PROCEEDINGS VOLUME 6464
MOEMS-MEMS 2007 MICRO AND NANOFABRICATION | 20-25 JANUARY 2007
MEMS/MOEMS Components and Their Applications IV
MOEMS-MEMS 2007 MICRO AND NANOFABRICATION
20-25 January 2007
San Jose, California, United States
Front Matter 6464
Proc. SPIE 6464, Front Matter: Volume 6464, 646401 (8 March 2007); doi: 10.1117/12.730343
Micro/Nanotechnology and Biology
Proc. SPIE 6464, Drosophila as an unconventional substrate for microfabrication, 646403 (8 February 2007); doi: 10.1117/12.699414
Proc. SPIE 6464, Integrated biophotonic hybridization sensor based on chitosan-mediated assembly, 646404 (12 February 2007); doi: 10.1117/12.705612
Proc. SPIE 6464, Self assembled monolayer and protein adsorption studies on micromachined quartz crystal balances, 646405 (12 February 2007); doi: 10.1117/12.714796
Nanotechnology
Proc. SPIE 6464, Nanomechanical cantilever arrays for low-power and low-voltage embedded nonvolatile memory applications, 646406 (12 February 2007); doi: 10.1117/12.698964
Proc. SPIE 6464, Nanoelectromechanical systems as single electron switches and field emitters, 646407 (12 February 2007); doi: 10.1117/12.702611
Proc. SPIE 6464, Coated Tips for Scanning Thermal Microscopy, 646408 (12 February 2007); doi: 10.1117/12.702157
Proc. SPIE 6464, Electrical properties of back-gated <i>n</i>-layer graphene films, 646409 (12 February 2007); doi: 10.1117/12.707654
Proc. SPIE 6464, Micromachined silicon grids for direct TEM and Raman characterization of CVD grown carbon nanotubes, 64640A (12 February 2007); doi: 10.1117/12.707522
Nanomechanics and Resonators
Proc. SPIE 6464, Mechanical properties of ZnO nanowires, 64640B (12 February 2007); doi: 10.1117/12.700353
Proc. SPIE 6464, MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films, 64640C (12 February 2007); doi: 10.1117/12.706115
Proc. SPIE 6464, All-optical micromechanical chemical sensors, 64640D (12 February 2007); doi: 10.1117/12.700224
Proc. SPIE 6464, Integrated nanomechanical motion detection by means of optical evanescent wave coupling, 64640E (12 February 2007); doi: 10.1117/12.700374
Microelectromechanical Systems I
Proc. SPIE 6464, Development of amorphous SiC for MEMS-based microbridges, 64640H (12 February 2007); doi: 10.1117/12.704705
Proc. SPIE 6464, Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique, 64640I (12 February 2007); doi: 10.1117/12.705333
Proc. SPIE 6464, On-chip integration of a microfluidic valve and pump for sample acquisition and movement, 64640J (12 February 2007); doi: 10.1117/12.705415
Microelectromechanical Systems II
Proc. SPIE 6464, IR detectors with adaptive responsivity and wavelength, 64640L (12 February 2007); doi: 10.1117/12.705427
Proc. SPIE 6464, LVD micromirror for rapid reference scanning in optical coherence tomography, 64640M (12 February 2007); doi: 10.1117/12.703221
Proc. SPIE 6464, Process development, design, and characterization of high-finesse micromachined optical Fabry-Perot microcavities, 64640N (12 February 2007); doi: 10.1117/12.705901
Proc. SPIE 6464, Silicon/porous silicon composite membrane for high-sensitivity pressure sensor, 64640O (12 February 2007); doi: 10.1117/12.698278
Proc. SPIE 6464, Stereolithography as a meso-structure for input force reduction to a capacitive force MEMS sensor, 64640Q (12 February 2007); doi: 10.1117/12.700565
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