PROCEEDINGS VOLUME 7205
SPIE MOEMS-MEMS: MICRO- AND NANOFABRICATION | 24-29 JANUARY 2009
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II
Proceedings Volume 7205 is from: Logo
SPIE MOEMS-MEMS: MICRO- AND NANOFABRICATION
24-29 January 2009
San Jose, California, United States
Front Matter
Proc. SPIE 7205, Front Matter: Volume 7205, 720501 (11 March 2009); doi: 10.1117/12.828730
Nanofabrication I: Photonic Nanostructures
Proc. SPIE 7205, Wire-grid polarizer for the UV spectral region, 720504 (19 February 2009); doi: 10.1117/12.807993
Proc. SPIE 7205, Two-dimensional photonic crystal polarization filter with dual-band and wide working wavelength range, 720505 (19 February 2009); doi: 10.1117/12.809037
Biologically Inspired Nanofabrication
Proc. SPIE 7205, Reproduction, mass production, and control of the Morpho butterfly's blue, 720506 (24 February 2009); doi: 10.1117/12.808574
Proc. SPIE 7205, Replication of biotemplates for the development of highly efficient biomimetic optical metamaterials and devices, 720507 (24 February 2009); doi: 10.1117/12.808112
Proc. SPIE 7205, Spectroscopy nanofabrication and biophotonics, 720508 (24 February 2009); doi: 10.1117/12.812047
Micro- and Nano-Etching
Proc. SPIE 7205, Sub-100-nm pattern transfer on compound semiconductor using sol-gel-based TiO2 resist, 720509 (24 February 2009); doi: 10.1117/12.808647
Proc. SPIE 7205, Vapor phase release of silicon nanostructures for optomechanics application, 72050A (24 February 2009); doi: 10.1117/12.809813
Proc. SPIE 7205, Shallow Fresnel lens fabrication using grayscale lithography made by high energy beam sensitive mask (HEBS) technology and reactive ion etching, 72050B (24 February 2009); doi: 10.1117/12.809376
Nanofabrication II: Growth and Deposition
Proc. SPIE 7205, An evaporative co-assembly method for highly ordered inverse opal films, 72050F (24 February 2009); doi: 10.1117/12.809656
Proc. SPIE 7205, Microlithographically patterned optical thin film coatings, 72050G (24 February 2009); doi: 10.1117/12.809615
3-D Nanofabrication
Proc. SPIE 7205, Metallodielectric 3D photonic crystals prepared by metallization of optically microfabricated polymeric templates, 72050I (19 February 2009); doi: 10.1117/12.808725
Proc. SPIE 7205, Fabrication of large area woodpile structure in polymer, 72050K (24 February 2009); doi: 10.1117/12.809670
Applications
Proc. SPIE 7205, Advances in diffractive nanophotonics enabled by commercial photoreduction lithography, 72050L (24 February 2009); doi: 10.1117/12.811619
Proc. SPIE 7205, Fabrication of diffractive optics for dense optical interconnects in optical computing, 72050M (24 February 2009); doi: 10.1117/12.811598
Proc. SPIE 7205, Diffraction gratings for compact integrated optical structures, 72050O (24 February 2009); doi: 10.1117/12.809029
Nanofabrication III: Metallic Nanostructures and Plasmonics
Proc. SPIE 7205, Nanoskiving: a novel method for nanofabrication and its applications in nanophotonics, 72050P (24 February 2009); doi: 10.1117/12.810803
Proc. SPIE 7205, Fabrication of surface plasmon resonators by nanoskiving single-crystalline gold microplates, 72050Q (24 February 2009); doi: 10.1117/12.807813
Proc. SPIE 7205, E-beam assisted fabrication of a subwavelength aluminum mesh, 72050R (24 February 2009); doi: 10.1117/12.809833
Proc. SPIE 7205, Fabrication of novel plasmonics-active substrates, 72050S (19 February 2009); doi: 10.1117/12.809887
Micro- and Nanoreplication
Proc. SPIE 7205, Roll-to-roll manufacturing of subwavelength optics, 72050T (24 February 2009); doi: 10.1117/12.809492
Proc. SPIE 7205, High-speed roll-to-roll nanoimprint lithography on flexible substrate and mold-separation analysis, 72050U (24 February 2009); doi: 10.1117/12.809821
Proc. SPIE 7205, Ultrafast response of negative index metamaterials in the near-infrared, 72050V (24 February 2009); doi: 10.1117/12.808455
Advanced Lithography
Proc. SPIE 7205, Correlation of fabrication tolerances with the performance of guided-mode-resonance micro-optical components, 72050Y (24 February 2009); doi: 10.1117/12.814514
Laser-based Fabrication for Photonics
Proc. SPIE 7205, In-volume waveguides by fs-laser direct writing in rare-earth-doped fluoride glass and phosphate glass, 720510 (24 February 2009); doi: 10.1117/12.808736
Proc. SPIE 7205, Demonstration of inscription and ablation of phase masks for the production of 1st, 2nd, and 3rd order FBG gratings using a femtosecond laser, 720511 (24 February 2009); doi: 10.1117/12.809175
Proc. SPIE 7205, Dynamic ultrafast laser beam tailoring for multispot photo-inscription of photonic devices in bulk transparent materials, 720512 (24 February 2009); doi: 10.1117/12.808798
Proc. SPIE 7205, Microfabrication of refractive optics, waveguides, microfluidics, and high-aspect ratio structures realized by direct laser lithography, 720513 (24 February 2009); doi: 10.1117/12.808153
Poster Session
Proc. SPIE 7205, Fabrication of two-layer diffractive optical element for single-beam and single-exposure fabrication of diamond-like photonic crystal, 720515 (24 February 2009); doi: 10.1117/12.809626
Proc. SPIE 7205, Characterization of hybrid molding and lithography for SU-8 micro-optical components, 720517 (24 February 2009); doi: 10.1117/12.813463
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