PROCEEDINGS VOLUME 8133
SPIE OPTICAL ENGINEERING + APPLICATIONS | 21-25 AUGUST 2011
Dimensional Optical Metrology and Inspection for Practical Applications
Proceedings Volume 8133 is from: Logo
SPIE OPTICAL ENGINEERING + APPLICATIONS
21-25 August 2011
San Diego, California, United States
Front Matter
Proc. SPIE 8133, Front Matter: Volume 8133, 813301 (12 October 2011); doi: 10.1117/12.915357
Optical Metrology Methods I
Proc. SPIE 8133, Measurement technology based on laser internal/external cavity tuning, 813302 (10 September 2011); doi: 10.1117/12.895980
Proc. SPIE 8133, Submicron feature surface mapping interferometer for hard-to-access locations, 813303 (30 August 2011); doi: 10.1117/12.891724
Proc. SPIE 8133, Study on three-dimensional shape measurement of partially diffuse and specular reflective surfaces with fringe projection technique and fringe reflection technique, 813304 (30 August 2011); doi: 10.1117/12.891876
Proc. SPIE 8133, Auto-exposure for 3D shape measurement using a DLP projector, 813305 (10 September 2011); doi: 10.1117/12.892492
Proc. SPIE 8133, Phase reconstruction method using frequency shifting, 813306 (10 September 2011); doi: 10.1117/12.892992
Optical Metrology Methods II
Proc. SPIE 8133, Non-phosphor white LED light source for interferometry, 813309 (10 September 2011); doi: 10.1117/12.893691
Proc. SPIE 8133, Color pattern projection method for three-dimensional measurement, 81330A (10 September 2011); doi: 10.1117/12.894183
Proc. SPIE 8133, High-speed triangulation-based point sensing using phase detection, 81330B (14 September 2011); doi: 10.1117/12.894906
Proc. SPIE 8133, On improving the resolution and accuracy of a compact 3D shape measurement system, 81330C (14 September 2011); doi: 10.1117/12.895340
Metrology Applications I
Proc. SPIE 8133, Development of a probe for inner profile measurement and flaw detection, 81330D (14 September 2011); doi: 10.1117/12.893463
Proc. SPIE 8133, Surface profile measurement using a modified stereo microscope, 81330E (14 September 2011); doi: 10.1117/12.895345
Proc. SPIE 8133, Method for the evaluation 3D noncontact inspection systems, 81330F (14 September 2011); doi: 10.1117/12.892596
Proc. SPIE 8133, Low noise surface mapping of transparent plane-parallel parts with a low coherence interferometer, 81330G (14 September 2011); doi: 10.1117/12.893461
Metrology Applications II
Proc. SPIE 8133, Challenges faced in applying 3D noncontact metrology to turbine engine blade inspection, 81330H (14 September 2011); doi: 10.1117/12.895477
Proc. SPIE 8133, Evaluating a hybrid three-dimensional metrology system: merging data from optical and touch probe devices, 81330I (14 September 2011); doi: 10.1117/12.893969
Proc. SPIE 8133, In-vitro interferometric characterization of dynamic fluid layers on contact lenses, 81330J (14 September 2011); doi: 10.1117/12.892830
Proc. SPIE 8133, Profile measurement of thin films by linear wavenumber-scanning interferometry, 81330K (14 September 2011); doi: 10.1117/12.894454
Optical Metrology Analysis and Calibration
Proc. SPIE 8133, Modeling, error analysis, and compensation in phase-shifting surface profilers, 81330L (14 September 2011); doi: 10.1117/12.894594
Proc. SPIE 8133, Uniaxial 3D shape measurement with projector defocusing, 81330M (14 September 2011); doi: 10.1117/12.892362
Proc. SPIE 8133, Completely localized and parallel iterative algorithms for shift-variant image deblurring, 81330N (14 September 2011); doi: 10.1117/12.892409
Proc. SPIE 8133, Surface sensitivity reduction in laser triangulation sensors, 81330O (14 September 2011); doi: 10.1117/12.893893
Proc. SPIE 8133, Automated 3D IR defect mapping system for CZT wafer and tile inspection and characterization, 81330P (14 September 2011); doi: 10.1117/12.892765
NDT Methods
Proc. SPIE 8133, Surface resistivity/conductivity of different organic-thin films by shearography, 81330Q (14 September 2011); doi: 10.1117/12.888906
Proc. SPIE 8133, High-resolution electric speckle pattern interferometry by using only two speckle patterns, 81330R (14 September 2011); doi: 10.1117/12.892967
Poster Session
Proc. SPIE 8133, A novel laser tracking testbed for robot trajectory errors, 81330S (14 September 2011); doi: 10.1117/12.890033
Proc. SPIE 8133, Multi-probe system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy on a high-precision micro-coordinate measuring machine, 81330T (14 September 2011); doi: 10.1117/12.892385
Proc. SPIE 8133, An improved arterial pulsation measurement system based on optical triangulation and its application in the traditional Chinese medicine, 81330U (14 September 2011); doi: 10.1117/12.892959
Proc. SPIE 8133, The application of laser triangulation method on the blind guidance, 81330V (14 September 2011); doi: 10.1117/12.893000
Proc. SPIE 8133, Measuring hairiness in carpets by using surface metrology, 81330W (14 September 2011); doi: 10.1117/12.893769
Proc. SPIE 8133, Single shot phase shifting interferometry for measurement of transparent samples, 81330X (14 September 2011); doi: 10.1117/12.894108
Proc. SPIE 8133, Remote ultrasensitive laser microphone, 81330Y (17 September 2011); doi: 10.1117/12.894499
Proc. SPIE 8133, Design and characterization of an image acquisition system and its optomechanical module for chip defects inspection on chip sorters, 81330Z (14 September 2011); doi: 10.1117/12.893334
Proc. SPIE 8133, Experimental exploration of the correlation coefficient of static speckles in Fresnel configuration, 813310 (14 September 2011); doi: 10.1117/12.895541
Proc. SPIE 8133, High resolution diameter estimation of microthin wires by a novel 3D diffraction model, 813311 (14 September 2011); doi: 10.1117/12.897222
Proc. SPIE 8133, Absolute thickness measurement of silicon wafer using wavelength scanning interferometer, 813312 (14 September 2011); doi: 10.1117/12.898354
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