PROCEEDINGS VOLUME 7204
SPIE MOEMS-MEMS: MICRO- AND NANOFABRICATION | 24-29 JANUARY 2009
Micromachining and Microfabrication Process Technology XIV
IN THIS VOLUME

0 Sessions, 14 Papers, 0 Presentations
Front Matter  (1)
Devices  (6)
Proceedings Volume 7204 is from: Logo
SPIE MOEMS-MEMS: MICRO- AND NANOFABRICATION
24-29 January 2009
San Jose, California, United States
Front Matter
Proc. SPIE 7204, Front Matter: Volume 7204, 720401 (10 March 2009); doi: 10.1117/12.828729
Devices
Proc. SPIE 7204, Cost-effective method of manufacturing a 3D MEMS optical switch, 720402 (19 February 2009); doi: 10.1117/12.810065
Proc. SPIE 7204, Uncooled infrared and terahertz detectors based on micromechanical mirror as a radiation pressure sensor, 720403 (19 February 2009); doi: 10.1117/12.812541
Proc. SPIE 7204, A novel fabrication method for semiconductor ring lasers that ensures optimal electrical pumping, 720404 (24 February 2009); doi: 10.1117/12.809715
Proc. SPIE 7204, Optical fiber packaging for MEMS interfacing, 720405 (24 February 2009); doi: 10.1117/12.815170
Proc. SPIE 7204, A high sensitivity hall sensor fabricated on a SOI wafer using surface micromachining technique, 720406 (24 February 2009); doi: 10.1117/12.815203
Proc. SPIE 7204, Sharpened transparent micronozzle fabrication for cell membrane piercing, 720407 (24 February 2009); doi: 10.1117/12.809427
Process: Lasers, Milling, CMP
Proc. SPIE 7204, Stretchable multilayer self-aligned interconnects fabricated using excimer laser photoablation and in situ masking, 720409 (24 February 2009); doi: 10.1117/12.809235
Proc. SPIE 7204, Pulsed laser breaking technique for glass substrates, 72040A (24 February 2009); doi: 10.1117/12.809728
Proc. SPIE 7204, Two-photon polymerization for fabrication of three-dimensional micro- and nanostructures over a large area, 72040C (24 February 2009); doi: 10.1117/12.811125
Proc. SPIE 7204, A study of the influence of cutting parameters on micromilling of steel with cubic boron nitride (CBN) tools, 72040D (24 February 2009); doi: 10.1117/12.808554
Special Session on CAD
Proc. SPIE 7204, 1/f noise in single-walled carbon nanotube films, 72040J (24 February 2009); doi: 10.1117/12.807407
Poster Session
Proc. SPIE 7204, Polymeric nanosieves fabricated by UV lithography, 72040N (24 February 2009); doi: 10.1117/12.808601
Proc. SPIE 7204, Nanorod measurement-layer separate structure for nanorod-character measurement, simulation, and application as sensor devices, 72040P (24 February 2009); doi: 10.1117/12.808673
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