PROCEEDINGS VOLUME 6589
MICROTECHNOLOGIES FOR THE NEW MILLENNIUM | 2-4 MAY 2007
Smart Sensors, Actuators, and MEMS III
Proceedings Volume 6589 is from: Logo
MICROTECHNOLOGIES FOR THE NEW MILLENNIUM
2-4 May 2007
Maspalomas, Gran Canaria, Spain
Front Matter: Volume 6589
Proc. SPIE 6589, Front Matter: Volume 6589, 658901 (31 May 2007); doi: 10.1117/12.747267
Plenary Session
Proc. SPIE 6589, The nano revolution: bottom-up manufacturing with biomolecules, 658902 (15 May 2007); doi: 10.1117/12.740793
Power Generation and Low-Power Architectures
Proc. SPIE 6589, Fabrication and characterization of a passive silicon-based direct methanol fuel cell, 658903 (15 May 2007); doi: 10.1117/12.721907
Proc. SPIE 6589, Low-power low-latency MAC protocol for aeronautical applications, 658904 (17 May 2007); doi: 10.1117/12.724122
Proc. SPIE 6589, Design and implementation of mechanical resonators for optimized inertial electromagnetic microgenerators, 658905 (15 May 2007); doi: 10.1117/12.722275
Proc. SPIE 6589, Implementation of hard magnetic thin films on suspended cantilevers for electromagnetic energy harvesters, 658906 (15 May 2007); doi: 10.1117/12.724044
Optical MEMS
Proc. SPIE 6589, A compact optical ethylene monitoring system, 658907 (15 May 2007); doi: 10.1117/12.721822
Proc. SPIE 6589, Oxygen measurements at high pressures using a low-cost polarisation-stabilized widely tunable vertical-cavity surface-emitting laser, 658908 (17 May 2007); doi: 10.1117/12.722031
Proc. SPIE 6589, Thermo-activated nano-material for use in optical devices, 658909 (15 May 2007); doi: 10.1117/12.720723
Proc. SPIE 6589, Dye based light sensor for tag integration, 65890A (17 May 2007); doi: 10.1117/12.723758
Microfluidic Systems
Proc. SPIE 6589, LTCC: a fascinating technology platform for miniaturized devices, 65890B (15 May 2007); doi: 10.1117/12.722793
Proc. SPIE 6589, Ferromagnetic 3D impellor-shaped micro-stirrer bar for micromixing, 65890C (15 May 2007); doi: 10.1117/12.722098
Proc. SPIE 6589, Development of MEMS-based liquid chromatography modules for agrofood applications, 65890D (15 May 2007); doi: 10.1117/12.721936
Proc. SPIE 6589, Microfluidic chamber with acoustic actuation by LiNbO3 interdigital transducers for tumor cell investigations, 65890E (15 May 2007); doi: 10.1117/12.726338
Aerospace Applications
Proc. SPIE 6589, Presentation of silicon platforms for wireless advanced networks of sensors for aeronautics application, 65890F (15 May 2007); doi: 10.1117/12.721864
Proc. SPIE 6589, A novel low-power fluxgate sensor using a macroscale optimisation technique for space physics instrumentation, 65890G (15 May 2007); doi: 10.1117/12.721584
Proc. SPIE 6589, Investigations on the passivation of thin film flow sensors on flexible substrates, 65890H (15 May 2007); doi: 10.1117/12.723978
Physical Sensors
Proc. SPIE 6589, A tuning fork gyroscope with compensated imbalance signal, 65890I (17 May 2007); doi: 10.1117/12.724085
Proc. SPIE 6589, A new micromachined sensor system for tactile measurements of high-aspect ratio microstructures, 65890J (15 May 2007); doi: 10.1117/12.724163
Proc. SPIE 6589, Searching for hypothetical forces in the Casimir regime using a MEMS based force sensor, 65890K (31 May 2007); doi: 10.1117/12.724221
Proc. SPIE 6589, Resonance frequencies and modal shape characterization of piezoelectric microcantilevers, 65890L (15 May 2007); doi: 10.1117/12.721832
Proc. SPIE 6589, Silicon cantilever sensor for micro-/nanoscale dimension and force metrology, 65890M (15 May 2007); doi: 10.1117/12.721951
Proc. SPIE 6589, Feedback loops with electrically driven microcantilevers, 65890N (15 May 2007); doi: 10.1117/12.721349
Smart System Integration
Proc. SPIE 6589, Fabrication process for a flexible tag microlab, 65890O (15 May 2007); doi: 10.1117/12.723737
Proc. SPIE 6589, Ultra-low-power electronics and devices for a multisensing RFID tag, 65890P (15 May 2007); doi: 10.1117/12.723940
Proc. SPIE 6589, RFID reader with gas sensing capability for monitoring fruit along the logistic chain: array development and signal processing, 65890Q (17 May 2007); doi: 10.1117/12.723852
Proc. SPIE 6589, Design of all-plastic distributed pressure sensors based on electroactive materials, 65890R (15 May 2007); doi: 10.1117/12.721889
Fabrication and Process Technology
