Proceedings Volume 7718 is from: Logo
SPIE PHOTONICS EUROPE
12-16 April 2010
Brussels, Belgium
Front Matter
Proc. SPIE 7718, Front Matter: Volume 7718, 771801 (26 May 2010); doi: 10.1117/12.868094
Digital Holography
Proc. SPIE 7718, Deep-ultraviolet digital holographic microscopy for nano-inspection, 771803 (13 May 2010); doi: 10.1117/12.854885
Proc. SPIE 7718, Digital holography from shadowgraphic phase estimates, 771804 (14 May 2010); doi: 10.1117/12.854632
Proc. SPIE 7718, Fast noncontact surface roughness measurements up to the micrometer range by dual-wavelength digital holographic microscopy, 771805 (14 May 2010); doi: 10.1117/12.854550
Proc. SPIE 7718, Managing the depth of focus in 3D imaging through controlled distortion of digital holograms, 771806 (14 May 2010); doi: 10.1117/12.855884
New Aspects in Microtopography Measurements I
Proc. SPIE 7718, Investigation of enhanced 2D field-stitching method as a simulation-tool for line-edge roughness in scatterometry, 771808 (14 May 2010); doi: 10.1117/12.854327
Proc. SPIE 7718, CCD-ARS set-up: a comprehensive and fast high-sensitivity characterisation tool for optical components, 77180A (14 May 2010); doi: 10.1117/12.854059
Proc. SPIE 7718, Interferometric precision with Fourier-based deflectometry, 77180B (14 May 2010); doi: 10.1117/12.854879
New Aspects in Microtopography Measurements II
Proc. SPIE 7718, A deflectometric sensor for the on-machine surface form measurement and adaptive manufacturing, 77180C (14 May 2010); doi: 10.1117/12.854643
Proc. SPIE 7718, Statistical signatures of random media: application to selective cancellation of scattered light, 77180D (14 May 2010); doi: 10.1117/12.854061
Proc. SPIE 7718, Object-adapted fringe projection technique on scattered data interpolation, 77180E (14 May 2010); doi: 10.1117/12.858895
Inspection of MEMS I
Proc. SPIE 7718, Next-generation test equipment for micro-production, 77180F (14 May 2010); doi: 10.1117/12.855087
Proc. SPIE 7718, Automated multiscale measurement system for MEMS characterisation, 77180G (14 May 2010); doi: 10.1117/12.853819
Proc. SPIE 7718, Simulation and in-plane movement characterization of 2D MEMS platform, 77180H (14 May 2010); doi: 10.1117/12.855747
Topography and Surface Measurements
Proc. SPIE 7718, Multiresolution analysis of 2D confocal microscope images, 77180I (14 May 2010); doi: 10.1117/12.854498
Proc. SPIE 7718, Comparability and uncertainty of shape measurements with white-light interferometers, 77180J (14 May 2010); doi: 10.1117/12.853901
Proc. SPIE 7718, Modelling the colour of a coated rough-steel surface, 77180L (14 May 2010); doi: 10.1117/12.853844
Proc. SPIE 7718, Measurements of characteristic parameters of extremely small cogged wheels with low module by means of low-coherence interferometry, 77180M (14 May 2010); doi: 10.1117/12.854916
Inspection of Microoptics
Proc. SPIE 7718, Optical characterization of semiconductor microlenses using a Mach-Zehnder interferometer in the near-infrared region, 77180N (14 May 2010); doi: 10.1117/12.854690
Proc. SPIE 7718, Sensitivity enhancement of bimaterial MOEMS thermal imaging sensor array using 2-λ wavelength readout, 77180O (14 May 2010); doi: 10.1117/12.854753
Proc. SPIE 7718, Characterization and inspection of micro-lens array by SCBS microscope, 77180P (14 May 2010); doi: 10.1117/12.854121
Proc. SPIE 7718, Multispectral characterization of diffractive micromirror arrays, 77180Q (14 May 2010); doi: 10.1117/12.854382
Proc. SPIE 7718, Unification of approaches to optimization and metrological characterization of continuous-relief diffractive optical elements, 77180S (14 May 2010); doi: 10.1117/12.854416
Advanced Microscopy Techniques
Proc. SPIE 7718, Multi-wavelength digital holographic microscopy for high-resolution inspection of surfaces and imaging of phase specimen, 77180T (14 May 2010); doi: 10.1117/12.854005
