PROCEEDINGS VOLUME 7390
SPIE EUROPE OPTICAL METROLOGY | 14-18 JUNE 2009
Modeling Aspects in Optical Metrology II
IN THIS VOLUME

0 Sessions, 50 Papers, 0 Presentations
Front Matter  (1)
Proceedings Volume 7390 is from: Logo
SPIE EUROPE OPTICAL METROLOGY
14-18 June 2009
Munich, Germany
Front Matter
Proc. SPIE 7390, Front Matter: Volume 7390, 739001 (17 June 2009); doi: 10.1117/12.835823
Optical Systems
Proc. SPIE 7390, Lithography simulation: modeling techniques and selected applications, 739002 (17 June 2009); doi: 10.1117/12.829409
Proc. SPIE 7390, Metallic nonlinear magneto-optical nonreciprocal isolator, 739003 (17 June 2009); doi: 10.1117/12.827300
Proc. SPIE 7390, Traceability of the F25 vision system for calibration of grated structures with submicron accuracy, 739004 (17 June 2009); doi: 10.1117/12.827545
Proc. SPIE 7390, Inverse optical design: building and testing an artificial eye, 739005 (17 June 2009); doi: 10.1117/12.827722
Proc. SPIE 7390, Inspection of misalignment factors in lens assembly, 739006 (17 June 2009); doi: 10.1117/12.827446
Wave Propagation and Polarization
Proc. SPIE 7390, Measurement errors from internal shear strain within fiber-Bragg-grating sensors, 739007 (17 June 2009); doi: 10.1117/12.827667
Proc. SPIE 7390, Variable waveplate-based polarimeter for polarimetric metrology, 739008 (17 June 2009); doi: 10.1117/12.828045
Proc. SPIE 7390, Spatial elliptical polariscope for polarization distribution measurements, 739009 (17 June 2009); doi: 10.1117/12.827505
Proc. SPIE 7390, Temperature sensitivity of TE double-negative metamaterial optical sensor, 73900A (17 June 2009); doi: 10.1117/12.827822
Interferometry and Phase
Proc. SPIE 7390, Adaptive Bessel-autocorrelation of ultrashort pulses with phase-only spatial light modulators, 73900B (17 June 2009); doi: 10.1117/12.827026
Proc. SPIE 7390, Assistance system for optical sensors, 73900C (17 June 2009); doi: 10.1117/12.827339
Proc. SPIE 7390, Shape measurement of diffuse and transparent objects by two wavelength contouring using phase retrieval, 73900D (17 June 2009); doi: 10.1117/12.827466
Proc. SPIE 7390, Sensing performance of a Shack Hartmann wavefront sensor versus the properties of the light beam, 73900E (17 June 2009); doi: 10.1117/12.827327
Proc. SPIE 7390, Full-field absolute phase measurements in the heterodyne interferometer with an electro-optic modulator, 73900F (17 June 2009); doi: 10.1117/12.828391
Proc. SPIE 7390, Method for measuring the refractive index distribution of a GRIN lens with heterodyne interferometry, 73900G (17 June 2009); doi: 10.1117/12.827319
Maxwell Solvers
Proc. SPIE 7390, 3D finite-element simulations of enhanced light transmission through arrays of holes in metal films, 73900H (17 June 2009); doi: 10.1117/12.827543
Proc. SPIE 7390, Reduced basis method for fast and robust simulation of electromagnetic scattering problems, 73900I (17 June 2009); doi: 10.1117/12.827588
Proc. SPIE 7390, Comparison of electromagnetic field solvers for the 3D analysis of plasmonic nanoantennas, 73900J (18 June 2009); doi: 10.1117/12.828036
Proc. SPIE 7390, Method of matrix Riccati equation for nanoshape control of diffraction gratings, 73900K (17 June 2009); doi: 10.1117/12.827863
Surface Metrology
Proc. SPIE 7390, Power spectral density specification and analysis of large optical surfaces, 73900L (17 June 2009); doi: 10.1117/12.823844
Proc. SPIE 7390, Measuring and modelling the appearance of coated steel surfaces, 73900M (17 June 2009); doi: 10.1117/12.827354
Proc. SPIE 7390, Analysis of the positioning error on lateral shearing surface reconstruction with a Fizeau interferometer, 73900N (17 June 2009); doi: 10.1117/12.827779
Proc. SPIE 7390, A model based approach to reference-free straightness measurement at the Nanometer Comparator, 73900O (17 June 2009); doi: 10.1117/12.827681
Scatterometry
