PROCEEDINGS VOLUME 8082
SPIE OPTICAL METROLOGY | 23-26 MAY 2011
Optical Measurement Systems for Industrial Inspection VII
Proceedings Volume 8082 is from: Logo
SPIE OPTICAL METROLOGY
23-26 May 2011
Munich, Germany
Front Matter
Proc. SPIE 8082, Front Matter: Volume 8082, 808201 (23 May 2011); doi: 10.1117/12.898995
Multisensor Approaches
Proc. SPIE 8082, Assistant systems for efficient multiscale measurement and inspection, 808202 (23 May 2011); doi: 10.1117/12.889344
Proc. SPIE 8082, Multisensor technology based on a laser focus probe for nanomeasuring applications over large areas, 808203 (27 May 2011); doi: 10.1117/12.888445
Proc. SPIE 8082, Conceptual consideration for the process integration of optical sensors, 808204 (27 May 2011); doi: 10.1117/12.890027
Digital Holography
Proc. SPIE 8082, Some figures of merit so as to compare digital Fresnel holography and speckle interferometry, 808205 (27 May 2011); doi: 10.1117/12.890865
Proc. SPIE 8082, Reference wave adaptation in digital lensless Fourier holography by means of a spatial light modulator, 808206 (27 May 2011); doi: 10.1117/12.889472
Proc. SPIE 8082, Self interference digital holographic microscopy approach for inspection of technical and biological phase specimens, 808207 (27 May 2011); doi: 10.1117/12.889336
Proc. SPIE 8082, Stokes holography for recording and reconstructing objects using polarization fringes, 808208 (27 May 2011); doi: 10.1117/12.888963
Proc. SPIE 8082, An algorithm for the estimation of the in-focus distance for speckle holograms, 808209 (27 May 2011); doi: 10.1117/12.889534
Digital Holography and Applications
Proc. SPIE 8082, Synthetic aperture engineering for super-resolved microscopy in digital lensless Fourier holography, 80820A (27 May 2011); doi: 10.1117/12.889339
Proc. SPIE 8082, Dual-wavelength holographic shape measurement with iterative phase unwrapping, 80820B (27 May 2011); doi: 10.1117/12.889424
Proc. SPIE 8082, Infrared digital holography for large objects investigation, 80820C (27 May 2011); doi: 10.1117/12.889588
Proc. SPIE 8082, Remote laboratory for digital holographic metrology, 80820D (27 May 2011); doi: 10.1117/12.892073
Proc. SPIE 8082, Simultaneous out-of-plane and in-plane displacements measurement by using digital holography around a hole or indentation, 80820E (27 May 2011); doi: 10.1117/12.889318
Micro- and Nanostructure Measurement
Proc. SPIE 8082, Recent advances in the field of super resolved imaging and sensing, 80820G (27 May 2011); doi: 10.1117/12.895001
Proc. SPIE 8082, Advanced 2D die placement inspection system for reliable flip chip interconnections based on 3D information of die and substrate by a phase measuring profilometry, 80820H (27 May 2011); doi: 10.1117/12.889356
Proc. SPIE 8082, 3D interconnect metrology in CMS/ITRI, 80820I (27 May 2011); doi: 10.1117/12.889401
Proc. SPIE 8082, Pattern placement metrology using PROVE high precision optics combined with advanced correction algorithms, 80820J (27 May 2011); doi: 10.1117/12.889348
Proc. SPIE 8082, Detection of micro-probe displacement using a Shack-Hartmann wavefront sensor, 80820K (27 May 2011); doi: 10.1117/12.889581
Phase Retrieval
Proc. SPIE 8082, Optimal phase retrieval from multiple observations with Gaussian noise: augmented Lagrangian algorithm for phase objects, 80820L (27 May 2011); doi: 10.1117/12.889118
Proc. SPIE 8082, The effect of misalignment in phase retrieval based on a spatial light modulator, 80820M (27 May 2011); doi: 10.1117/12.889200
Proc. SPIE 8082, Quantitative determination of the optical properties of phase objects by using a real-time phase retrieval technique, 80820N (27 May 2011); doi: 10.1117/12.889340
Proc. SPIE 8082, Phase extraction in microscopy using tunable defocusing by means of a SLM, 80820O (27 May 2011); doi: 10.1117/12.889591
Optical Profilometry
Proc. SPIE 8082, Three-dimensional refractive index and thickness distribution of thin film measurements through dynamic multiwavelength interferometry, 80820P (27 May 2011); doi: 10.1117/12.890255
Proc. SPIE 8082, Comparison of fast Fourier transform and convolution in wavelength scanning interferometry, 80820Q (27 May 2011); doi: 10.1117/12.889357
Proc. SPIE 8082, Absolute surface profilometry of an object with large gaps by means of monochromatic laser interferometry, 80820R (27 May 2011); doi: 10.1117/12.889316
Proc. SPIE 8082, Structured-illumination microscopy on technical surfaces: 3D metrology with nanometer sensitivity, 80820S (27 May 2011); doi: 10.1117/12.889428
White-Light Interferometry
