PROCEEDINGS VOLUME 6466
MOEMS-MEMS 2007 MICRO AND NANOFABRICATION | 20-25 JANUARY 2007
MOEMS and Miniaturized Systems VI
IN THIS VOLUME

0 Sessions, 27 Papers, 0 Presentations
Front Matter  (1)
MOEMS-MEMS 2007 MICRO AND NANOFABRICATION
20-25 January 2007
San Jose, California, United States
Front Matter
Proc. SPIE 6466, Front Matter: Volume 6466, 646601 (20 January 2007); doi: 10.1117/12.724891
Microspectrometers
Proc. SPIE 6466, Miniaturized FTIR-spectrometer based on an optical MEMS translatory actuator, 646602 (22 January 2007); doi: 10.1117/12.697898
Proc. SPIE 6466, Uniform tilt-angle micromirror array for multi-object spectroscopy, 646603 (22 January 2007); doi: 10.1117/12.702012
Proc. SPIE 6466, Using MEMS technology for cost effective recycling of plastics, 646604 (22 January 2007); doi: 10.1117/12.706493
Proc. SPIE 6466, Investigation and characterization of high-efficient NIR-scanning gratings used in NIR micro-spectrometer, 646605 (22 January 2007); doi: 10.1117/12.701821
Proc. SPIE 6466, Tunable infrared detector with integrated micromachined Fabry-Perot filter, 646606 (22 January 2007); doi: 10.1117/12.698871
Proc. SPIE 6466, An indium phosphide-based near-infrared MOEMS microspectrometer for agri-food and environmental monitoring, 646607 (22 January 2007); doi: 10.1117/12.700256
Display Applications
Proc. SPIE 6466, MEMS compatible illumination and imaging micro-optical systems, 646608 (22 January 2007); doi: 10.1117/12.705594
Proc. SPIE 6466, The iMoD display: considerations and challenges in fabricating MOEMS on large area glass substrates, 646609 (22 January 2007); doi: 10.1117/12.713949
Proc. SPIE 6466, Ultra compact laser projection systems based on two-dimensional resonant micro scanning mirrors, 64660A (22 January 2007); doi: 10.1117/12.700093
Proc. SPIE 6466, Electrostatic 1D microscanner with vertical combs for HD resolution display, 64660B (22 January 2007); doi: 10.1117/12.702163
High Resolution Scan Mirrors
Proc. SPIE 6466, Electro-opto-mechanical cantilever-based logic gates, 64660C (22 January 2007); doi: 10.1117/12.699341
Proc. SPIE 6466, High-performance silicon scanning mirror for laser printing, 64660D (22 January 2007); doi: 10.1117/12.700849
Proc. SPIE 6466, Fracture strength of SOI springs in MEMS micromirrors, 64660E (22 January 2007); doi: 10.1117/12.698933
Imaging Applications
Proc. SPIE 6466, Zoom camera based on liquid lenses, 64660F (22 January 2007); doi: 10.1117/12.706779
Proc. SPIE 6466, Reflectance and fluorescence imaging with a MEMS dual–axes confocal microscope, 64660G (22 January 2007); doi: 10.1117/12.711560
Proc. SPIE 6466, High-speed three-dimensional endoscopic OCT using MEMS technology, 64660H (22 January 2007); doi: 10.1117/12.713950
Proc. SPIE 6466, A new micro laser camera, 64660I (22 January 2007); doi: 10.1117/12.700360
Proc. SPIE 6466, Update on MEMS-based scanned beam imager, 64660J (22 January 2007); doi: 10.1117/12.701501
Proc. SPIE 6466, Spherical artificial compound eye captures real images, 64660K (22 January 2007); doi: 10.1117/12.696258
MOEM Components, Systems, and Packaging
Proc. SPIE 6466, Fabrication of micromechanical and microoptical systems by two-photon polymerization, 64660M (22 January 2007); doi: 10.1117/12.700668
Proc. SPIE 6466, Investigation of a seesaw structure for elevating the micro-optical device by CMOS-MEMS process, 64660N (22 January 2007); doi: 10.1117/12.700077
Proc. SPIE 6466, Long-term stability of NIST chip-scale atomic clock physics packages, 64660O (22 January 2007); doi: 10.1117/12.701591
Proc. SPIE 6466, Six-axis compliant mechanisms for manipulation of micro-scale fiber optics components, 64660P (22 January 2007); doi: 10.1117/12.702140
Poster Session
Proc. SPIE 6466, Investigation of motion behavior for the opposite connection micro-optical devices by CMOS-MEMS process, 64660Q (22 January 2007); doi: 10.1117/12.700037
Proc. SPIE 6466, Improved homogenization of fly's eye condenser setups under coherent illumination using chirped microlens arrays, 64660R (22 January 2007); doi: 10.1117/12.700127
Proc. SPIE 6466, Novel modeling approach for multi-disciplinary micro domains, 64660S (22 January 2007); doi: 10.1117/12.707826
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