PROCEEDINGS VOLUME 8430
SPIE PHOTONICS EUROPE | 16-19 APRIL 2012
Optical Micro- and Nanometrology IV
Proceedings Volume 8430 is from: Logo
SPIE PHOTONICS EUROPE
16-19 April 2012
Brussels, Belgium
Front Matter
Proc. SPIE 8430, Front Matter: Volume 8430, 843001 (24 May 2012); doi: 10.1117/12.976010
Holographic Techniques
Proc. SPIE 8430, Novel interferometric technique for the measurement of vibration and displacement of rotating components, 843002 (26 April 2012); doi: 10.1117/12.928180
Proc. SPIE 8430, Influence of Fresnel diffraction on numerical propagation and correction of tilted image planes in digital holographic microscopy, 843003 (26 April 2012); doi: 10.1117/12.922373
Proc. SPIE 8430, Multilevel optical sectioning based on digital holography with a femtosecond frequency comb laser, 843004 (5 May 2012); doi: 10.1117/12.923563
Proc. SPIE 8430, An alternative reconstructing method in color holography based on digital holograms stretching, 843005 (5 May 2012); doi: 10.1117/12.923008
Proc. SPIE 8430, Computer-generated hologram tailored for dielectrophoretic PDMS patterning, 843006 (5 May 2012); doi: 10.1117/12.923003
Microstructure Metrology
Proc. SPIE 8430, Optical measurement of the layer thickness of transparent materials, 843008 (5 May 2012); doi: 10.1117/12.923698
Proc. SPIE 8430, Full wafer metrology for chemically graded thin films, 843009 (9 May 2012); doi: 10.1117/12.922652
Proc. SPIE 8430, Electron spin resonance characterization of defects in sensor materials based on nanocrystalline tin dioxide, 84300A (5 May 2012); doi: 10.1117/12.923460
Proc. SPIE 8430, Failure of thin organic films by a combination of shearography and electrochemical impedance spectroscopy: the new concept of resistivity, 84300B (5 May 2012); doi: 10.1117/12.924232
Inspection of Microsystems
Proc. SPIE 8430, Real-time 3D vibration measurements in microstructures, 84300C (5 May 2012); doi: 10.1117/12.922184
Proc. SPIE 8430, Interferometry of AlN-based microcantilevers to determine the material properties and failure mechanisms, 84300D (5 May 2012); doi: 10.1117/12.922887
Proc. SPIE 8430, Advanced optical characterization of micro solid immersion lens, 84300E (5 May 2012); doi: 10.1117/12.921871
Proc. SPIE 8430, Wafer-scale nondestructive metrology on subwavelength diffraction gratings by means of Wood's anomaly, 84300F (28 April 2012); doi: 10.1117/12.922517
Proc. SPIE 8430, On topography characterization of micro-optical elements with large numerical aperture using digital holographic microscopy, 84300G (5 May 2012); doi: 10.1117/12.923047
3D Metrology
Proc. SPIE 8430, Advances in calibration methods for micro- and nanoscale surfaces, 84300H (5 May 2012); doi: 10.1117/12.928181
Proc. SPIE 8430, Quality assessment of aerospace materials with optical coherence tomography, 84300I (5 May 2012); doi: 10.1117/12.922511
Proc. SPIE 8430, Extrinsic calibration of a fringe projection sensor based on a zoom stereo microscope in an automatic multiscale measurement system, 84300J (28 April 2012); doi: 10.1117/12.922583
Proc. SPIE 8430, Sub-micron resolution high-speed spectral domain optical coherence tomography in quality inspection for printed electronics, 84300K (5 May 2012); doi: 10.1117/12.922443
Proc. SPIE 8430, Spectroscopic identification of materials with calibrated full-field optical coherence tomography in the visible range, 84300L (5 May 2012); doi: 10.1117/12.921539
Proc. SPIE 8430, Evaluation of nano-level 3D shape extraction system using RGB color interference fringes, 84300M (17 May 2012); doi: 10.1117/12.924099
Proc. SPIE 8430, The elimination of the errors in the calibration image of 3D measurement with structured light, 84300N (5 May 2012); doi: 10.1117/12.922150
Topography and Surface Metrology
