PROCEEDINGS VOLUME 6995
SPIE PHOTONICS EUROPE | 7-11 APRIL 2008
Optical Micro- and Nanometrology in Microsystems Technology II
Proceedings Volume 6995 is from: Logo
SPIE PHOTONICS EUROPE
7-11 April 2008
Strasbourg, France
Front Matter
Proc. SPIE 6995, Front Matter: Volume 6995, 699501 (20 May 2008); doi: 10.1117/12.797942
Digital Holography
Proc. SPIE 6995, Sensitivity increase in digital holographic interferometry, 699502 (25 April 2008); doi: 10.1117/12.781532
Proc. SPIE 6995, Dual-wavelength digital holographic microscopy with sub-nanometer axial accuracy, 699503 (25 April 2008); doi: 10.1117/12.781263
Proc. SPIE 6995, Undersampled digital holographic interferometry, 699504 (25 April 2008); doi: 10.1117/12.781365
Proc. SPIE 6995, Digital holography in combination with diffraction grating to get super-resolution, 699505 (20 May 2008); doi: 10.1117/12.782111
Proc. SPIE 6995, Phase map retrieval in digital holography: avoiding the under-sampling effect by a lateral shear approach, 699506 (25 April 2008); doi: 10.1117/12.782780
Proc. SPIE 6995, Application of light emitting diodes in digital holographic microscopy, 699507 (25 April 2008); doi: 10.1117/12.781186
Proc. SPIE 6995, Adaptive measurement of deformation and shape by compensation using TV holography and digital holography, 699508 (25 April 2008); doi: 10.1117/12.782182
Nanoscale Metrology and Sensors for Near-Field Microscopy
Proc. SPIE 6995, Sensitivity enhancement of integrated optical near field sensors, 699509 (25 April 2008); doi: 10.1117/12.780006
Proc. SPIE 6995, Integrated optic Michelson interferometer for sensors application, 69950A (20 May 2008); doi: 10.1117/12.780791
Proc. SPIE 6995, Development features in large-range nanoscale coordinate metrology, 69950B (25 April 2008); doi: 10.1117/12.780821
Proc. SPIE 6995, Electron beam nanolithography and testing: ways of increasing the resolution and the throughput, 69950D (24 April 2008); doi: 10.1117/12.781847
Inspection of MEMS
Proc. SPIE 6995, AlN driven microcantilever actuators: modeling, fabrication, characterization, 69950E (25 April 2008); doi: 10.1117/12.781262
Proc. SPIE 6995, Characterization of MEMS cantilevers using lensless digital holographic microscope, 69950F (25 April 2008); doi: 10.1117/12.782981
Proc. SPIE 6995, Nondestructive determination of drying deformations in cement paste by means of ESEM and digital image analysis, 69950G (25 April 2008); doi: 10.1117/12.780731
Proc. SPIE 6995, Numerical simulations of interferometrical deformation measurements in multi-layered objects, 69950H (25 April 2008); doi: 10.1117/12.784444
Proc. SPIE 6995, Fusion of micro-metrology techniques for the flexible inspection of MEMS/MOEMS assembly, 69950I (1 May 2008); doi: 10.1117/12.779952
High Resolution Metrology and Specialised Techniques
Proc. SPIE 6995, Benchmarking instrumentation tools for the characterization of microlenses within the EC Network of Excellence on Micro-Optics (NEMO), 69950J (25 April 2008); doi: 10.1117/12.783514
Proc. SPIE 6995, Interest of second harmonic generation imaging to study collageneous matrix modification in osteoarthritis disease, 69950K (25 April 2008); doi: 10.1117/12.781051
Proc. SPIE 6995, Real time and in situ monitoring of microlenses fabricated with deep proton writing, 69950L (25 April 2008); doi: 10.1117/12.780203
Proc. SPIE 6995, Precision metrology length standard based on femtosecond stabilized laser, 69950M (25 April 2008); doi: 10.1117/12.782038
Proc. SPIE 6995, A multipoint diffraction strain sensor using a micro-lens array: from theory to application, 69950N (25 April 2008); doi: 10.1117/12.782614
Proc. SPIE 6995, Comparison of 127I2-stabilized frequency-doubled Nd: YAG lasers and evaluation of frequency shifts caused by iodine cells, 69950O (25 April 2008); doi: 10.1117/12.780213
Topography and Surface Measurements
Proc. SPIE 6995, Characterization of materials and film stacks for accurate surface topography measurement using a white-light optical profiler, 69950P (25 April 2008); doi: 10.1117/12.782836
Proc. SPIE 6995, Improved micro topography measurement by LCoS-based fringe projection and z-stitching, 69950Q (26 April 2008); doi: 10.1117/12.781822
Proc. SPIE 6995, Photonic wires sidewall roughness measures using atomic force microscope capabilities, 69950R (25 April 2008); doi: 10.1117/12.778874
Scatterometry and Diffusion Techniques
Proc. SPIE 6995, Computational methods estimating uncertainties for profile reconstruction in scatterometry, 69950T (25 April 2008); doi: 10.1117/12.781006
Proc. SPIE 6995, On quasi-phase-conjugated arrays, 69950U (25 April 2008); doi: 10.1117/12.781360
Proc. SPIE 6995, Modeling reflection on coated steel surfaces, 69950V (1 May 2008); doi: 10.1117/12.781157
Proc. SPIE 6995, Full-field analysis of a liquid crystal cell using a low birefringence polariscope, 69950X (25 April 2008); doi: 10.1117/12.782261
Image Reconstruction and Signal Processing
Proc. SPIE 6995, Investigation of methods to set up the normal vector field for the differential method, 69950Y (25 April 2008); doi: 10.1117/12.780482
Proc. SPIE 6995, Phase retrieval from the spectral interferograms by windowed Fourier transform, 69950Z (1 May 2008); doi: 10.1117/12.778303
Proc. SPIE 6995, Wrap-free phase retrieval using a series of intensity measurements produced by tuning the illumination wavelength, 699510 (25 April 2008); doi: 10.1117/12.782477
Proc. SPIE 6995, A Fourier-optics-based non-invasive and vibration-insensitive micron-size object analyzer for quality control assessment, 699511 (25 April 2008); doi: 10.1117/12.779149
Proc. SPIE 6995, Ultra-fast wavefront analyser for high volume production of camera modules lenses, 699512 (25 April 2008); doi: 10.1117/12.781433
Poster Session
Proc. SPIE 6995, Pixel size determination of a monitor using moiré fringe, 699513 (20 May 2008); doi: 10.1117/12.782592
Proc. SPIE 6995, Accurate three-dimensional detection of micro-particles by means of digital holographic microscopy, 699514 (25 April 2008); doi: 10.1117/12.781210
Proc. SPIE 6995, Energy characteristics of excitons in InGaN/GaN heterostructures, 699515 (25 April 2008); doi: 10.1117/12.780789
Proc. SPIE 6995, In-situ imaging of interlayer nanodeformation with improved differential confocal microscopy, 699516 (25 April 2008); doi: 10.1117/12.780267
Proc. SPIE 6995, Investigation of high reflectivity optical phase-conjugation in BaTiO3, 699517 (25 April 2008); doi: 10.1117/12.782289
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