PROCEEDINGS VOLUME 6724
3RD INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: LARGE MIRRORS AND TELESCOPES | 8-12 JULY 2007
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
IN THIS VOLUME

0 Sessions, 67 Papers, 0 Presentations
Session 4-1  (5)
Session 4-2  (10)
Session 4-3  (9)
3RD INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: LARGE MIRRORS AND TELESCOPES
8-12 July 2007
Chengdu, China
Front Matter: Volume 6724
Proc. SPIE 6724, Front Matter: Volume 6724, 672401 (7 December 2007); doi: 10.1117/12.785095
Plenary Session
Proc. SPIE 6724, Immersion and 32nm lithography: now and future, 672402 (19 November 2007); doi: 10.1117/12.782451
Session 4-1
Proc. SPIE 6724, Design, modeling, and fabrication techniques of bulk PZT actuators for MEMS deformable mirrors, 672403 (19 November 2007); doi: 10.1117/12.782453
Proc. SPIE 6724, Calculation of refractive-index distribution of hexagonal GRIN lenses, 672404 (19 November 2007); doi: 10.1117/12.782455
Proc. SPIE 6724, Novel system for optical axis on-line calibration, 672405 (19 November 2007); doi: 10.1117/12.782456
Proc. SPIE 6724, Microfabrication of all-polymer capacitors for electronics, 672406 (19 November 2007); doi: 10.1117/12.782457
Proc. SPIE 6724, New gas sensor head without gas chamber by hollow core PBF, 672407 (19 November 2007); doi: 10.1117/12.782462
Session 4-2
Proc. SPIE 6724, Development of an experimental EUVL system, 672408 (28 November 2007); doi: 10.1117/12.782464
Proc. SPIE 6724, Design and process of low loss bend waveguide of integrated optical gyroscope, 672409 (28 November 2007); doi: 10.1117/12.782494
Proc. SPIE 6724, Rapid nanofabrication with high density pattern with UVN30 chemically amplified resist, 67240A (28 November 2007); doi: 10.1117/12.782497
Proc. SPIE 6724, Key techniques of laser direct writing patterns on spherical substrate, 67240B (19 November 2007); doi: 10.1117/12.782499
Proc. SPIE 6724, Analysis and optimization for effective diffraction area of grating movable light modulator, 67240C (19 November 2007); doi: 10.1117/12.782501
Proc. SPIE 6724, Experimental characterization of optical properties of photon sieve, 67240D (19 November 2007); doi: 10.1117/12.782502
Proc. SPIE 6724, Advances of focused ion beam in micromachining technology, 67240E (19 November 2007); doi: 10.1117/12.782507
Proc. SPIE 6724, Nanoscale cutting mechanism by molecular dynamics simulation, 67240F (19 November 2007); doi: 10.1117/12.782508
Proc. SPIE 6724, Option of resolution enhancement technology in advanced lithography, 67240G (19 November 2007); doi: 10.1117/12.782511
Proc. SPIE 6724, On-line inspection system of surface quality for medical film, 67240H (19 November 2007); doi: 10.1117/12.782512
Session 4-3
Proc. SPIE 6724, Back-illuminated GaN/AIGaN visible-blind photodiodes, 67240I (19 November 2007); doi: 10.1117/12.782514
Proc. SPIE 6724, Measuring the parallelism of the splitter grating used in a soft X-ray laser interferometer, 67240J (19 November 2007); doi: 10.1117/12.782518
Proc. SPIE 6724, Reactive ion beam etching of large-aperture multilayer diffraction gratings by radio frequency ion beam source, 67240K (19 November 2007); doi: 10.1117/12.782520
Proc. SPIE 6724, Parameter optimization of optically excited microresonator by a semiconductor laser subject to optical feedback, 67240L (28 November 2007); doi: 10.1117/12.782522
Proc. SPIE 6724, Solution to improving certain kinds of focusing and leveling measurement system, 67240M (19 November 2007); doi: 10.1117/12.782571
Proc. SPIE 6724, Novel method for measuring axial aberrations of projection optics for lithographic tools, 67240N (19 November 2007); doi: 10.1117/12.782572
Proc. SPIE 6724, Novel algorithm for modeling aberration-induced overlay in lithographic process, 67240O (30 November 2007); doi: 10.1117/12.782679
Proc. SPIE 6724, Foundational study on micro machining with instantaneous tiny grinding wheel based on electro-magneto-rheological effect, 67240P (19 November 2007); doi: 10.1117/12.782682
Proc. SPIE 6724, High efficiency arrangement in comb-drive actuators, 67240Q (19 November 2007); doi: 10.1117/12.782684
Poster Session
Proc. SPIE 6724, Echo signal processing of laser rapid scanning based on wavelet transform, 67240R (19 November 2007); doi: 10.1117/12.782686
Proc. SPIE 6724, Microscopic interferometry for dimensional characterization of MEMS devices, 67240S (19 November 2007); doi: 10.1117/12.782690
Proc. SPIE 6724, Simulation for effect of process parameters on surface profile in thick film photolithography, 67240T (19 November 2007); doi: 10.1117/12.782692