Proc. SPIE 7718, Advances in the development of the LNE metrological atomic force microscope, 77180U (14 May 2010); doi: 10.1117/12.854201
Proc. SPIE 7718, Millimeter scale topographical image of highly integrated optical structures using enlarged metrological atomic-force microscopy, 77180V (14 May 2010); doi: 10.1117/12.853586
Proc. SPIE 7718, One-shot measurement of surface profile using an astigmatic microscope system, 77180X (14 May 2010); doi: 10.1117/12.854124
Proc. SPIE 7718, Test objects for calibration of SEMs and AFMs operating at the nanoscale, 77180Y (14 May 2010); doi: 10.1117/12.853892
Inspection of MEMS II
Proc. SPIE 7718, Digital reflection holography based systems development for MEMS testing, 77180Z (14 May 2010); doi: 10.1117/12.858451
Proc. SPIE 7718, Measuring ultra-sonic in-plane vibrations with the scanning confocal heterodyne interferometer, 771810 (14 May 2010); doi: 10.1117/12.853890
Image Reconstruction and Signal Processing
Proc. SPIE 7718, Motion detection using speckle photography and extended fractional Fourier transform, 771813 (14 May 2010); doi: 10.1117/12.853632
Proc. SPIE 7718, Electromagnetic prediction of multiscale depolarization, 771814 (14 May 2010); doi: 10.1117/12.854064
Proc. SPIE 7718, Error analysis of 3D shearography using finite-element modelling, 771816 (14 May 2010); doi: 10.1117/12.853602
Proc. SPIE 7718, Phase retrieval in ESPI from a dense phase fringe pattern, 771817 (14 May 2010); doi: 10.1117/12.853775
Specialised Techniques and Sensors
Proc. SPIE 7718, Narrow-selection bandwith of femtosecond laser comb with application to changes in optical path distance, 771818 (14 May 2010); doi: 10.1117/12.854564
Proc. SPIE 7718, Investigations of fast-rotating bodies using an interferometric laser Doppler distance sensor system, 771819 (14 May 2010); doi: 10.1117/12.854209
Proc. SPIE 7718, Accuracy of ellipsometric measurements of Si-SiO2 structures, 77181B (14 May 2010); doi: 10.1117/12.853898
Proc. SPIE 7718, An optical microform calibration system for ball-shaped hardness indenters, 77181C (14 May 2010); doi: 10.1117/12.854800
Process Monitoring Systems
Proc. SPIE 7718, Optical metrology for process control: modeling and simulation of sensors for a comparison of different measurement principles, 77181D (14 May 2010); doi: 10.1117/12.855053
Proc. SPIE 7718, Scatterometric analysis of chatter marks occurring in industrial grinding processes, 77181E (14 May 2010); doi: 10.1117/12.854419
Proc. SPIE 7718, An optically non-destructive, non-contact, and vibration-insensitive edge quality assessment system for semiconductor and harddisk drive industries, 77181F (14 May 2010); doi: 10.1117/12.853506
Proc. SPIE 7718, Optical coherent sensor for monitoring and measurement of engineering structures, 77181G (14 May 2010); doi: 10.1117/12.854868
Proc. SPIE 7718, Highly sensitive wavefront sensor for visual inspection of bare and patterned silicon wafers, 77181H (14 May 2010); doi: 10.1117/12.854332
Poster Session
Proc. SPIE 7718, Semi-derivative real filter for the measurement of the wavefront distortion, 77181I (14 May 2010); doi: 10.1117/12.853935
Proc. SPIE 7718, In situ control of roughness of processed surfaces by reflectometric method, 77181J (14 May 2010); doi: 10.1117/12.854949
Proc. SPIE 7718, A micro-SPM head array for large-scale topography measurement, 77181L (14 May 2010); doi: 10.1117/12.854397
Proc. SPIE 7718, Simple methods for alignment of line distance sensor arrays, 77181M (14 May 2010); doi: 10.1117/12.854266
Proc. SPIE 7718, Optical testing of bifocal diffractive-refractive intraocular lenses using Shack-Hartmann wavefront sensor, 77181P (14 May 2010); doi: 10.1117/12.854484
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