PROCEEDINGS VOLUME 6883
MOEMS-MEMS 2008 MICRO AND NANOFABRICATION | 19-24 JANUARY 2008
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics
Proceedings Volume 6883 is from: Logo
MOEMS-MEMS 2008 MICRO AND NANOFABRICATION
19-24 January 2008
San Jose, California, United States
Front Matter: 6883
Proc. SPIE 6883, Front Matter: Volume 6883, 688301 (25 February 2008); doi: 10.1117/12.791927
Micro- and Nanoreplication I
Proc. SPIE 6883, Fabrication of nanophotonic structures for information processing, 688302 (6 February 2008); doi: 10.1117/12.764380
Proc. SPIE 6883, Formation of antireflective structure on the surface of optical glass by molding, 688303 (6 February 2008); doi: 10.1117/12.762408
Proc. SPIE 6883, Fabrication of plasmonic waveguides by nanoimprint and UV lithography, 688304 (6 February 2008); doi: 10.1117/12.762999
Proc. SPIE 6883, Advances in roll to roll processing of optics, 688305 (8 February 2008); doi: 10.1117/12.762668
Nanofabrication I
Proc. SPIE 6883, Silicon photonic wire circuits for on-chip optical interconnects, 688306 (6 February 2008); doi: 10.1117/12.767340
Proc. SPIE 6883, Metamaterials for free space on a chip applications, 688307 (6 February 2008); doi: 10.1117/12.768148
Proc. SPIE 6883, Fabrication techniques for creating a thermally isolated TM-FPA (thermal microphotonic focal plane array), 688308 (6 February 2008); doi: 10.1117/12.764632
Proc. SPIE 6883, Toward sub-10-nm resolution zone plates using the overlay nanofabrication processes, 688309 (12 February 2008); doi: 10.1117/12.768878
Micro- and Nanoreplication II
Proc. SPIE 6883, Microtransfer molding of SU-8 micro-optics, 68830C (6 February 2008); doi: 10.1117/12.769694
Proc. SPIE 6883, Step and flash imprint process integration techniques for photonic crystal patterning: template replication through wafer patterning irrespective of tone, 68830D (6 February 2008); doi: 10.1117/12.771302
Micro- and Nano-Optics
Proc. SPIE 6883, Nonplanar surface structures of inorganic materials fabricated by femtosecond laser lithography, 68830E (12 February 2008); doi: 10.1117/12.762542
Proc. SPIE 6883, Spin-on-glass smoothing of diamond turned optics for use in the extreme ultraviolet regime, 68830F (12 February 2008); doi: 10.1117/12.769625
Proc. SPIE 6883, Free-form machining for micro-imaging systems, 68830G (6 February 2008); doi: 10.1117/12.769689
Proc. SPIE 6883, Hollow waveguide optimization for fluorescence based detection, 68830H (6 February 2008); doi: 10.1117/12.763448
3D Nanofabrication
Proc. SPIE 6883, Three-dimensional recording inside dielectrics for photonic applications, 68830I (6 February 2008); doi: 10.1117/12.762977
Proc. SPIE 6883, Fabrication of variable effective refractive index artificial media, 68830J (19 February 2008); doi: 10.1117/12.764188
Proc. SPIE 6883, Three-dimensional chiral photonic crystals by direct laser writing, 68830K (6 February 2008); doi: 10.1117/12.762575
Proc. SPIE 6883, Metallo-dielectric nanophotonic materials via direct laser writing and electroless metallization, 68830L (6 February 2008); doi: 10.1117/12.760824
Materials: Deposition and Etching
Proc. SPIE 6883, New approach for antireflective fused silica surfaces by statistical nanostructures, 68830N (6 February 2008); doi: 10.1117/12.767778
Proc. SPIE 6883, Grayscale homogenizers in calcium fluoride, 68830O (6 February 2008); doi: 10.1117/12.767531
Proc. SPIE 6883, Spectroscopic ellipsometry characterization of silicon/silicon-dioxide superlattices for photoluminescence and electroluminescence, 68830P (6 February 2008); doi: 10.1117/12.768709
Nanofabrication II
Proc. SPIE 6883, Fabrication and testing of plasmonic optimized transmission and reflection coatings, 68830R (6 February 2008); doi: 10.1117/12.763921
Proc. SPIE 6883, Fabrication approaches for metallo-dielectric plasmonic waveguides, 68830S (7 February 2008); doi: 10.1117/12.768161
Proc. SPIE 6883, Bottom-up tailoring of photonic nanofibers, 68830T (6 February 2008); doi: 10.1117/12.761762
Applications
Proc. SPIE 6883, Highly dispersive dielectric transmission gratings with 100% diffraction efficiency, 68830U (6 February 2008); doi: 10.1117/12.767783
Proc. SPIE 6883, Spiral zone plate imaging for soft x-ray microscopy, 68830V (19 February 2008); doi: 10.1117/12.769892
Proc. SPIE 6883, Tailored surfaces for managing thermal emission: plasmon/photon coupling using diffractive optics technology, 68830W (6 February 2008); doi: 10.1117/12.764096
Proc. SPIE 6883, 100% reflectivity from a monolithic dielectric microstructured surface, 68830X (6 February 2008); doi: 10.1117/12.767775
Proc. SPIE 6883, Coherent thermal source formed by periodic microcavities, 68830Y (6 February 2008); doi: 10.1117/12.768216
Poster Session
Proc. SPIE 6883, A fabrication technique for microlens array with high fill-factor and small radius of curvature, 68830Z (6 February 2008); doi: 10.1117/12.760927
Proc. SPIE 6883, Design of axially super-resolving phase pupil filter for high-numerical aperture applications, 688310 (6 February 2008); doi: 10.1117/12.761022
Proc. SPIE 6883, Experiments and characterization of two photon polymerization using 1 kHz femtosecond laser system, 688311 (6 February 2008); doi: 10.1117/12.763715
Proc. SPIE 6883, Enhancing direct-write laser control techniques for bimetallic grayscale photomasks, 688312 (6 February 2008); doi: 10.1117/12.765006
Proc. SPIE 6883, Fabrication of 3D polymer photonic crystals for near-IR applications, 688313 (6 February 2008); doi: 10.1117/12.768698
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