Proc. SPIE 8082, Broad spectral range measurement of chromatic dispersion of polarization modes in holey fibers using spectral interferometry, 80820T (27 May 2011); doi: 10.1117/12.889405
Proc. SPIE 8082, Inspection of processes during silicon wafer sawing using low coherence interferometry in the near infrared wavelength region, 80820U (27 May 2011); doi: 10.1117/12.889498
Proc. SPIE 8082, Uncertainty of height information in coherence scanning interferometry, 80820V (27 May 2011); doi: 10.1117/12.889796
Proc. SPIE 8082, Improvement of lateral resolution and reduction of batwings in vertical scanning white-light interferometry, 80820W (27 May 2011); doi: 10.1117/12.889180
Proc. SPIE 8082, Parallel optical coherence tomography (pOCT) for industrial 3D inspection, 80820X (27 May 2011); doi: 10.1117/12.889390
High-Speed Techniques
Proc. SPIE 8082, High speed fringe projection for fast 3D inspection, 80820Y (27 May 2011); doi: 10.1117/12.888930
Proc. SPIE 8082, Radial expansion measurements of a high-speed rotor using an interferometric array sensor, 80820Z (27 May 2011); doi: 10.1117/12.889240
Proc. SPIE 8082, High-speed, on-line 4D microscopy using continuously scanning white light interferometry with a high-speed camera and real-time FPGA image processing, 808210 (27 May 2011); doi: 10.1117/12.889334
Proc. SPIE 8082, 3D high-speed profilometer for inspection of micro-manufactured transparent parts, 808211 (27 May 2011); doi: 10.1117/12.889564
Proc. SPIE 8082, Fringe projection based high-speed 3D sensor for real-time measurements, 808212 (27 May 2011); doi: 10.1117/12.889459
Deflectometry, Fringe Projection
Proc. SPIE 8082, Alignment methods for ultraprecise deflectometric flatness metrology, 808213 (27 May 2011); doi: 10.1117/12.889325
Proc. SPIE 8082, Measurement and characterization of cylindrical surfaces by deflectometry applied to ballistic identification, 808214 (27 May 2011); doi: 10.1117/12.888201
Proc. SPIE 8082, Endoscopic geometry inspection by modular fiber optic sensors with increased depth of focus, 808215 (27 May 2011); doi: 10.1117/12.888921
Proc. SPIE 8082, 3D measuring in the field of endoscopy, 808216 (27 May 2011); doi: 10.1117/12.889167
Proc. SPIE 8082, 3D shape measurement based on color-encoded sinusoidal fringe projection, 808217 (27 May 2011); doi: 10.1117/12.889306
Structured Light Techniques
Proc. SPIE 8082, New structured light measurement and calibration method for 3D documenting of engineering structures, 808218 (27 May 2011); doi: 10.1117/12.889403
Proc. SPIE 8082, Fast 3D shape measurements using laser speckle projection, 808219 (27 May 2011); doi: 10.1117/12.889471
Proc. SPIE 8082, Optical measurement and comparison of large free form surfaces through a regular mesh, 80821A (27 May 2011); doi: 10.1117/12.889526
Proc. SPIE 8082, Accurate calibration of a fringe projection system by considering telecentricity, 80821B (27 May 2011); doi: 10.1117/12.888037
Joint Session I: Measurements of Optical Components and Systems
Proc. SPIE 8082, Some aspects of error influences in interferometric measurements of optical surface forms, 80821C (27 May 2011); doi: 10.1117/12.895002
Proc. SPIE 8082, Diffractive simultaneous lateral shearing interferometry, 80821D (27 May 2011); doi: 10.1117/12.895004
Proc. SPIE 8082, Aspherical surface measurement using quadri-wave lateral shearing interferometry, 80821E (27 May 2011); doi: 10.1117/12.895005
Proc. SPIE 8082, Advanced studies on the measurement of aspheres and freeform surfaces with the tilted-wave interferometer, 80821F (27 May 2011); doi: 10.1117/12.895006
Proc. SPIE 8082, A subaperture stitching algorithm for aspheric surfaces, 80821G (27 May 2011); doi: 10.1117/12.889098
Joint Session II: Measurement of Optical Components and Systems
Proc. SPIE 8082, Axicon metrology using high line density computer-generated holograms, 80821I (27 May 2011); doi: 10.1117/12.889572
Proc. SPIE 8082, 3D profilometry on aspheric and freeform lenses, 80821J (27 May 2011); doi: 10.1117/12.895008
Proc. SPIE 8082, Measurements of aberrations of aspherical lenses using experimental ray tracing, 80821K (27 May 2011); doi: 10.1117/12.895009
Proc. SPIE 8082, Automated alignment of aspheric and freeform surfaces in a non-null test interferometer, 80821L (27 May 2011); doi: 10.1117/12.895010
Proc. SPIE 8082, Complete characterization of assembled optics with respect to centering error and lens distances, 80821M (27 May 2011); doi: 10.1117/12.889561
Proc. SPIE 8082, Interferometric measurement of profile deviations of large precision mirrors, 80821N (27 May 2011); doi: 10.1117/12.889359