PROCEEDINGS VOLUME 8083
SPIE OPTICAL METROLOGY | 23-26 MAY 2011
Modeling Aspects in Optical Metrology III
IN THIS VOLUME

0 Sessions, 46 Papers, 0 Presentations
Holography  (3)
Proceedings Volume 8083 is from: Logo
SPIE OPTICAL METROLOGY
23-26 May 2011
Munich, Germany
Front Matter: Volume 8083
Proc. SPIE 8083, Front Matter: Volume 8083, 808301 (23 May 2011); doi: 10.1117/12.899016
New Materials
Proc. SPIE 8083, The promise of metamaterials for new applications in optics, 808302 (8 July 2011); doi: 10.1117/12.895026
Proc. SPIE 8083, Rigorous modeling of meander-type metamaterials for sub-lambda imaging, 808303 (23 May 2011); doi: 10.1117/12.889451
Proc. SPIE 8083, Simulating photonic structures in layered geometries by the Multiple Multipole Program, 808304 (23 May 2011); doi: 10.1117/12.889851
Proc. SPIE 8083, Near-field introscopy of 2D nonhomogeneous left-handed material slab, 808305 (23 May 2011); doi: 10.1117/12.888834
Scatterometry I
Proc. SPIE 8083, Geometry reconstruction for scatterometry on a MoSi photo mask based on maximum likelihood estimation, 808306 (23 May 2011); doi: 10.1117/12.895027
Proc. SPIE 8083, A Bayesian statistical model for hybrid metrology to improve measurement accuracy, 808307 (23 May 2011); doi: 10.1117/12.889876
Proc. SPIE 8083, Reduced basis method for real-time inverse scatterometry, 808308 (23 May 2011); doi: 10.1117/12.889892
Proc. SPIE 8083, Fast online inverse scattering with Reduced Basis Method (RBM) for a 3D phase grating with specific line roughness, 808309 (23 May 2011); doi: 10.1117/12.889364
Proc. SPIE 8083, Full-scale simulation of angle-resolved focused-beam scatterometry applied to aperiodic isolated features: model validity analysis and numerical results, 80830A (23 May 2011); doi: 10.1117/12.889496
Maxwell Solvers and Wave Propagation
Proc. SPIE 8083, Physical optics light propagation through components with measured refractive, diffractive and hybrid surface profiles, 80830B (23 May 2011); doi: 10.1117/12.889499
Proc. SPIE 8083, Modeling of profilometry with laser focus sensors, 80830C (23 May 2011); doi: 10.1117/12.888195
Proc. SPIE 8083, Study of the convergence behavior of the vectorial modal method for metallic lamellar gratings, 80830D (23 May 2011); doi: 10.1117/12.888812
Optical Systems
Proc. SPIE 8083, Image simulation of projection systems in photolithography, 80830E (23 May 2011); doi: 10.1117/12.895029
Proc. SPIE 8083, Combining rigorous diffraction calculation and GPU accelerated nonsequential raytracing for high precision simulation of a linear grating spectrometer, 80830F (23 May 2011); doi: 10.1117/12.889175
Proc. SPIE 8083, Fast virtual shadow projection system as part of a virtual multisensor assistance system, 80830G (23 May 2011); doi: 10.1117/12.883026
Proc. SPIE 8083, Speckle pattern simulations for in-plane displacement measurements, 80830H (23 May 2011); doi: 10.1117/12.889789
Proc. SPIE 8083, Modeling of modulation functions of different configurations of optical chopper wheels, 80830I (23 May 2011); doi: 10.1117/12.889509
Scatterometry II
Proc. SPIE 8083, Alternative robust statistical methods to reduce parameters uncertainty: application to scatterometry, 80830J (23 May 2011); doi: 10.1117/12.889493
Proc. SPIE 8083, The effect of line roughness on the diffraction intensities in angular resolved scatterometry, 80830K (23 May 2011); doi: 10.1117/12.889410
Proc. SPIE 8083, Solution of the inverse problem of diffraction from low-dimensional periodically arranged nanocrystals, 80830L (23 May 2011); doi: 10.1117/12.889418
Proc. SPIE 8083, Depth sensitive Fourier-Scatterometry for the characterization of sub-100 nm periodic structures, 80830M (23 May 2011); doi: 10.1117/12.889439
