PROCEEDINGS VOLUME 8066
SPIE MICROTECHNOLOGIES | 18-20 APRIL 2011
Smart Sensors, Actuators, and MEMS V
IN THIS VOLUME

0 Sessions, 88 Papers, 0 Presentations
Front Matter  (1)
Materials  (6)
Bio-MEMS  (4)
Gas Sensors  (5)
Modelling  (4)
Proceedings Volume 8066 is from: Logo
SPIE MICROTECHNOLOGIES
18-20 April 2011
Prague, Czech Republic
Front Matter
Proc. SPIE 8066, Front Matter: Volume 8066, 806601 (1 June 2011); doi: 10.1117/12.899482
High Temperature Sensors
Proc. SPIE 8066, Wireless SAW sensor for high temperature applications: material point of view, 806602 (3 May 2011); doi: 10.1117/12.889165
Proc. SPIE 8066, Design and fabrication of piezoresistive p-SOI Wheatstone bridges for high-temperature applications, 806603 (5 May 2011); doi: 10.1117/12.886855
Proc. SPIE 8066, Microthruster with integrated platinum thin film resistance temperature detector (RTD), heater, and thermal insulation, 806604 (5 May 2011); doi: 10.1117/12.886695
Proc. SPIE 8066, Miniaturized piezoelectric structures for application temperatures up to 1000 °C, 806605 (5 May 2011); doi: 10.1117/12.886740
Proc. SPIE 8066, Thin film electrodes and passivation coatings for harsh environment microwave acoustic sensors, 806606 (5 May 2011); doi: 10.1117/12.886602
Materials
Proc. SPIE 8066, Smart ultrasonic sensors systems: investigations on aluminum nitride thin films for the excitation of high frequency ultrasound, 806607 (5 May 2011); doi: 10.1117/12.886852
Proc. SPIE 8066, Measurement of Young's modulus and residual stress of thin SiC layers for MEMS high temperature applications, 806608 (5 May 2011); doi: 10.1117/12.886453
Proc. SPIE 8066, Mechanical properties of 1 um-thick metallic freestanding coatings measured by in-plane uniaxial stress, 806609 (5 May 2011); doi: 10.1117/12.886879
Proc. SPIE 8066, Fabrication process and characterization of micromechanical sensors based on SU-8 resist, 80660A (5 May 2011); doi: 10.1117/12.886467
Proc. SPIE 8066, On-device extraction of thermal thin-film properties in calorimetric flow sensors, 80660B (5 May 2011); doi: 10.1117/12.887059
Proc. SPIE 8066, Thin catalyst layers based on carbon nanotubes for PEM-fuel cell applications, 80660C (5 May 2011); doi: 10.1117/12.886868
Bio-MEMS
Proc. SPIE 8066, Poly(dimethylsiloxane) photonic microbioreactors and multiple internal reflection systems for real time cell screening, 80660D (5 May 2011); doi: 10.1117/12.889671
Proc. SPIE 8066, Mid-infrared CH2-stretch ratio sensor for suspended mammalian cells, 80660E (5 May 2011); doi: 10.1117/12.886446
Proc. SPIE 8066, Optimization of an impedance sensor for droplet-based microfluidic systems, 80660F (5 May 2011); doi: 10.1117/12.886887
Proc. SPIE 8066, Microfluidic cartridges for DNA purification and genotyping processed in standard laboratory instruments, 80660G (5 May 2011); doi: 10.1117/12.886860
Gas Sensors
Proc. SPIE 8066, New method for selectivity enhancement of SiC field effect gas sensors for quantification of NOx, 80660I (5 May 2011); doi: 10.1117/12.886431
Proc. SPIE 8066, Fabrication of a miniaturized ionization gas sensor with polyimide spacer, 80660J (5 May 2011); doi: 10.1117/12.886759
Proc. SPIE 8066, Fabry-Pérot-based thin film structure used as IR-emitter of an NDIR gas sensor: ray tracing simulations and measurements, 80660K (5 May 2011); doi: 10.1117/12.886741
Proc. SPIE 8066, Metallo-porphyrins as gas sensing material for colorimetric gas sensors on planar optical waveguides, 80660L (5 May 2011); doi: 10.1117/12.887390
Proc. SPIE 8066, Gas sensors based on MEMS structures made of ceramic ZrO2/Y2O3 material, 80660N (5 May 2011); doi: 10.1117/12.887500
Optical Devices and Systems
Proc. SPIE 8066, Closed-loop synchronization scheme of resonant MOEMS-mirrors with two axes, 80660O (5 May 2011); doi: 10.1117/12.886481
Proc. SPIE 8066, Design of linear and nonlinear hybrid optical MEMS displacement sensors, 80660P (5 May 2011); doi: 10.1117/12.887631
Proc. SPIE 8066, Miniaturized multi channel infrared optical gas sensor system, 80660Q (5 May 2011); doi: 10.1117/12.887593
Proc. SPIE 8066, A polyvinylidene fluoride (PVDF) based bimorph actuator for high speed laser beam manipulation, 80660R (5 May 2011); doi: 10.1117/12.888983
Proc. SPIE 8066, A systems engineering approach to structural health monitoring of composites using embedded optical fibre Bragg sensors for aeronautical applications, 80660S (5 May 2011); doi: 10.1117/12.887318
Proc. SPIE 8066, Impact damage detection of composite materials by fiber Bragg gratings, 80660T (5 May 2011); doi: 10.1117/12.887065
High-Frequency MEMS
