PROCEEDINGS VOLUME 8248
SPIE MOEMS-MEMS | 21-26 JANUARY 2012
Micromachining and Microfabrication Process Technology XVII
IN THIS VOLUME

0 Sessions, 16 Papers, 0 Presentations
Front Matter  (1)
Proceedings Volume 8248 is from: Logo
SPIE MOEMS-MEMS
21-26 January 2012
San Francisco, California, United States
Front Matter
Proc. SPIE 8248, Front Matter: Volume 8248, 824801 (17 March 2012); doi: 10.1117/12.928102
Plenary Session
Proc. SPIE 8248, Powering the wireless world with MEMS, 824802 (2 February 2012); doi: 10.1117/12.924356
Devices and Applications
Proc. SPIE 8248, Optically transparent, flexible pressure sensor array micromachined utilizing plasma assisted bonding, 824803 (7 February 2012); doi: 10.1117/12.899493
Proc. SPIE 8248, Rotary MEMS comb-drive actuator with large deflection for photonic applications, 824804 (7 February 2012); doi: 10.1117/12.909647
Proc. SPIE 8248, Photovoltaic retinal prosthesis for restoring sight to the blind: implant design and fabrication, 824805 (7 February 2012); doi: 10.1117/12.909104
Proc. SPIE 8248, Micromachined edge illuminated optically transparent automotive light guide panels, 824806 (7 February 2012); doi: 10.1117/12.908202
Microstructure Engineering
Proc. SPIE 8248, Fabrication of microstructures with continuous surface profiles and very large sag heights by laser lithography, 824807 (7 February 2012); doi: 10.1117/12.907337
Proc. SPIE 8248, Design of experiment for the optimisation of deep reactive ion etching of silicon inserts for microfabrication, 824808 (7 February 2012); doi: 10.1117/12.906772
Proc. SPIE 8248, Impact of initial surface parameters on the final quality of laser micro-polished surfaces, 824809 (7 February 2012); doi: 10.1117/12.908137
Laser Processing
Proc. SPIE 8248, High aspect ratio microfeatures with laser texturing in mixed ablative-melting regime, 82480C (7 February 2012); doi: 10.1117/12.907797
Proc. SPIE 8248, Fabrication qualities of micro-gratings encoding dependence on laser parameters by two-beam femtosecond lasers interference, 82480F (7 February 2012); doi: 10.1117/12.906980
MEMS Fabrication
Proc. SPIE 8248, Bosch-like method for creating high aspect ratio poly(methyl methacrylate) (PMMA) structures, 82480G (7 February 2012); doi: 10.1117/12.908690
Proc. SPIE 8248, Stress engineering for free-standing SU-8 2002 thin film devices, 82480H (7 February 2012); doi: 10.1117/12.910967
Proc. SPIE 8248, Numerical simulation of hot imprint process of periodical lamellar microstructure into polycarbonate, 82480I (7 February 2012); doi: 10.1117/12.915107
Poster Session
Proc. SPIE 8248, Electro-hydrodynamic printing using hole-type electrode, 82480J (7 February 2012); doi: 10.1117/12.907294
Proc. SPIE 8248, Laser-based microstructuring of materials surfaces using low-cost microlens arrays, 82480K (7 February 2012); doi: 10.1117/12.908061
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