Proc. SPIE 8083, Improved geometry reconstruction and uncertainty evaluation for extreme ultraviolet (EUV) scatterometry based on maximum likelyhood estimation, 80830N (23 May 2011); doi: 10.1117/12.889479
Proc. SPIE 8083, A scattering matrix interpolation from perturbation method: application to scatterometry for profile control, 80830O (23 May 2011); doi: 10.1117/12.889214
Interferometry and Phase
Proc. SPIE 8083, Gradient reconstruction for the phase recovery from a single interferogram with closed fringes, 80830P (23 May 2011); doi: 10.1117/12.889779
Proc. SPIE 8083, Physical marker based stitching process of circular and non-circular interferograms, 80830Q (23 May 2011); doi: 10.1117/12.889491
Proc. SPIE 8083, Ronchigram analysis based on effective wavelength techniques and wavefront slope, 80830R (23 May 2011); doi: 10.1117/12.889551
Proc. SPIE 8083, Ronchi test for refractive optics off-axis using a nodal bench, 80830S (23 May 2011); doi: 10.1117/12.889287
Surface Metrology
Proc. SPIE 8083, Ab initio intensity distribution of diffusely scattered light from rough metallic surfaces, 80830U (23 May 2011); doi: 10.1117/12.889489
Proc. SPIE 8083, Modeling of the surface color controlled by Ag nanograin structure, 80830V (23 May 2011); doi: 10.1117/12.889301
Holography
Proc. SPIE 8083, New high compression method for digital hologram recorded in microscope configuration, 80830W (23 May 2011); doi: 10.1117/12.889520
Proc. SPIE 8083, Multi SLMs holographic display with inclined plane wave illumination, 80830X (23 May 2011); doi: 10.1117/12.890132
Proc. SPIE 8083, An autometed method for increasing the numerical aperture of a digital holography recording system, 80830Y (23 May 2011); doi: 10.1117/12.889834
Poster Session
Proc. SPIE 8083, Method of adjusting an optical axis of receiving module of laser rangefinder to the main axis of space vehicle, 80830Z (23 May 2011); doi: 10.1117/12.888912
Proc. SPIE 8083, Specification of optical surface accuracy using the structure function, 808310 (23 May 2011); doi: 10.1117/12.889143
Proc. SPIE 8083, Analysis of spectral-shadowing crosstalk in a quasi-distributed fibre sensor interrogated by optical frequency-domain reflectometer, 808311 (23 May 2011); doi: 10.1117/12.889260
Proc. SPIE 8083, The off-axis alignment of an asphere by a Fizeau interferometer, 808312 (23 May 2011); doi: 10.1117/12.889426
Proc. SPIE 8083, Direct modeling of external quantum efficiency of silicon trap detectors, 808313 (23 May 2011); doi: 10.1117/12.889436
Proc. SPIE 8083, Inverse calculation of position and tilt errors of optical components from wavefront data, 808314 (23 May 2011); doi: 10.1117/12.889521
Proc. SPIE 8083, Deconvolution of non-zero solid angles effect in Bidirectional Scattering Distribution Function measurements, 808315 (23 May 2011); doi: 10.1117/12.889528
Proc. SPIE 8083, Analysis and application of refractive variable-focus lenses in optical microscopy, 808316 (23 May 2011); doi: 10.1117/12.889546
Proc. SPIE 8083, Modeling the ultrafast optical response of a multilayered sample subject to transient distributed perturbations, 808317 (23 May 2011); doi: 10.1117/12.889557
Proc. SPIE 8083, Optimization of scanning and command functions of galvanometer-based scanners, 808319 (23 May 2011); doi: 10.1117/12.889566
Proc. SPIE 8083, Full vectorial finite element method for acoustic mode calculation of suspended core fiber, 80831A (23 May 2011); doi: 10.1117/12.889769
Proc. SPIE 8083, Rigorous simulations of 3D patterns on extreme ultraviolet lithography masks, 80831B (23 May 2011); doi: 10.1117/12.889831
Proc. SPIE 8083, Opto-mechanical modelling and experimental approach to the measurement of aerospace materials using shearography and thermal loading, 80831C (23 May 2011); doi: 10.1117/12.889457
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