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Nanomechanical cantilever arrays for low-power and low-voltage embedded nonvolatile memory applications
MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films
Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique
Process development, design, and characterization of high-finesse micromachined optical Fabry-Perot microcavities