Proc. SPIE 8430, Carrier and aberrations removal in interferometric fringe projection profilometry, 84300O (28 April 2012); doi: 10.1117/12.922533
Proc. SPIE 8430, Optical analysis of orange peel on metallic surfaces, 84300P (5 May 2012); doi: 10.1117/12.922366
Proc. SPIE 8430, Determination of the metrological characteristics of optical surface topography measuring instruments, 84300Q (5 May 2012); doi: 10.1117/12.921452
Image Reconstruction and Signal Processing
Proc. SPIE 8430, Improvement of least squares integration method with iterative compensation for shape reconstruction from gradient, 84300S (28 April 2012); doi: 10.1117/12.921402
Proc. SPIE 8430, Application of linear systems theory to characterize coherence scanning interferometry, 84300T (8 May 2012); doi: 10.1117/12.922435
Proc. SPIE 8430, Measurement of rectangular edge and grating structures using extended low-coherence interferometry, 84300U (5 May 2012); doi: 10.1117/12.922358
Novel Microscopy
Proc. SPIE 8430, SLM-based microscopy, 84300V (5 May 2012); doi: 10.1117/12.923213
Proc. SPIE 8430, Combining digital holographic microscopy and optical tweezers: a new route in microfluidic, 84300W (5 May 2012); doi: 10.1117/12.922894
High Resolution Patterning and Metrology
Proc. SPIE 8430, Ellipsometrical detection of optical trapped nanoparticles by periodically localized light, 84300Y (5 May 2012); doi: 10.1117/12.922879
Proc. SPIE 8430, Fiber-top and ferrule-top cantilevers for atomic force microscopy and scanning near field optical microscopy, 84300Z (5 May 2012); doi: 10.1117/12.922117
Proc. SPIE 8430, Real-time characterization of non-metallic inclusions by optical scanning and milling of steel samples, 843010 (5 May 2012); doi: 10.1117/12.924059
Proc. SPIE 8430, Plasma surface figuring of large optical components, 843011 (5 May 2012); doi: 10.1117/12.924798
Proc. SPIE 8430, Nanoscale patterns made by using a 13.5-nm Schwarzschild objective and a laser produced plasma source, 843012 (5 May 2012); doi: 10.1117/12.923692
Poster Session
Proc. SPIE 8430, Tomographic analysis of medium thickness transparent layers using white light scanning interferometry and XZ fringe image processing, 843014 (9 May 2012); doi: 10.1117/12.927813
Proc. SPIE 8430, Scatter method for measuring roughness of very smooth surfaces: an analysis and preliminary results, 843015 (5 May 2012); doi: 10.1117/12.921665
Proc. SPIE 8430, Optical characterization of a glass fibre with the use of low-coherent light (LED), 843017 (5 May 2012); doi: 10.1117/12.921987
Proc. SPIE 8430, IR-SWLI for subsurface imaging of large MEMS structures, 843018 (5 May 2012); doi: 10.1117/12.922105
Proc. SPIE 8430, Broadband phosphor conversion LED source for stroboscopic white light interferometry, 843019 (5 May 2012); doi: 10.1117/12.922114
Proc. SPIE 8430, LED driver for stroboscopic interferometry, 84301A (5 May 2012); doi: 10.1117/12.922119
Proc. SPIE 8430, Theoretical model of volumetric objects imaging in a microscope, 84301B (5 May 2012); doi: 10.1117/12.922198
Proc. SPIE 8430, Simple method for measuring bilayer system optical parameters, 84301C (5 May 2012); doi: 10.1117/12.922317
Proc. SPIE 8430, Uncertainties of displacement measurement of nanometrology coordinate measurement machines caused by laser source fluctuations, 84301D (28 April 2012); doi: 10.1117/12.922439
Proc. SPIE 8430, A micro-SPM head array with exchangeable cantilevers, 84301E (5 May 2012); doi: 10.1117/12.922641
Proc. SPIE 8430, High-speed phenomena visualization using digital holographic microscopy, 84301F (5 May 2012); doi: 10.1117/12.922740
Proc. SPIE 8430, Low-cost pulsed solid state illumination for microPIV measurements, 84301I (5 May 2012); doi: 10.1117/12.921649
Proc. SPIE 8430, Interferometric-displacement readout of cantilever sensors, 84301J (5 May 2012); doi: 10.1117/12.922050
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