PROCEEDINGS VOLUME 7926
SPIE MOEMS-MEMS | 22-27 JANUARY 2011
Micromachining and Microfabrication Process Technology XVI
IN THIS VOLUME

0 Sessions, 16 Papers, 0 Presentations
Front Matter  (1)
Proceedings Volume 7926 is from: Logo
SPIE MOEMS-MEMS
22-27 January 2011
San Francisco, California, United States
Front Matter
Proc. SPIE 7926, Front Matter: Volume 7926, 792601 (28 March 2011); doi: 10.1117/12.891322
Optical Device Fabrication
Proc. SPIE 7926, IR photodetector based on an optically cooled micromirror as a light pressure sensor, 792602 (11 February 2011); doi: 10.1117/12.873646
Proc. SPIE 7926, Endurance analysis of optical master stamps for UV-replication, 792603 (11 February 2011); doi: 10.1117/12.873506
Proc. SPIE 7926, Thermo-optic coefficients of SiC, GaN, and AlN up to 512°C from infrared to ultraviolet region for tunable filter applications, 792604 (11 February 2011); doi: 10.1117/12.874531
Laser-based Processing
Proc. SPIE 7926, Laser processing inside transparent materials: dependence on pulse length and wavelength, 792606 (11 February 2011); doi: 10.1117/12.874725
Proc. SPIE 7926, Sub-micron texturing of silicon wafer with fiber laser, 792607 (11 February 2011); doi: 10.1117/12.874919
MEMS Device Fabrication
Proc. SPIE 7926, First results on electrostatic polymer actuators based on UV replication, 792609 (15 February 2011); doi: 10.1117/12.873555
Proc. SPIE 7926, Commercial plexiglass mirrors and MEMS: new approach toward low cost polymer microsystems, 79260A (15 February 2011); doi: 10.1117/12.876592
Proc. SPIE 7926, Fabrication of electrostatic-actuated single-crystalline 4H-SiC bridge structures by photoelectrochemical etching, 79260B (15 February 2011); doi: 10.1117/12.874543
Proc. SPIE 7926, Poly-HDDA microstructure fabrication using microstereolithography for microcantilever-based sensor technology, 79260C (15 February 2011); doi: 10.1117/12.888045
Materials, Metrology, and Computer-Aided Design
Proc. SPIE 7926, MEMS product engineering: methodology and tools, 79260D (15 February 2011); doi: 10.1117/12.876104
Proc. SPIE 7926, Automated measurement of centering errors and relative surface distances for the optimized assembly of micro-optics, 79260E (15 February 2011); doi: 10.1117/12.874628
Proc. SPIE 7926, Impact of using filtration on global and local uniformity of spin on glue materials, 79260F (15 February 2011); doi: 10.1117/12.878757
Poster Session
Proc. SPIE 7926, Design and fabrication of a CMOS MEMS logic gate, 79260I (15 February 2011); doi: 10.1117/12.874341
Proc. SPIE 7926, Development of a novel thermal switch through CMOS MEMS fabrication process, 79260J (15 February 2011); doi: 10.1117/12.874420
Proc. SPIE 7926, Large scale micropatterning of multi-walled carbon nanotube/polydimethylsiloxane nanocomposite polymer on highly flexible 12x24 inch substrates, 79260L (16 February 2011); doi: 10.1117/12.876738
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