PROCEEDINGS VOLUME 6462
MOEMS-MEMS 2007 MICRO AND NANOFABRICATION | 20-25 JANUARY 2007
Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
MOEMS-MEMS 2007 MICRO AND NANOFABRICATION
20-25 January 2007
San Jose, California, United States
Lasers
Proc. SPIE 6462, Pulse-width dependency of the fabricating resolution of the two-photon absorption photo-polymerization, 646202 (7 March 2007); doi: 10.1117/12.701393
Proc. SPIE 6462, Small scale and micro featured functional prototypes generated by laser sintering of polyetheretherketone, 646203 (7 March 2007); doi: 10.1117/12.703097
Proc. SPIE 6462, Increasing femtosecond laser processing efficiency by hybridization with nanosecond laser, 646205 (7 March 2007); doi: 10.1117/12.706230
High Aspect Ratio Devices and Etching Techniques
Proc. SPIE 6462, Microfabricated 3D polymeric structure with SU-8, 646206 (7 March 2007); doi: 10.1117/12.700367
Proc. SPIE 6462, Setting new standards in MEMS, 646208 (7 March 2007); doi: 10.1117/12.723548
Proc. SPIE 6462, Plasma etching of positively sloped silicon structures, 646209 (7 March 2007); doi: 10.1117/12.714780
Proc. SPIE 6462, Processing parameters for the development of glass/ceramic MEMS, 64620A (7 March 2007); doi: 10.1117/12.700911
Proc. SPIE 6462, Use of silane-based primer on silicon wafers to enhance adhesion of edge-protective coatings during wet etching: application of the TALON Wrap process, 64620B (7 March 2007); doi: 10.1117/12.693290
Devices
Proc. SPIE 6462, New emerging MEMS applications, 64620C (7 March 2007); doi: 10.1117/12.696643
Proc. SPIE 6462, Fabrication technology of Si microfluidic devices for microbial cell trapping, 64620E (7 March 2007); doi: 10.1117/12.698926
Poster Session
Proc. SPIE 6462, Verification of thin film processes in a virtual fabrication environment, 64620G (7 March 2007); doi: 10.1117/12.700379
Proc. SPIE 6462, Replication technology as a means of implementing polymer MOEMS, 64620H (7 March 2007); doi: 10.1117/12.715102
Proc. SPIE 6462, The silicon mold fabrication of a kind of micro-optical resonator and coupler, 64620I (7 March 2007); doi: 10.1117/12.697130
Micro- and Nanoreplication: Templates
Proc. SPIE 6462, Nanoscale pattern transfer for templates, NEMS, and nano-optics, 64620J (7 March 2007); doi: 10.1117/12.705033
Proc. SPIE 6462, Grinding aspheric and freeform micro-optical molds, 64620K (7 March 2007); doi: 10.1117/12.712706
Proc. SPIE 6462, Focused ion beam lithography applied to photonic and imprinting, 64620L (7 March 2007); doi: 10.1117/12.704814
Nanoimprint Lithography: Applications
Proc. SPIE 6462, The value, solutions, and costs of patterning LEDs, 64620N (7 March 2007); doi: 10.1117/12.711475
Proc. SPIE 6462, Combined nano-imprint and photolithography (CNP) of integrated polymer optics, 64620O (7 March 2007); doi: 10.1117/12.698541
Proc. SPIE 6462, Application of nano-imprint lithography to nano-optics: wire grid polarizer and photonic crystal LED, 64620P (7 March 2007); doi: 10.1117/12.698827
Nanofabrication I
Proc. SPIE 6462, Polarization engineering through nanoengineered morphology, 64620Q (7 March 2007); doi: 10.1117/12.696257
Proc. SPIE 6462, Fabrication of photonic crystals using chemical lithography, 64620R (7 March 2007); doi: 10.1117/12.701473
Proc. SPIE 6462, Holographic optical elements for the extreme-ultraviolet regime, 64620S (8 February 2007); doi: 10.1117/12.712345
Proc. SPIE 6462, Periodic nanoripple generated by femtosecond laser beam in LCVD system, 64620T (13 March 2007); doi: 10.1117/12.700745
Microfabrication
Proc. SPIE 6462, Advances in integrated hollow waveguides for on-chip sensors, 64620U (7 March 2007); doi: 10.1117/12.701048
Proc. SPIE 6462, Compact and high efficiency polymer air-trench waveguide bends and splitters, 64620V (7 March 2007); doi: 10.1117/12.701359
Proc. SPIE 6462, Pulsed laser ablation for volume fabrication of micro-optical arrays on large-area substrates, 64620W (7 March 2007); doi: 10.1117/12.700235
Proc. SPIE 6462, Challenging micro-optical applications demand diverse manufacturing solutions, 64620X (7 March 2007); doi: 10.1117/12.715022
3-D Nanofabrication I
Proc. SPIE 6462, Soft-lithographic replication of 3D polymeric microstructures created with MAP, 646210 (7 March 2007); doi: 10.1117/12.704607
3-D Nanofabrication II
Proc. SPIE 6462, Crystalline colloidal arrays: applications in organic lasers, 646211 (7 March 2007); doi: 10.1117/12.702642
Proc. SPIE 6462, Production of 3D photonic components with ultrafast micromachining, 646212 (7 March 2007); doi: 10.1117/12.698564
Proc. SPIE 6462, Silvered three-dimensional polymeric photonic crystals having a large mid-infrared stop band, 646213 (7 March 2007); doi: 10.1117/12.702168
Nanofabrication II
Proc. SPIE 6462, Dielectric and metallic plasmonic components fabricated with femtosecond lasers, 646215 (7 March 2007); doi: 10.1117/12.700634
Proc. SPIE 6462, SiO2 phase gratings fabricated by UV laser ablation patterning, 646216 (7 March 2007); doi: 10.1117/12.701167
Proc. SPIE 6462, Aluminum nanowire polarizing grids: fabrication and analysis, 646217 (7 March 2007); doi: 10.1117/12.698990
Poster Session
Proc. SPIE 6462, Fabrication of thermally durable subwavelength periodic structures upon hybrid materials by nano-imprinting method, 646219 (7 March 2007); doi: 10.1117/12.699667
Proc. SPIE 6462, Polarization hologram, 64621A (7 March 2007); doi: 10.1117/12.698813
Proc. SPIE 6462, Three-dimensional diffractive micro- and nano-optical elements fabricated by electron-beam lithography, 64621B (7 March 2007); doi: 10.1117/12.700999
Proc. SPIE 6462, Implementation of far-field phase-shift lithography using diffractive optical elements, 64621C (7 March 2007); doi: 10.1117/12.699950
Proc. SPIE 6462, Simplified fabrication process of 3D photonic crystal optical transmission filter, 64621D (7 March 2007); doi: 10.1117/12.716335
Proc. SPIE 6462, Diffractive optical elements fabricated by precise pressing of glass, 64621E (7 March 2007); doi: 10.1117/12.717952
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