Proc. SPIE 6724, Automatic spin coater for concave spherical substrate, 67240U (19 November 2007); doi: 10.1117/12.782697
Proc. SPIE 6724, Research on laser fuze technology based on MEMS/MOEMS, 67240V (19 November 2007); doi: 10.1117/12.782709
Proc. SPIE 6724, Optics design of refractive-diffractive elimination chromatic aberration system, 67240W (19 November 2007); doi: 10.1117/12.782716
Proc. SPIE 6724, Topography of micromirror for metal MEMS optical switch based on fractal theory, 67240X (19 November 2007); doi: 10.1117/12.782722
Proc. SPIE 6724, Influence of polarization on the optimization of dual BARC structures for hyper-numerical aperture ArF immersion lithography, 67240Y (19 November 2007); doi: 10.1117/12.782725
Proc. SPIE 6724, Resolution enhancement technology for ArF dry lithography at 65 nm node, 67240Z (19 November 2007); doi: 10.1117/12.782730
Proc. SPIE 6724, Novel fabrication technology of polydimethylsiloxane microfluidic chip, 672410 (19 November 2007); doi: 10.1117/12.782732
Proc. SPIE 6724, Impact of molybdenum/silicon multilayer structure on extreme ultraviolet mask fabrication, 672411 (19 November 2007); doi: 10.1117/12.782733
Proc. SPIE 6724, Experimental investigation on thermoelectric generator of micro hybrid power source, 672412 (21 November 2007); doi: 10.1117/12.782827
Proc. SPIE 6724, Human motion capturing system with MEMS accelerometers (notice of removal), 672413 (21 November 2007); doi: 10.1117/12.782829
Proc. SPIE 6724, Neuron network training system for Robot responding intelligently to input light stimuli (notice of removal), 672414 (21 November 2007); doi: 10.1117/12.782831
Proc. SPIE 6724, Location of the micro manipulator based on color recognition of micro images, 672415 (21 November 2007); doi: 10.1117/12.782832
Proc. SPIE 6724, Photoelectron dynamic property of dye sensitized AgCl cubic microcrystals, 672416 (21 November 2007); doi: 10.1117/12.782833
Proc. SPIE 6724, Residual stresses around femtosecond laser ablated grooves in silicon wafer evaluated by nanoindentation, 672417 (21 November 2007); doi: 10.1117/12.782835
Proc. SPIE 6724, Development of a new optical acceleration sensor, 672418 (21 November 2007); doi: 10.1117/12.782837
Proc. SPIE 6724, Femtosecond laser pulses micromaching of GaAs, silicon, fused silica, PMMA, 672419 (21 November 2007); doi: 10.1117/12.782840
Proc. SPIE 6724, Nanolithography in evanescent near field by using nano-filmed noble metal layers, 67241A (21 November 2007); doi: 10.1117/12.782841
Proc. SPIE 6724, Process analysis of silica ablation by F2 laser for MOEMS, 67241B (21 November 2007); doi: 10.1117/12.782844
Proc. SPIE 6724, Study on the electrical and optical characteristics of a silicon electro-optic waveguide modulator using MOS configuration, 67241C (21 November 2007); doi: 10.1117/12.782848
Proc. SPIE 6724, Template technique: a promising approach for well-aligned quantum wires fabrication, 67241D (21 November 2007); doi: 10.1117/12.782850
Proc. SPIE 6724, Substrate patterning for passive matrix organic light-emitting devices by photolithography processing, 67241E (21 November 2007); doi: 10.1117/12.782855
Proc. SPIE 6724, Mechanism influence on fatigue characters of aerial engine blade by laser shock processing, 67241F (21 November 2007); doi: 10.1117/12.782856
Proc. SPIE 6724, Design of a new MEMS-based tunable grating with electrostatic comb drive, 67241G (21 November 2007); doi: 10.1117/12.782857
Proc. SPIE 6724, Mach-Zehnder interferometer for auto-collimated beams in non-channel photonic crystals, 67241H (21 November 2007); doi: 10.1117/12.782887
Proc. SPIE 6724, Optimizing the varied line-space grating with the curvature of grating substrate, 67241I (21 November 2007); doi: 10.1117/12.782893
Proc. SPIE 6724, Study of magnetic nanostructures fabricated using laser interference lithography, 67241J (21 November 2007); doi: 10.1117/12.782895
Proc. SPIE 6724, Comprehensive review of micro/meso-scale machine tools, 67241K (21 November 2007); doi: 10.1117/12.782899
Proc. SPIE 6724, Precise wavelength demodulator used for fiber sensitivity, 67241L (21 November 2007); doi: 10.1117/12.782901
Proc. SPIE 6724, Simulation and fabrication of monolithically integrated MSM/PHEMT 850 nm optical receiver front end, 67241M (28 November 2007); doi: 10.1117/12.782902
Proc. SPIE 6724, Scatter analysis of diffractive surface manufactured by single point diamond turning, 67241N (21 November 2007); doi: 10.1117/12.782914
Proc. SPIE 6724, Fabrication of quantum dot array diffraction grating for soft x-ray spectroscopy, 67241O (21 November 2007); doi: 10.1117/12.782916