Proc. SPIE 7390, Angle-resolved optical metrology using multi-technique nested uncertainties, 73900P (17 June 2009); doi: 10.1117/12.827676
Proc. SPIE 7390, On numerical reconstructions of lithographic masks in DUV scatterometry, 73900Q (17 June 2009); doi: 10.1117/12.827547
Proc. SPIE 7390, Numerical investigations of prospects, challenges, and limitations of non-imaging optical metrology of structured surfaces, 73900R (17 June 2009); doi: 10.1117/12.830663
Proc. SPIE 7390, Critical dimension measurements using a 193 nm scatterfield microscope, 73900S (29 June 2009); doi: 10.1117/12.827679
Proc. SPIE 7390, Evaluation of measurement uncertainties in EUV scatterometry, 73900T (17 June 2009); doi: 10.1117/12.827018
Proc. SPIE 7390, Nanoshaped objects of equal phase volume: scattered far field comparison, 73900U (17 June 2009); doi: 10.1117/12.827514
Proc. SPIE 7390, Specular and diffuse scattering from random asperities of any profile using the rigorous method for x-rays and neutrons, 73900V (17 June 2009); doi: 10.1117/12.827444
Holography and OCT
Proc. SPIE 7390, Estimation of 3D reconstruction errors in a stereo-vision system, 73900X (17 June 2009); doi: 10.1117/12.827346
Proc. SPIE 7390, Towards deconvolution in holography, 73900Y (17 June 2009); doi: 10.1117/12.827507
Proc. SPIE 7390, Roughness measurement methodology according to DIN 4768 using optical coherence tomography (OCT), 73900Z (17 June 2009); doi: 10.1117/12.827748
Poster Session
Proc. SPIE 7390, Modeling of adaptive compensation of aberrations of optical system using deformable mirror, 739010 (17 June 2009); doi: 10.1117/12.827275
Proc. SPIE 7390, Optimized square Fresnel zone plates for microoptics applications, 739011 (17 June 2009); doi: 10.1117/12.827546
Proc. SPIE 7390, Optical testing of a parabolic trough solar collector by a null screen with stitching, 739012 (17 June 2009); doi: 10.1117/12.827829
Proc. SPIE 7390, Talbot effect with aberrated beams, 739013 (17 June 2009); doi: 10.1117/12.827539
Proc. SPIE 7390, Modelling of laser range measurement of underwater objects in maritime environment, 739014 (17 June 2009); doi: 10.1117/12.827334
Proc. SPIE 7390, Numerical and experimental study of the characteristic functions of polygon scanners, 739015 (17 June 2009); doi: 10.1117/12.827443
Proc. SPIE 7390, Determination of phase and modulation transfer function (PTF and MTF) of a printer by the convolution of transmission function measurement, 739016 (17 June 2009); doi: 10.1117/12.827474
Proc. SPIE 7390, Optical characteristics of a one-dimensional photonic crystal with an additional regular layer, 739017 (17 June 2009); doi: 10.1117/12.828222
Proc. SPIE 7390, Modeling of the polarization mode dispersion in the single mode optical fiber links, 739018 (17 June 2009); doi: 10.1117/12.827481
Proc. SPIE 7390, Far field of binary phase gratings with errors in the height of the strips, 739019 (17 June 2009); doi: 10.1117/12.827580
Proc. SPIE 7390, Fabrication of tunable grating with silver nanoparticles, 73901A (17 June 2009); doi: 10.1117/12.827447
Proc. SPIE 7390, Interferometric Ronchi test by using substructured gratings, 73901B (17 June 2009); doi: 10.1117/12.827302
Proc. SPIE 7390, Depth-of-field extension and 3D reconstruction in digital holographic microscopy, 73901C (17 June 2009); doi: 10.1117/12.827350
Proc. SPIE 7390, Diffraction microtomography with sample rotation: primary result on the influence of a missing apple core in the recorded frequency space, 73901D (17 June 2009); doi: 10.1117/12.827578
Proc. SPIE 7390, Prospects and limits of the Rayleigh Fourier approach for diffraction modelling in scatterometry and lithography, 73901E (17 June 2009); doi: 10.1117/12.833489
Holography and OCT
Proc. SPIE 7390, Multiplexing and demultiplexing of digital holograms recorded in microscopic configuration, 73901F (17 June 2009); doi: 10.1117/12.827984
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