Proc. SPIE 8066, Electro-acoustic sensors based on AlN thin film: possibilities and limitations, 80660U (5 May 2011); doi: 10.1117/12.890662
Proc. SPIE 8066, Development of capacitive RF MEMS switches with TaN and Ta2O5 thin films, 80660V (5 May 2011); doi: 10.1117/12.886715
Proc. SPIE 8066, Effect of electro-thermo-mechanical coupling on the short-circuit in RF microswitch operation, 80660W (5 May 2011); doi: 10.1117/12.886595
Proc. SPIE 8066, A reconfigurable impedance matching network entirely manufactured in RF-MEMS technology, 80660X (5 May 2011); doi: 10.1117/12.886186
Proc. SPIE 8066, Mechanical contact in system-level models of electrostatically actuated RF-MEMS switches: experimental analysis and modeling, 80660Y (5 May 2011); doi: 10.1117/12.887389
Modelling
Proc. SPIE 8066, Modeling of gold microbeams for characterizing MEMS packages, 80660Z (5 May 2011); doi: 10.1117/12.887571
Proc. SPIE 8066, Hardware implementation of an electrostatic MEMS-actuator linearization, 806610 (5 May 2011); doi: 10.1117/12.886793
Proc. SPIE 8066, Vibration energy harvester optimization using artificial intelligence, 806611 (5 May 2011); doi: 10.1117/12.886383
Proc. SPIE 8066, Modeling and analysis of a micromachined piezoelectric energy harvester stimulated by ambient random vibrations, 806612 (5 May 2011); doi: 10.1117/12.885861
Energy Scavengers
Proc. SPIE 8066, Modeling and characterization of a circular-shaped energy scavenger in MEMS surface micromachining technology, 806614 (5 May 2011); doi: 10.1117/12.887559
Proc. SPIE 8066, Issues in validation of performances of piezoelectric vibration-based energy harvesters, 806615 (5 May 2011); doi: 10.1117/12.886461
Proc. SPIE 8066, Plucked piezoelectric bimorphs for energy harvesting applications, 806616 (5 May 2011); doi: 10.1117/12.886712
Proc. SPIE 8066, A novel MEMS design of a piezoelectric generator for fluid-actuated energy conversion, 806617 (5 May 2011); doi: 10.1117/12.886367
Proc. SPIE 8066, Piezoelectric power generation for sensor applications: design of a battery-less wireless tire pressure sensor, 806618 (5 May 2011); doi: 10.1117/12.887112
Proc. SPIE 8066, Smart energy management and low-power design of sensor and actuator nodes on algorithmic level for self-powered sensorial materials and robotics, 806619 (5 May 2011); doi: 10.1117/12.888124
Poster Session
Proc. SPIE 8066, Resonant piezoelectric AlN-actuated microcantilevers for detection of antigen/antibody interactions, 80661A (5 May 2011); doi: 10.1117/12.887010
Proc. SPIE 8066, Energy harvesting circuit for sensor system power supply, 80661B (5 May 2011); doi: 10.1117/12.884768
Proc. SPIE 8066, Gold-based thin multilayers for ohmic contacts in RF-MEMS switches, 80661D (5 May 2011); doi: 10.1117/12.886377
Proc. SPIE 8066, AlN-based piezoelectric bimorph microgenerator utilizing low-level non-resonant excitation, 80661E (5 May 2011); doi: 10.1117/12.886881
Proc. SPIE 8066, Airborne particle generation for optical tweezers by thermo-mechanical membrane actuators, 80661F (5 May 2011); doi: 10.1117/12.886727
Proc. SPIE 8066, Characterization of the first in-plane mode of AlN-actuated microcantilevers, 80661G (5 May 2011); doi: 10.1117/12.886981
Proc. SPIE 8066, Growth and characterization of uniform ZnO films as piezoelectric materials using a hydrothermal growth technique, 80661H (5 May 2011); doi: 10.1117/12.888048
Proc. SPIE 8066, Piezoelectric AlN-actuated micro-tuning forks for sensing applications, 80661I (5 May 2011); doi: 10.1117/12.886997
Proc. SPIE 8066, Improved load-deflection method for the extraction of elastomechanical properties of circularly shaped thin-film diaphragms, 80661J (5 May 2011); doi: 10.1117/12.886824
Proc. SPIE 8066, The impact of substrate properties on the electromigration resistance of sputter-deposited Cu thin films, 80661K (5 May 2011); doi: 10.1117/12.886921
Proc. SPIE 8066, Microfabricated self-resonant structure as a passive wireless chemical sensor, 80661L (5 May 2011); doi: 10.1117/12.886895
Proc. SPIE 8066, In incubator live cell imaging platform, 80661M (5 May 2011); doi: 10.1117/12.886908
Proc. SPIE 8066, Analytical investigation of the pull-in voltage in capacitive mechanical sensors, 80661N (5 May 2011); doi: 10.1117/12.887460
Proc. SPIE 8066, Biomimetic MEMS to assist, enhance, and expand human sensory perceptions: a survey on state-of-the-art developments, 80661O (5 May 2011); doi: 10.1117/12.886554
Proc. SPIE 8066, System modeling of a piezoelectric energy harvesting module for environments with high dynamic forces, 80661P (5 May 2011); doi: 10.1117/12.886749
Proc. SPIE 8066, 3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls, 80661Q (5 May 2011); doi: 10.1117/12.886876