chain reaction (PCR) chip, 641517 (20 December 2006); doi: 10.1117/12.695655
Proc. SPIE 6415, Textural properties of Fe-SBA-15 nanostructured materials by controlling aging time of hydrothermal synthesis, 641519 (20 December 2006); doi: 10.1117/12.695738
Proc. SPIE 6415, Synthesis, characterization, and catalytic properties of Ti-containing SBA-15 mesoporous materials, 64151A (20 December 2006); doi: 10.1117/12.695746
Proc. SPIE 6415, Photocatalytic reduction and oxidation over some nanosized TiO2 catalysts prepared by different methods, 64151B (20 December 2006); doi: 10.1117/12.695756
Proc. SPIE 6415, Study on photocatalytic performance of nano- and microstructured materials, 64151C (20 December 2006); doi: 10.1117/12.695763
Proc. SPIE 6415, Control of cohesive-force ordering in organic-inorganic hybrid pillar arrays, 64151E (20 December 2006); doi: 10.1117/12.695798
Proc. SPIE 6415, Fabrication of inexpensive metallic mould for nanoimprinting using colloidal monolayer as a nanomask, 64151F (20 December 2006); doi: 10.1117/12.695807
Proc. SPIE 6415, Pattern transfer over extreme topographies using a SU-8 leveling process, 64151G (20 December 2006); doi: 10.1117/12.695843
Proc. SPIE 6415, A new technique for preparing PSG film using RF magnetron sputtering, 64151H (20 December 2006); doi: 10.1117/12.696500
Proc. SPIE 6415, Adhesive wafer-to-wafer bonding using contact imprinting, 64151I (20 December 2006); doi: 10.1117/12.696544
Proc. SPIE 6415, Nanosphere lithography using thermal evaporation of gold, 64151J (20 December 2006); doi: 10.1117/12.695409
Proc. SPIE 6415, A new disposable MEMS-based manometric catheter for in-vivo medical tests, 64151L (20 December 2006); doi: 10.1117/12.713739
Proc. SPIE 6415, Optimization of wireless and batteryless power transmission for micro implants in vivo environments, 64151M (28 December 2006); doi: 10.1117/12.713741
Proc. SPIE 6415, Deformable grating light modulator array for use as wavelength-selective switch, 64151N (20 December 2006); doi: 10.1117/12.713746
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