Proc. SPIE 6589, Two-dimensional MEMS array for maskless lithography and wavefront modulation, 65890S (15 May 2007); doi: 10.1117/12.724467
Proc. SPIE 6589, Plasma-activated wafer bonding: the new low-temperature tool for MEMS fabrication, 65890T (15 May 2007); doi: 10.1117/12.721937
Proc. SPIE 6589, The influence of varying sputter deposition conditions on the wet chemical etch rate of AlN thin films, 65890U (15 May 2007); doi: 10.1117/12.721686
RF MEMS
Proc. SPIE 6589, Temperature stress impact on power RF MEMS switches, 65890V (15 May 2007); doi: 10.1117/12.722010
Proc. SPIE 6589, Inductively coupled MEMS-based micro RFID transponder, 65890W (15 May 2007); doi: 10.1117/12.722096
Proc. SPIE 6589, Germanium as an integrated resistor material in RF MEMS switches, 65890X (17 May 2007); doi: 10.1117/12.722039
Proc. SPIE 6589, A metal-to-metal contact RF MEMS switch towards handsets applications, 65890Y (15 May 2007); doi: 10.1117/12.721582
Chemical and Bio-Sensors
Proc. SPIE 6589, Detection of unburned fuel as contaminant in engine oil by a gas microsensor array, 658911 (15 May 2007); doi: 10.1117/12.722007
Proc. SPIE 6589, Nano and micro stripe based metal oxide thin film gas sensor, 658912 (15 May 2007); doi: 10.1117/12.721856
Proc. SPIE 6589, Nanofabrication of TiO<sub>2</sub> nanowires: I-V characteristic and improvement of metal oxides gas sensing properties, 658913 (15 May 2007); doi: 10.1117/12.722069
Proc. SPIE 6589, Bismuth film electrodes for heavy metals determination, 658914 (15 May 2007); doi: 10.1117/12.722020
Proc. SPIE 6589, Gamma radiation and ozone sensing properties of In<sub>2</sub>O<sub>3</sub>:ZnO:SnO<sub>2</sub> thin films, 658916 (15 May 2007); doi: 10.1117/12.721839
Proc. SPIE 6589, Quartz crystal nano-balance for hydrogen sensing at room temperature using carbon nanotubes aggregates, 658917 (15 May 2007); doi: 10.1117/12.721967
Proc. SPIE 6589, Design and development of a microheater on GaAs for MEMS gas sensor array, 658918 (17 May 2007); doi: 10.1117/12.721938
Proc. SPIE 6589, Mixed metal oxide films as pH sensing materials, 658919 (15 May 2007); doi: 10.1117/12.721950
Proc. SPIE 6589, Micro and nanotechnologies for the development of an integrated chromatographic system, 65891A (17 May 2007); doi: 10.1117/12.721924
Bio-MEMS and Acuators
Proc. SPIE 6589, The MicroActive project: automatic detection of disease-related molecular cell activity, 65891B (15 May 2007); doi: 10.1117/12.724785
Proc. SPIE 6589, DLC/TiNi microcage for biopsy applications, 65891C (15 May 2007); doi: 10.1117/12.721564
Proc. SPIE 6589, SMA micro actuators for active shape control, handling technologies, and medical applications, 65891D (15 May 2007); doi: 10.1117/12.724192
Proc. SPIE 6589, An alternative system for mycotoxin detection based on amorphous silicon sensors, 65891F (15 May 2007); doi: 10.1117/12.721931
Proc. SPIE 6589, Pulse voltammetry wine defects identification by means of miniaturized microelectrodes, 65891G (15 May 2007); doi: 10.1117/12.722070
Proc. SPIE 6589, Development of automated microrobot-based nanohandling stations for nanocharacterization, 65891H (15 May 2007); doi: 10.1117/12.715630
Proc. SPIE 6589, Identification of wine defects by means of a miniaturized electronic tongue, 65891I (15 May 2007); doi: 10.1117/12.722019
Materials and Simulation
Proc. SPIE 6589, On the influence of nano-sized palladium clusters at the surface of SnO<sub>2</sub> thin films on the gas response, 65891J (17 May 2007); doi: 10.1117/12.722018
Proc. SPIE 6589, Three-dimensional simulation of sacrificial etching, 65891L (15 May 2007); doi: 10.1117/12.721979
Proc. SPIE 6589, Application of PZT thick-films on adjusting purposes in micro-optical systems, 65891M (15 May 2007); doi: 10.1117/12.722397
Proc. SPIE 6589, VHDL implementation of a communication interface for integrated MEMS, 65891N (15 May 2007); doi: 10.1117/12.714275
Proc. SPIE 6589, Modelling and simulation of a micromachined angular rate sensor with optimised mechanical suspension, 65891O (15 May 2007); doi: 10.1117/12.721680
Proc. SPIE 6589, Physical modeling of a highly sensitive linear MOS sensor for 2D detection of magnetic fields, 65891P (31 May 2007); doi: 10.1117/12.722107
Proc. SPIE 6589, Coupling coefficient determination based on simulation and experiment for ST-cut quartz saw delay-line response, 65891Q (15 May 2007); doi: 10.1117/12.721633