PROCEEDINGS VOLUME 6993
SPIE PHOTONICS EUROPE | 7-11 APRIL 2008
MEMS, MOEMS, and Micromachining III
Proceedings Volume 6993 is from: Logo
SPIE PHOTONICS EUROPE
7-11 April 2008
Strasbourg, France
Front Matter
Proc. SPIE 6993, Front Matter: Volume 6993, 699301 (12 May 2008); doi: 10.1117/12.797940
MOEMS Devices and Systems I
Proc. SPIE 6993, NEMS/MEMS cantilever-based biosensors: addressing the open issues, 699302 (24 April 2008); doi: 10.1117/12.787016
Proc. SPIE 6993, Magnetic actuated FR4 scanners for compact spectrometers, 699303 (24 April 2008); doi: 10.1117/12.785375
Proc. SPIE 6993, Micromachined multicavity grey body emitter for the use in MIR spectroscopic systems, 699304 (24 April 2008); doi: 10.1117/12.780859
Proc. SPIE 6993, Optimisation and characterisation of parabolic membrane mirrors, 699305 (25 April 2008); doi: 10.1117/12.780758
MOEMS Devices and Systems II
Proc. SPIE 6993, New technologies for tunable micro-optics, 699306 (28 April 2008); doi: 10.1117/12.787018
Proc. SPIE 6993, Fabrication of polymer micro-optical components for integration in silicon MOEMS, 699307 (25 April 2008); doi: 10.1117/12.781067
Proc. SPIE 6993, Electrostatically-actuated grating light modulator fabricated using SU-8 photoresist, 699308 (24 April 2008); doi: 10.1117/12.782157
Microfabrication and Microfluidics I
Proc. SPIE 6993, Optofluidics and optoelectronic tweezers, 69930A (6 May 2008); doi: 10.1117/12.787019
Proc. SPIE 6993, Micromachining of InP/InGaAs multiple membrane/airgap structures for tunable optical devices, 69930B (25 April 2008); doi: 10.1117/12.781359
Proc. SPIE 6993, Vacuum isostatic micro molding of microfluidic structures into polytetrafluoroethylene (PTFE) materials, 69930C (24 April 2008); doi: 10.1117/12.781423
Microfabrication and Microfluidics II
Proc. SPIE 6993, Technology development for micromirror arrays with high optical fill factor and stable analogue deflection integrated on CMOS substrates, 69930D (25 April 2008); doi: 10.1117/12.787015
Proc. SPIE 6993, Selective wet etching of AlInN layers for nitride-based MEMS and photonic device structures, 69930E (24 April 2008); doi: 10.1117/12.781881
Proc. SPIE 6993, Review of production of microfluidic devices: material, manufacturing and metrology, 69930F (25 April 2008); doi: 10.1117/12.781942
Poster Session
Proc. SPIE 6993, Light concentrating micromirror arrays for photovoltaics, 69930G (25 April 2008); doi: 10.1117/12.781027
Proc. SPIE 6993, A microelectromechanical force actuator for nano-tensile testing system, 69930H (25 April 2008); doi: 10.1117/12.780400
Proc. SPIE 6993, Feasibility study for a MEMS modulator suitable for optical system network signalling, 69930I (25 April 2008); doi: 10.1117/12.779113
Proc. SPIE 6993, Determination of in-plane displacement of MEMS by means of an AFM sensor, 69930J (25 April 2008); doi: 10.1117/12.780407
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