PROCEEDINGS VOLUME 7510
INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTATION AND TECHNOLOGY | 19-22 OCTOBER 2009
2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications
IN THIS VOLUME

0 Sessions, 22 Papers, 0 Presentations
Front Matter  (1)
Session 1  (5)
Session 2  (3)
INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTATION AND TECHNOLOGY
19-22 October 2009
Shanghai, China
Front Matter
Proc. SPIE 7510, Front Matter: Volume 7510, 751001 (1 December 2009); doi: 10.1117/12.846028
Session 1
Proc. SPIE 7510, Tunable RF MEMS capacitor for wireless communication, 751002 (25 November 2009); doi: 10.1117/12.845903
Proc. SPIE 7510, Mechanical design and system-lever analysis of a novel micromirror array, 751003 (20 November 2009); doi: 10.1117/12.838005
Proc. SPIE 7510, Out-of-plane vibration measuring technique based on dynamic AFM, 751004 (20 November 2009); doi: 10.1117/12.835939
Proc. SPIE 7510, A simulation of dielectrophoresis force actuated liquid lens, 751005 (20 November 2009); doi: 10.1117/12.837733
Proc. SPIE 7510, Detection system of capillary array electrophoresis microchip based on optical fiber, 751006 (20 November 2009); doi: 10.1117/12.837852
Session 2
Proc. SPIE 7510, A novel evaluating method for the MEMS-based uncooled IR system, 751007 (20 November 2009); doi: 10.1117/12.837424
Proc. SPIE 7510, Optimal algorithm to improve the calculation accuracy of energy deposition for betavoltaic MEMS batteries design, 751008 (20 November 2009); doi: 10.1117/12.838219
Proc. SPIE 7510, Analysis of cylindrical subwavelength diffractive optical elements by an approximate vectorial diffraction method, 751009 (20 November 2009); doi: 10.1117/12.838034
Poster Session
Proc. SPIE 7510, Study on electroforming Ni-Fe alloy microstructure, 75100A (20 November 2009); doi: 10.1117/12.836958
Proc. SPIE 7510, Study of SiNx thin film character with gas flow rate in PECVD, 75100B (20 November 2009); doi: 10.1117/12.837502
Proc. SPIE 7510, The real-time infrared image denoising method of double buffering for microcantilever-based infrared imaging system, 75100C (20 November 2009); doi: 10.1117/12.837646
Proc. SPIE 7510, Reactive Ion Etching of Al-1%Cu alloy thin films, 75100D (20 November 2009); doi: 10.1117/12.837738
Proc. SPIE 7510, Design and simulation of tunable micromirror for two-color microbolometer, 75100E (20 November 2009); doi: 10.1117/12.837798
Proc. SPIE 7510, Simulation and optimal design for deformable mirror supporting structure, 75100F (20 November 2009); doi: 10.1117/12.837830
Proc. SPIE 7510, Influence of PECVD process parameters on the etching Rate of SiN[sub]x[/sub] films, 75100G (20 November 2009); doi: 10.1117/12.837860
Proc. SPIE 7510, An analysis on the urban spatial expansion of Hangzhou based on remote sensing, 75100H (20 November 2009); doi: 10.1117/12.837937
Proc. SPIE 7510, Effect of different support structures on the characteristic of the grating light modulators, 75100I (20 November 2009); doi: 10.1117/12.838239
Proc. SPIE 7510, Kernel regression image processing method for optical readout MEMS based uncooled IRFPA, 75100J (20 November 2009); doi: 10.1117/12.839487
Proc. SPIE 7510, 1-dimension nano-material-based flexible device, 75100K (20 November 2009); doi: 10.1117/12.839864
Proc. SPIE 7510, Analysis and modeling of thermal failure based on a MEMS thermally driven structure, 75100L (20 November 2009); doi: 10.1117/12.845904
Proc. SPIE 7510, Design and characterization of a gas actuated pump for µTAS, 75100M (20 November 2009); doi: 10.1117/12.845914
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