PROCEEDINGS VOLUME 7657
5TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES | 26-29 APRIL 2010
5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
IN THIS VOLUME

0 Sessions, 65 Papers, 0 Presentations
Front Matter  (1)
Session 4-1  (6)
Session 4-2  (7)
Session 4-3  (6)
5TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES
26-29 April 2010
Dalian, China
Front Matter
Proc. SPIE 7657, Front Matter: Volume 7657, 765701 (4 November 2010); doi: 10.1117/12.877494
Session 4-1
Proc. SPIE 7657, A novel technique of phase-locked interference positioning and phase discrimination, 765702 (13 October 2010); doi: 10.1117/12.866374
Proc. SPIE 7657, Miniature Fabry-Perot optical fiber pressure sensor, 765703 (13 October 2010); doi: 10.1117/12.867749
Proc. SPIE 7657, Analysis of silicon-based optical racetrack resonator for acceleration sensing, 765704 (22 October 2010); doi: 10.1117/12.866030
Proc. SPIE 7657, Application of holographic technique to the photonic crystal quantum cascade lasers, 765705 (22 October 2010); doi: 10.1117/12.867939
Proc. SPIE 7657, Nano-patterns fabricated by soft press and temperature-pressure variation imprint, 765706 (22 October 2010); doi: 10.1117/12.867573
Proc. SPIE 7657, Simulation of modal wavefront sensor employed multiplexed holographic optical elements, 765707 (22 October 2010); doi: 10.1117/12.867245
Session 4-2
Proc. SPIE 7657, Fast, high efficiency and cost-effective laser nano-lithography, 765708 (22 October 2010); doi: 10.1117/12.867965
Proc. SPIE 7657, Analyzing the effect of tool edge radius on cutting temperature in micro-milling process, 765709 (22 October 2010); doi: 10.1117/12.867961
Proc. SPIE 7657, Application and influence of aspheric surfaces in lithographic objectives design, 76570A (22 October 2010); doi: 10.1117/12.866022
Proc. SPIE 7657, Metal nanostrip array for light transmission enhancement in subwavelength slit, 76570B (22 October 2010); doi: 10.1117/12.866316
Proc. SPIE 7657, Optical response of bowtie antennas, 76570C (22 October 2010); doi: 10.1117/12.866309
Proc. SPIE 7657, Numerical calculation of optical probe's polarization characteristics, 76570D (22 October 2010); doi: 10.1117/12.866132
Proc. SPIE 7657, Design, manufacture and properties of high-definition diffractive objective lens, 76570E (22 October 2010); doi: 10.1117/12.867713
Session 4-3
Proc. SPIE 7657, Thinned-cladding zeolite-coated long period fiber grating chemical sensor, 76570F (22 October 2010); doi: 10.1117/12.867031
Proc. SPIE 7657, Characterization of a 61-element bulk-PZT thick film deformable mirror and generation of Zernike polynomials, 76570G (22 October 2010); doi: 10.1117/12.866304
Proc. SPIE 7657, The mode characteristics of photonic crystal vertical cavity surface emitting laser, 76570H (22 October 2010); doi: 10.1117/12.867912
Proc. SPIE 7657, Design and fabrication of dual-transmission-band fiber Bragg grating with terahertz wavelength spacing, 76570I (22 October 2010); doi: 10.1117/12.867214
Proc. SPIE 7657, The analysis of holographic mosaic gratings' error, 76570J (22 October 2010); doi: 10.1117/12.866704
Proc. SPIE 7657, Periodic microstructures induced by interfered femtosecond laser pulses, 76570K (22 October 2010); doi: 10.1117/12.866233
Poster Session
Proc. SPIE 7657, Influence on digital photolithography intensity by collimated Gaussian beam, 76570L (22 October 2010); doi: 10.1117/12.864087
Proc. SPIE 7657, External laser intensity modulation based on a MEMS micro-mirror for photo-acoustic gas sensing, 76570M (22 October 2010); doi: 10.1117/12.864033
Proc. SPIE 7657, Dynamic adjustment system of space-borne Fourier transform spectrometer, 76570N (22 October 2010); doi: 10.1117/12.865813
Proc. SPIE 7657, Research on VCSEL of single-mode multilayer photonic crystal, 76570O (22 October 2010); doi: 10.1117/12.864113
Proc. SPIE 7657, Research and design on DMD digital photolithography system, 76570P (22 October 2010); doi: 10.1117/12.865240
Proc. SPIE 7657, Formation of self-organized nanostructures on Si surfaces during low energy ion beam erosion, 76570Q (22 October 2010); doi: 10.1117/12.866193
Proc. SPIE 7657, DMFC bipolar material and new processing for μDMFC microchannel, 76570R (22 October 2010); doi: 10.1117/12.867935
Proc. SPIE 7657, Analysis on electromagnetic polarity of asymmetrical nanoshells, 76570S (22 October 2010); doi: 10.1117/12.867945
Proc. SPIE 7657, Simulation and experiment of cutting force in ultrasonic torsional vibration assisted micro-milling, 76570T (22 October 2010); doi: 10.1117/12.865810
