PROCEEDINGS VOLUME 7591
SPIE MOEMS-MEMS | 23-28 JANUARY 2010
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III
Proceedings Volume 7591 is from: Logo
SPIE MOEMS-MEMS
23-28 January 2010
San Francisco, California, United States
Front Matter
Proc. SPIE 7591, Front Matter: Volume 7591, 759101 (24 March 2010); doi: 10.1117/12.861996
Non-Diffraction Limited 3D Laser Lithography
Proc. SPIE 7591, Two-color photo-initiation/inhibition lithography, 759102 (16 February 2010); doi: 10.1117/12.845850
Proc. SPIE 7591, 3D biomedical implants fabricated using direct laser writing, 759105 (16 February 2010); doi: 10.1117/12.840695
Nanofabrication I: Photonic Nanostructures
Proc. SPIE 7591, Fabrication of vertical silicon nanowire photodetector arrays using nanoimprint lithography, 759106 (16 February 2010); doi: 10.1117/12.842276
Proc. SPIE 7591, Critical nanofabrication parameters for the e-beam assisted design of a subwavelength aluminum mesh, 759107 (16 February 2010); doi: 10.1117/12.840546
Proc. SPIE 7591, Low-cost optical microstructures fabricated by imprinting porous silicon, 759108 (16 February 2010); doi: 10.1117/12.842898
Proc. SPIE 7591, Hollow ARROW waveguides on self-aligned pedestals for high-sensitivity optical sensing, 759109 (16 February 2010); doi: 10.1117/12.841010
Proc. SPIE 7591, Inkjet printing techniques for the fabrication of polymer optical waveguides, 75910A (16 February 2010); doi: 10.1117/12.841436
Advanced Lithography
Proc. SPIE 7591, Design, fabrication, and control of scanning plasmonic probe for near-field photolithographic applications, 75910C (16 February 2010); doi: 10.1117/12.842625
Proc. SPIE 7591, Fabrication techniques of high aspect ratio vertical lightpipes using a dielectric photomask, 75910D (16 February 2010); doi: 10.1117/12.840725
New Materials
Proc. SPIE 7591, Micro-patternable hybrid nanocomposites with tailorable mechanical and thermomechanical properties, 75910G (16 February 2010); doi: 10.1117/12.841668
Laser-Based Fabrication
Proc. SPIE 7591, Fabrication of micro- and nanostructures in thin metallic films by femtosecond laser ablation, 75910J (16 February 2010); doi: 10.1117/12.843074
Proc. SPIE 7591, Femtosecond laser photopolymerization of photonic and free-movable microstructures in sol-gel hybrid resist, 75910K (16 February 2010); doi: 10.1117/12.840657
Proc. SPIE 7591, Laser direct writing of submicron lines using micro- and nanofiber pens, 75910M (16 February 2010); doi: 10.1117/12.840603
Nanofabrication II: Active and Passive Devices
Proc. SPIE 7591, Challenges and opportunities of manufacturing the next generation of integrated photonics, 75910N (19 February 2010); doi: 10.1117/12.845954
Proc. SPIE 7591, Multiwavelength rolled-up InGaAs/GaAs quantum dot microtube lasers, 75910O (16 February 2010); doi: 10.1117/12.843255
Proc. SPIE 7591, Demonstration of thermal emission control, 75910P (16 February 2010); doi: 10.1117/12.842602
Proc. SPIE 7591, Dry etching of TiO2/SiO2 DBR mirrors for tunable optical sensor arrays, 75910R (16 February 2010); doi: 10.1117/12.841881
Nanofabrication III: Growth and Deposition
Proc. SPIE 7591, Atomic layer deposition (ALD) for optical nanofabrication, 75910S (16 February 2010); doi: 10.1117/12.841343
Proc. SPIE 7591, Modification of conformal-evaporated-film-by-rotation technique to improve uniformity of replicas of nonplanar biotemplates, 75910T (16 February 2010); doi: 10.1117/12.840437
Micro- and Nano-Optics
Proc. SPIE 7591, Tolerancing and analysis of a diffractive beam shaper, 75910W (16 February 2010); doi: 10.1117/12.837165
Proc. SPIE 7591, Precision glass molding: an integrative approach for the production of high precision micro-optics, 75910X (16 February 2010); doi: 10.1117/12.840271
Proc. SPIE 7591, Ion beam figuring (IBF) for high precision optics, 75910Y (16 February 2010); doi: 10.1117/12.840908
Proc. SPIE 7591, Multi-phase-level diffractive elements realized by binary effective medium patterns, 75910Z (16 February 2010); doi: 10.1117/12.843526
Poster Session
Proc. SPIE 7591, Fabrication of corrugated long-period fiber gratings by wet bulk micromachining, 759110 (16 February 2010); doi: 10.1117/12.841217
Proc. SPIE 7591, Dynamics of percolation phenomena in colloidal printing inks, 759111 (17 February 2010); doi: 10.1117/12.842647
Proc. SPIE 7591, Antireflection on plastic substrates using ion etching with discontinuous metallic film, 759112 (17 February 2010); doi: 10.1117/12.842913
Proc. SPIE 7591, Quantum dots (QDs) immobilization on metal nanowire end-facets for single photon source application, 759113 (17 February 2010); doi: 10.1117/12.842916
Proc. SPIE 7591, Multi-photon polymerization of inorganic-organic hybrid polymers using visible or IR ultrafast laser pulses for optical or optoelectronic devices, 759114 (17 February 2010); doi: 10.1117/12.852324
Proc. SPIE 7591, Device integration of Ti-catalyzed Si nanowires grown using APCVD, 759115 (17 February 2010); doi: 10.1117/12.855615
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