PROCEEDINGS VOLUME 6648
NANOSCIENCE + ENGINEERING | 26-30 AUGUST 2007
Instrumentation, Metrology, and Standards for Nanomanufacturing
Proceedings Volume 6648 is from: Logo
NANOSCIENCE + ENGINEERING
26-30 August 2007
San Diego, California, United States
Front Matter
Proc. SPIE 6648, Front Matter: Volume 6648, 664801 (28 September 2007); doi: 10.1117/12.773613
Instrumentation Metrology and Standards I
Proc. SPIE 6648, Instrumentation, metrology, and standards: key elements for the future of nanomanufacturing, 664802 (10 September 2007); doi: 10.1117/12.730855
Proc. SPIE 6648, Infrared reflectivity spectroscopy of optical phonons in short-period AlGaN/GaN superlattices, 664803 (10 September 2007); doi: 10.1117/12.738671
Proc. SPIE 6648, Near-field birefringence response in thickness direction of liquid crystal thin film, 664804 (10 September 2007); doi: 10.1117/12.733340
Instrumentation and Metrology II
Proc. SPIE 6648, The helium ion microscope: a new tool for nanomanufacturing, 664806 (28 September 2007); doi: 10.1117/12.742312
Proc. SPIE 6648, Length calibration standards for nano-manufacturing, 664807 (10 September 2007); doi: 10.1117/12.735576
Proc. SPIE 6648, Microstructure of 100 nm damascene copper overburden and lines, 664808 (10 September 2007); doi: 10.1117/12.735021
Proc. SPIE 6648, Nanomanufacturing via fast laser-induced self-organization in thin metal films, 664809 (10 September 2007); doi: 10.1117/12.734490
Integration, Interoperability, and Information Management I
Proc. SPIE 6648, Integration, interoperability, and information management: What are the key issues for nanomanufacturing?, 66480D (12 September 2007); doi: 10.1117/12.735615
Proc. SPIE 6648, Modelling of angle-resolved x-ray photoelectron spectroscopy (ARXPS) intensity ratios for nanocharacterisation of closely packed shell-core nanofibres, 66480F (10 September 2007); doi: 10.1117/12.732364
Proc. SPIE 6648, Optimal architecture of a neural network for a high precision in ellipsometric scatterometry, 66480G (10 September 2007); doi: 10.1117/12.734278
Proc. SPIE 6648, Nano-precision dynamic motion control, 66480H (10 September 2007); doi: 10.1117/12.738689
Proc. SPIE 6648, Combining coordinate measurement and nanometrology for large-range nanoscale metrology, 66480I (10 September 2007); doi: 10.1117/12.733527
Integration, Interoperability, and Information Management II
Proc. SPIE 6648, Computational modeling of laser-induced self-organization in nanoscopic metal films for predictive nanomanufacturing, 66480K (10 September 2007); doi: 10.1117/12.734510
Proc. SPIE 6648, In silico design of metal-dielectric nanocomposites for solar energy applications, 66480L (10 September 2007); doi: 10.1117/12.734531
Proc. SPIE 6648, A CAD integration framework for designing devices with atomic scale resolution, 66480N (10 September 2007); doi: 10.1117/12.735450
Poster Session
Proc. SPIE 6648, A novel low-cost high-throughput probe card scanner analyzer for characterization of magnetic tunnel junctions, 66480P (10 September 2007); doi: 10.1117/12.731143
Proc. SPIE 6648, Silicon test object of the linewidth of the nanometer range for SEM and AFM, 66480R (10 September 2007); doi: 10.1117/12.733134
Proc. SPIE 6648, Measurements of linear sizes of relief elements in the nanometer range using an atomic force microscope, 66480S (10 September 2007); doi: 10.1117/12.733520
Proc. SPIE 6648, Measurements of linear sizes of relief elements in the nanometer range using a scanning electron microscope, 66480T (10 September 2007); doi: 10.1117/12.733566
Proc. SPIE 6648, Spatial redistribution of nano-particles using electrokinetic micro-focuser, 66480V (10 September 2007); doi: 10.1117/12.735440
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