Proc. SPIE 7657, Optical design and error analyses of lens for observing the fiber core based on the software ZEMAX, 76570U (22 October 2010); doi: 10.1117/12.864048
Proc. SPIE 7657, Design and simulation of microspectrometer based on torsional MEMS grating, 76570V (22 October 2010); doi: 10.1117/12.867905
Proc. SPIE 7657, The impact of manufacturing errors of domain structure on frequency doubling efficiency in PPLN waveguides, 76570W (22 October 2010); doi: 10.1117/12.865718
Proc. SPIE 7657, Design and test of focusing mechanism of space camera, 76570X (22 October 2010); doi: 10.1117/12.866449
Proc. SPIE 7657, Radiation forces analysis for gold nanoparticles in optical tweezers, 76570Y (22 October 2010); doi: 10.1117/12.865208
Proc. SPIE 7657, Soft substrate as a sacrificial layer for fabrication free-standing SU-8-based nanofluidic system, 76570Z (22 October 2010); doi: 10.1117/12.866133
Proc. SPIE 7657, Poly (ethylene terephthalate) (PET) micro/nanostructures fabricated by nanoimprint and its applications, 765710 (22 October 2010); doi: 10.1117/12.866228
Proc. SPIE 7657, High stability temperature control of the reference laser diode for spaceborne Fourier transform spectrometer, 765711 (22 October 2010); doi: 10.1117/12.865819
Proc. SPIE 7657, Research on exposure model for DMD-based digital gray-tone mask, 765712 (22 October 2010); doi: 10.1117/12.865232
Proc. SPIE 7657, Research on the characteristics of color filter with double metal layers, 765713 (22 October 2010); doi: 10.1117/12.866817
Proc. SPIE 7657, Compact grating couplers between a single-mode fiber and nanophotonic silicon-on-insulator waveguide, 765714 (22 October 2010); doi: 10.1117/12.865207
Proc. SPIE 7657, Design and analysis of deep ultraviolet microlithography illumination system, 765715 (22 October 2010); doi: 10.1117/12.866224
Proc. SPIE 7657, Methods of eliminating the grid effect based on DMD technique of maskless lithography, 765716 (22 October 2010); doi: 10.1117/12.866809
Proc. SPIE 7657, Design and fabrication of diffractive microlens and analysis of optical characteristics, 765717 (22 October 2010); doi: 10.1117/12.867852
Proc. SPIE 7657, Optimization study on the deformable mirror support structure of the hyperspectral imaging system for food detection, 765718 (22 October 2010); doi: 10.1117/12.866147
Proc. SPIE 7657, Study on controlling the profile of holographic ion beam etching gratings, 765719 (22 October 2010); doi: 10.1117/12.866035
Proc. SPIE 7657, Experimental verification of the inverse Doppler effect in negative-index material, 76571A (22 October 2010); doi: 10.1117/12.865505
Proc. SPIE 7657, Phase demodulation method for fringe pattern in alignment of nanometer lithography, 76571B (22 October 2010); doi: 10.1117/12.866811
Proc. SPIE 7657, Nanolithography in the evanescent near-field by using gain-assisted meta-materials system, 76571C (22 October 2010); doi: 10.1117/12.866808
Proc. SPIE 7657, Research on focusing technique based on dual-phase lock-in amplifier in 193nm lithography system, 76571D (22 October 2010); doi: 10.1117/12.866711
Proc. SPIE 7657, A new system for measuring the diffraction efficiency of large aperture gratings, 76571E (22 October 2010); doi: 10.1117/12.866282
Proc. SPIE 7657, Study on residual stresses in ultrasonic torsional vibration assisted micro-milling, 76571F (22 October 2010); doi: 10.1117/12.866104
Proc. SPIE 7657, Positioning scheme based on grating modulation and phase imaging in lithography, 76571G (22 October 2010); doi: 10.1117/12.866753
Proc. SPIE 7657, Focusing and leveling in dual stage lithographic system, 76571H (22 October 2010); doi: 10.1117/12.866722
Proc. SPIE 7657, Application of chaos optimization algorithm in the micro spectrometer, 76571I (22 October 2010); doi: 10.1117/12.867597
Proc. SPIE 7657, An optical modulation based focus method for optical projection lithography, 76571J (22 October 2010); doi: 10.1117/12.866813
Proc. SPIE 7657, Moire fringe method of using warping deformation measurement of electronic components, 76571K (22 October 2010); doi: 10.1117/12.866630
Proc. SPIE 7657, Study on mechanical properties and damage behaviors of Kevlar fiber reinforced epoxy composites by digital image correlation technique under optical microscope, 76571L (22 October 2010); doi: 10.1117/12.866731
Proc. SPIE 7657, System-level modeling and verification of a micro pitch-tunable grating, 76571M (22 October 2010); doi: 10.1117/12.867038