PROCEEDINGS VOLUME 8418
6TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES (AOMATT 2012) | 26-29 APRIL 2012
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems
6TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES (AOMATT 2012)
26-29 April 2012
Xiamen, China
Front Matter: Volume 8418
Proc. SPIE 8418, Front Matter: Volume 8418, 841801 (2 July 2013); doi: 10.1117/12.2011028
Session 4-1
Proc. SPIE 8418, The Cross Talk of Multi-errors Impact on Lithography Performance and the Method of Its Control, 841802 (15 October 2012); doi: 10.1117/12.978295
Proc. SPIE 8418, Focal length and focal depth of metallic superlens, 841803 (15 October 2012); doi: 10.1117/12.970609
Proc. SPIE 8418, Amplitude-modulation mechanism for designing long-focal-depth cylindrical microlenses with a uniform axial intensity profile, 841804 (15 October 2012); doi: 10.1117/12.977271
Proc. SPIE 8418, Curved compound eye imaging system with a large field of view based on a plano-concave substrate, 841805 (15 October 2012); doi: 10.1117/12.2008758
Proc. SPIE 8418, Ultra-precision stylus measurement of micro V-groove array for optical fiber location, 841806 (15 October 2012); doi: 10.1117/12.977863
Proc. SPIE 8418, Free-form polymeric micro lens array molded by electrostatic force deformed template, 841807 (2 July 2013); doi: 10.1117/12.977641
Proc. SPIE 8418, Real time processor based on FPGA and DSP for atmospheric parameters evaluation from closed-loop data of adaptive optical system, 841808 (15 October 2012); doi: 10.1117/12.971172
Proc. SPIE 8418, Finite-difference time domain method for light scattering by nano coil structure in three-dimensional space, 841809 (15 October 2012); doi: 10.1117/12.977778
Session 4-2
Proc. SPIE 8418, Properties of Photon Sieve Diffraction Based on FDTD Method, 84180A (15 October 2012); doi: 10.1117/12.971466
Proc. SPIE 8418, Impact of MSD and mask manufacture errors on 45nm-node lithography, 84180B (15 October 2012); doi: 10.1117/12.978262
Proc. SPIE 8418, Influence of flare and NA error on lithography, 84180C (15 October 2012); doi: 10.1117/12.978626
Proc. SPIE 8418, Diffractive devices fabricated on azobenezene polymer by polarization laser direct-writing, 84180E (15 October 2012); doi: 10.1117/12.975109
Proc. SPIE 8418, A framework of an ultra-precision roller machining equipment for the fabrication of patterned microstructured optics, 84180F (15 October 2012); doi: 10.1117/12.977190
Proc. SPIE 8418, Fabrication of the microtoroidal and the biconical fiber taper, 84180G (15 October 2012); doi: 10.1117/12.977945
Proc. SPIE 8418, Effect of the edge roughness of the pinhole in point diffraction interferometer on light diffraction, 84180H (2 July 2013); doi: 10.1117/12.976875
Poster Session: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Proc. SPIE 8418, Fast-steering Mirror with Self-aligning ball bearing Supporting Structure, 84180I (15 October 2012); doi: 10.1117/12.974454
Proc. SPIE 8418, Laser Diode Array Beam Shaping System Based on Fly's Eye Lens, 84180J (15 October 2012); doi: 10.1117/12.970477
Proc. SPIE 8418, Design of Nanosecond Pulse Laser Micromachining System Based On PMAC, 84180K (15 October 2012); doi: 10.1117/12.973663
Proc. SPIE 8418, Maskless lithography alignment method based on phase-shifting Moiré fringes technique, 84180L (15 October 2012); doi: 10.1117/12.971463
Proc. SPIE 8418, Synchronous control strategy of wafer and reticle stage of step and scan lithography, 84180M (15 October 2012); doi: 10.1117/12.971476
Proc. SPIE 8418, A field lens design of illumination and projection optics for dynamic infrared scene generator based on DMD, 84180N (15 October 2012); doi: 10.1117/12.961240
Proc. SPIE 8418, Fabrication of a new type of transmission grating with holography interferometry and wet anisotropic etching, 84180O (15 October 2012); doi: 10.1117/12.971424
Proc. SPIE 8418, Depth-segmented partial-wave microscopic spectroscopy for subsurface defects' micro-nano structure detection and characterization, 84180P (15 October 2012); doi: 10.1117/12.970518
Proc. SPIE 8418, Design and analysis of diffractive optical elements for flattening of single modal Gaussian beams, 84180Q (15 October 2012); doi: 10.1117/12.975202
Proc. SPIE 8418, Design of aspheric surfaces testing system based on computer-generated holograms, 84180R (15 October 2012); doi: 10.1117/12.973759
Proc. SPIE 8418, Research of image denoising based on high precision of star sensors, 84180S (15 October 2012); doi: 10.1117/12.970628
Proc. SPIE 8418, Manufacture of optic micro-lens generated on needing positions and its applications on biochips, 84180T (15 October 2012); doi: 10.1117/12.978696
