PROCEEDINGS VOLUME 7208
SPIE MOEMS-MEMS: MICRO- AND NANOFABRICATION | 24-29 JANUARY 2009
MOEMS and Miniaturized Systems VIII
Proceedings Volume 7208 is from: Logo
SPIE MOEMS-MEMS: MICRO- AND NANOFABRICATION
24-29 January 2009
San Jose, California, United States
Front Matter
Proc. SPIE 7208, Front Matter: Volume 7208, 720801 (10 March 2009); doi: 10.1117/12.828732
MOEMS-MEMS Plenary Session
Proc. SPIE 7208, The high versatility of silicon based micro-optical modulators, 720802 (24 February 2009); doi: 10.1117/12.828322
MOEMS Components and Systems I
Proc. SPIE 7208, Miniaturized UV/VIS spectrometer made by MOEMS technology, 720803 (19 February 2009); doi: 10.1117/12.808898
Proc. SPIE 7208, Advances in SLM development for microlithography, 720804 (19 February 2009); doi: 10.1117/12.810787
Proc. SPIE 7208, Linear micromirror array for broadband femtosecond pulse shaping in phase and amplitude, 720805 (19 February 2009); doi: 10.1117/12.808162
Proc. SPIE 7208, Large area transmissive modulator for a remotely interrogated MEMS-based optical tag, 720806 (19 February 2009); doi: 10.1117/12.809199
MOEMS Components and Systems II
Proc. SPIE 7208, Fabrication of large-scale monocrystalline silicon micro-mirror arrays using adhesive wafer transfer bonding, 720807 (19 February 2009); doi: 10.1117/12.808694
Proc. SPIE 7208, Integrated position sensing for 2D microscanning mirrors using the SOI device layer as the piezoresistive mechanical-elastic transformer, 720808 (19 February 2009); doi: 10.1117/12.808151
Proc. SPIE 7208, Thermally actuated microshutter for MOEMS applications, 720809 (25 February 2009); doi: 10.1117/12.809776
Proc. SPIE 7208, Fabrication of 3D comb drive microscanners by mechanically induced permanent displacement, 72080A (24 February 2009); doi: 10.1117/12.808210
Proc. SPIE 7208, Micro-assembly of three-dimensional rotary MEMS mirrors, 72080B (24 February 2009); doi: 10.1117/12.807497
MOEMS Components and Systems III
Proc. SPIE 7208, Application of Si LEDs (450nm-750nm) in CMOS integrated circuitry-based MOEMS: simulation and analysis, 72080C (24 February 2009); doi: 10.1117/12.808551
Proc. SPIE 7208, Novel MWIR microspectrometer based on a tunable detector, 72080D (24 February 2009); doi: 10.1117/12.816578
Proc. SPIE 7208, MEMS analyzer for fast determination of mixed gases, 72080E (24 February 2009); doi: 10.1117/12.816231
Waveguide Devices
Proc. SPIE 7208, Silicon oxynitride-based integrated optical switch, 72080F (24 February 2009); doi: 10.1117/12.809650
Special Session: Space and Astronomy Applications I
Proc. SPIE 7208, Micro-interferometer with high throughput for remote sensing, 72080G (24 February 2009); doi: 10.1117/12.808271
Proc. SPIE 7208, Addressable microshutter array for a high-performance infrared miniature dispersive spectrometer, 72080H (24 February 2009); doi: 10.1117/12.810163
Proc. SPIE 7208, New astronomical instrument using MOEMS-based programmable diffraction gratings, 72080I (24 February 2009); doi: 10.1117/12.811165
Proc. SPIE 7208, Advanced microbolometer detectors for a next-generation uncooled FPA for space-based thermal remote sensing, 72080J (24 February 2009); doi: 10.1117/12.810026
Proc. SPIE 7208, Large micromirror array for multi-object spectroscopy in a cryogenic environment, 72080K (24 February 2009); doi: 10.1117/12.811117
Special Session: Space and Astronomy Applications II
Proc. SPIE 7208, Nanosatellite distributed far infrared radiometers, 72080L (24 February 2009); doi: 10.1117/12.814248
Proc. SPIE 7208, MEMS for pico- to micro-satellites, 72080M (24 February 2009); doi: 10.1117/12.810997
Proc. SPIE 7208, Hybrid microtransmitter for free-space optical spacecraft communication: design, manufacturing, and characterization, 72080N (24 February 2009); doi: 10.1117/12.809173
Display and Imaging I
Proc. SPIE 7208, Scanning photon microscope based on a MEMS 2D scanner mirror, 72080O (24 February 2009); doi: 10.1117/12.808139
Proc. SPIE 7208, Liquid-filled varifocal lens on a chip, 72080P (24 February 2009); doi: 10.1117/12.811401
Proc. SPIE 7208, Feedback stabilized deformable membrane mirrors for focus control, 72080Q (24 February 2009); doi: 10.1117/12.812338
Display and Imaging II
Proc. SPIE 7208, Design and fabrication of a MEMS mirror for miniature laser projection, 72080R (24 February 2009); doi: 10.1117/12.807639
Proc. SPIE 7208, Empirical analysis of form drag damping for scanning micromirrors, 72080S (24 February 2009); doi: 10.1117/12.809886
Proc. SPIE 7208, Fine-pitch high-efficiency spatial optical modulator for mobile display applications, 72080T (24 February 2009); doi: 10.1117/12.808892
Additional Paper
Proc. SPIE 7208, Integrated incandescent microlamp coupled to SiOxNy waveguide, 72080U (19 February 2009); doi: 10.1117/12.809628
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