PROCEEDINGS VOLUME 6463
MOEMS-MEMS 2007 MICRO AND NANOFABRICATION | 20-25 JANUARY 2007
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI
MOEMS-MEMS 2007 MICRO AND NANOFABRICATION
20-25 January 2007
San Jose, California, United States
Front Matter
Proc. SPIE 6463, Front Matter: Volume 6463, 646301 (19 January 2007); doi: 10.1117/12.725139
Sensors: Applications and Reliability Methodology
Proc. SPIE 6463, Receptor-free nanomechanical sensors, 646302 (19 January 2007); doi: 10.1117/12.708237
Proc. SPIE 6463, New techniques for detecting and monitoring corrosion using nanostructures, 646303 (19 January 2007); doi: 10.1117/12.695221
Proc. SPIE 6463, Hybrid approach to MEMS reliability assessment, 646304 (19 January 2007); doi: 10.1117/12.700697
RF MEMS and Related Failure Mechanisms
MEMS Materials Properties
Proc. SPIE 6463, A novel technique for extraction of material properties through measurement of pull-in voltage and off-capacitance of beams, 646309 (19 January 2007); doi: 10.1117/12.699833
Proc. SPIE 6463, Cyclic thin film flexible pressure sensor testing, 64630A (19 January 2007); doi: 10.1117/12.704223
Proc. SPIE 6463, Self-sensing and actuation of CNF and Ni nanowire/polymer composites using electro-micromechanical test, 64630B (19 January 2007); doi: 10.1117/12.703384
Proc. SPIE 6463, Critical comparison of metrology techniques for MEMS, 64630C (19 January 2007); doi: 10.1117/12.714852
MEMS Reliability
Proc. SPIE 6463, MEMS reliability assessment program: progress to date, 64630D (19 January 2007); doi: 10.1117/12.708242
Proc. SPIE 6463, Development of a model for predicting dry stiction in microelectromechanical systems (MEMS), 64630E (19 January 2007); doi: 10.1117/12.704605
Optical MEMS: Design for Reliability and Characterization Techniques
Proc. SPIE 6463, Optical MEMS: designing for reliability, 64630F (19 January 2007); doi: 10.1117/12.696434
Proc. SPIE 6463, Process engineering and failure analysis of MEMS and MOEMS by digital holography microscopy (DHM), 64630G (19 January 2007); doi: 10.1117/12.699837
Proc. SPIE 6463, Performance and reliability test of MEMS optical scanners, 64630H (19 January 2007); doi: 10.1117/12.700641
Proc. SPIE 6463, White light interferometric profile measurement system using spectral coherence, 64630I (19 January 2007); doi: 10.1117/12.700003
Special Topics in MEMS I
Proc. SPIE 6463, Charging effects in spatial light modulators based on micromirrors, 64630J (19 January 2007); doi: 10.1117/12.700331
Proc. SPIE 6463, On the reliability of thermopneumatic actuators with silicon membranes, 64630K (19 January 2007); doi: 10.1117/12.697818
Proc. SPIE 6463, Testing reliability of MEMS materials in liquids, 64630L (19 January 2007); doi: 10.1117/12.706552
Special Topics in MEMS II
Proc. SPIE 6463, Wafer capping of MEMS with fab-friendly metals, 64630M (19 January 2007); doi: 10.1117/12.701573
Proc. SPIE 6463, Simple measurement technique for resonance frequency of micromachined cantilevers, 64630N (19 January 2007); doi: 10.1117/12.698280
Proc. SPIE 6463, Analytical model of a single stage compliant mechanism with flexible lever beam, 64630O (19 January 2007); doi: 10.1117/12.701202
Proc. SPIE 6463, A fast model-order reduction algorithm for microelectromechanical devices, 64630P (19 January 2007); doi: 10.1117/12.709023
Proc. SPIE 6463, Development of wireless MEMS sensor for RFID tag and temperature/pressure monitoring, 64630Q (19 January 2007); doi: 10.1117/12.721021
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