PROCEEDINGS VOLUME 6884
MOEMS-MEMS 2008 MICRO AND NANOFABRICATION | 19-24 JANUARY 2008
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
Proceedings Volume 6884 is from: Logo
MOEMS-MEMS 2008 MICRO AND NANOFABRICATION
19-24 January 2008
San Jose, California, United States
Front Matter: 6884
Proc. SPIE 6884, Front Matter: Volume 6884, 688401 (28 February 2008); doi: 10.1117/12.791928
Plenary Paper
Proc. SPIE 6884, MEMS reliability: coming of age, 688402 (19 February 2008); doi: 10.1117/12.791010
MEMS Reliability
Proc. SPIE 6884, Understanding and improving longevity in RF MEMS capacitive switches, 688403 (18 February 2008); doi: 10.1117/12.770586
Proc. SPIE 6884, Experimental study of electrical breakdown in MEMS devices with micrometer scale gaps, 688404 (14 February 2008); doi: 10.1117/12.763195
Proc. SPIE 6884, Degradation evaluation of microelectromechanical thermal actuators, 688405 (18 February 2008); doi: 10.1117/12.760918
MEMS/MNT Analytical Techniques
Proc. SPIE 6884, Development of nondestructive testing/evaluation methodology for MEMS, 688407 (18 February 2008); doi: 10.1117/12.759659
Proc. SPIE 6884, Measurement of thin films and interfacial surface roughness using SWLI, 688408 (18 February 2008); doi: 10.1117/12.762824
Proc. SPIE 6884, Reliability of MEMS devices in shock and vibration overload situations, 688409 (18 February 2008); doi: 10.1117/12.763617
Proc. SPIE 6884, Mechanics of the dynamic release process for stiction failed microcantilever beams using structural vibrations, 68840A (19 February 2008); doi: 10.1117/12.783835
MEMS in Homeland Security and Space Applications
Proc. SPIE 6884, A perspective on the reliability of MEMS-based components for telecommunications, 68840B (18 February 2008); doi: 10.1117/12.773640
Proc. SPIE 6884, Reliability testing and analysis of safing and arming devices for army fuzes, 68840C (19 February 2008); doi: 10.1117/12.765221
Proc. SPIE 6884, Interferometric characterization of MOEMS devices in cryogenic environment for astronomical instrumentation, 68840D (14 February 2008); doi: 10.1117/12.768410
Proc. SPIE 6884, Qualification testing of engineering camera and platinum resistance thermometer (PRT) sensors for Mars Science Laboratory (MSL) project under extreme temperatures to assess reliability and to enhance mission assurance, 68840E (18 February 2008); doi: 10.1117/12.765274
MEMS Assembly
Proc. SPIE 6884, Measuring MEMS through silicon caps, 68840F (18 February 2008); doi: 10.1117/12.772112
Proc. SPIE 6884, Characterization of microresistance welding with electrothermal actuator for microassembly, 68840G (18 February 2008); doi: 10.1117/12.765665
Proc. SPIE 6884, Study of Ag-In solder as low temperature wafer bonding intermediate layer, 68840H (20 February 2008); doi: 10.1117/12.762046
Proc. SPIE 6884, Microfabricated implantable pressure sensor for flow measurement, 68840I (18 February 2008); doi: 10.1117/12.763740
Proc. SPIE 6884, Photosensitive etch protection coating for silicon wet-etch applications, 68840J (18 February 2008); doi: 10.1117/12.778246
MEMS Packaging
Proc. SPIE 6884, MEMS as low-cost high-volume semiconductor solutions: it's all in the packaging and assembly, 68840K (19 February 2008); doi: 10.1117/12.778250
Proc. SPIE 6884, Measuring mass flows in hermetically sealed MEMS and MOEMS to ensure device reliability, 68840L (20 February 2008); doi: 10.1117/12.760823
Proc. SPIE 6884, A new model for vacuum quality and lifetime prediction in hermetic vacuum bonded MEMS, 68840M (14 February 2008); doi: 10.1117/12.761140
Proc. SPIE 6884, Challenges of designing and processing extreme low-G microelectromechanical system (MEMS) accelerometers, 68840O (14 February 2008); doi: 10.1117/12.778244
Proc. SPIE 6884, Low-temperature vacuum hermetic wafer-level package for uncooled microbolometer FPAs, 68840P (18 February 2008); doi: 10.1117/12.761324
MEMS Characterization and Simulation
Proc. SPIE 6884, Electrical measurement of undercut in surface micromachining, 68840R (18 February 2008); doi: 10.1117/12.764417
Proc. SPIE 6884, Support for microsystems simulation: Are we watching the clock?, 68840S (19 February 2008); doi: 10.1117/12.764500
Proc. SPIE 6884, Confocal microscopy scanned by digital micromirror device with stray light filters, 68840T (19 February 2008); doi: 10.1117/12.758830
Poster Session
Proc. SPIE 6884, Uncertainty analysis on optical testing with a Shack-Hartmann sensor and a point source, 68840U (14 February 2008); doi: 10.1117/12.762505
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