Proc. SPIE 8418, Effect of chain length on nanoscratching of polystyrene: a molecular dynamics study, 84180U (15 October 2012); doi: 10.1117/12.971202
Proc. SPIE 8418, Research on method of measuring pattern distortion of circularly symmetrical phase etched CGHs and eliminating the effect of pattern distortion, 84180V (15 October 2012); doi: 10.1117/12.975793
Proc. SPIE 8418, Optical components damage parameters database system, 84180W (15 October 2012); doi: 10.1117/12.975963
Proc. SPIE 8418, Study on Control Strategy for Coarse/Fine Dual-stage of Step and Scan Lithography, 84180X (15 October 2012); doi: 10.1117/12.971471
Proc. SPIE 8418, Technology of focus detection for 193nm projection lithographic tool, 84180Y (15 October 2012); doi: 10.1117/12.971448
Proc. SPIE 8418, Research on Micro-Displacement Driving Technology Based on Piezoelectric Ceramic, 84180Z (15 October 2012); doi: 10.1117/12.973648
Proc. SPIE 8418, Effects of environment factors on imaging performance of long focal length space camera, 841810 (15 October 2012); doi: 10.1117/12.975195
Proc. SPIE 8418, Effects of structural perturbation on the optical properties of waveguide grating structures, 841811 (15 October 2012); doi: 10.1117/12.978640
Proc. SPIE 8418, Constant exposure control algorithm for laser direct writing of mesh pattern in a deep concave spherical substrate, 841812 (15 October 2012); doi: 10.1117/12.978211
Proc. SPIE 8418, Subwavelength patterning based on a surface plasmon resonant cavity, 841813 (15 October 2012); doi: 10.1117/12.975807
Proc. SPIE 8418, Nanostructure photolithography based on surface plasmonic interference, 841814 (15 October 2012); doi: 10.1117/12.977310
Proc. SPIE 8418, Simulation of Sub-wavelength 3D Photomask Induced Polarization Effect by RCWA, 841815 (15 October 2012); doi: 10.1117/12.978258
Proc. SPIE 8418, Microchannel Detection of Microfluidic Chips with Digital Holography Imaging System, 841816 (15 October 2012); doi: 10.1117/12.978641
Proc. SPIE 8418, Research on radii of curvature measurement for micro-accessory in precision and ultra-precision machining, 841817 (15 October 2012); doi: 10.1117/12.966405
Proc. SPIE 8418, Research of communication mechanism based USB in wafer stage of lithography, 841818 (15 October 2012); doi: 10.1117/12.973654
Proc. SPIE 8418, Precision robotic system for Hohlraum assembly of the fusion ignition targets, 841819 (15 October 2012); doi: 10.1117/12.977645
Proc. SPIE 8418, Characteristics of the annular beam using a single axicon and a pair of lens, 84181A (15 October 2012); doi: 10.1117/12.976027
Proc. SPIE 8418, Large aperture ratio machining of the Z-cut quartz base on MEMS technology, 84181B (15 October 2012); doi: 10.1117/12.956754
Proc. SPIE 8418, Analysis of pinhole vector diffraction in visible-light, 84181C (15 October 2012); doi: 10.1117/12.974352
Proc. SPIE 8418, Design and simulation of tunable CW THz source based on laser photomixing and Archimedean spiral antenna, 84181D (15 October 2012); doi: 10.1117/12.2011019
Session 6-1
Proc. SPIE 8418, A Novel Temperature-Strain Decoupling Method for Distributed Fiber Sensing System Based on Backscattered Light, 84181E (15 October 2012); doi: 10.1117/12.2008760
Proc. SPIE 8418, Fabrication large area photonic crystals with periodic waveguide by one-step holographic lithography based on spatial light modulator, 84181F (15 October 2012); doi: 10.1117/12.2008759
Proc. SPIE 8418, Effect of Er doping on the electronic structure and optical properties of ZnO, 84181G (15 October 2012); doi: 10.1117/12.964100
Proc. SPIE 8418, Transmission and emission characteristics of porous silicon in terahertz from 0.5T to 10T, 84181H (15 October 2012); doi: 10.1117/12.976291
Proc. SPIE 8418, Inverse Open loop Control of a Nano-positioner Based on Piezo-electric Actuators, 84181I (15 October 2012); doi: 10.1117/12.970645
Poster Session: Smart Structures and Materials for Manufacturing and Testing
Proc. SPIE 8418, Influence of Grating Fabrication on Radiation Sensitivity of Fiber Bragg Gratings, 84181J (15 October 2012); doi: 10.1117/12.975958
Proc. SPIE 8418, Dither-frequency-track method based on phase sensitive detector technology in mechanically dithered ring laser gyros, 84181K (15 October 2012); doi: 10.1117/12.975771
Proc. SPIE 8418, Tracking control strategy for the optoelectronic system on the flexible suspended platform based on backstepping method, 84181L (15 October 2012); doi: 10.1117/12.954140
Proc. SPIE 8418, Research on the FBG strain gauge used for the safety monitoring of high temperature pressure pipes, 84181M (15 October 2012); doi: 10.1117/12.973666