PROCEEDINGS VOLUME 8501
SPIE OPTICAL ENGINEERING + APPLICATIONS | 12-16 AUGUST 2012
Advances in Metrology for X-Ray and EUV Optics IV
IN THIS VOLUME

0 Sessions, 16 Papers, 0 Presentations
Measurements  (5)
Benders  (3)
Profilers  (3)
Scatter  (2)
Proceedings Volume 8501 is from: Logo
SPIE OPTICAL ENGINEERING + APPLICATIONS
12-16 August 2012
San Diego, California, United States
Front Matter: Volume 8501
Proc. SPIE 8501, Front Matter: Volume 8501, 850101 (15 October 2012); doi: 10.1117/12.2012082
Measurements
Proc. SPIE 8501, Review of substrate materials, surface metrologies and polishing techniques for current and future-generation EUV/x-ray optics , 850102 (15 October 2012); doi: 10.1117/12.954852
Proc. SPIE 8501, Development of surface profile measurement method for ellipsoidal x-ray mirrors using phase retrieval, 850103 (19 October 2012); doi: 10.1117/12.930340
Proc. SPIE 8501, Measurement of groove density variation of varied-line-space grating for high-resolution soft x-ray monochromator, 850104 (15 October 2012); doi: 10.1117/12.936518
Proc. SPIE 8501, Cross comparison of surface slope and height optical metrology with a super-polished plane Si mirror, 850105 (15 October 2012); doi: 10.1117/12.945915
Proc. SPIE 8501, Using MountainsMap (Digital Surf) surface analysis software as an analysis tool for x-ray mirror optical metrology data, 850106 (15 October 2012); doi: 10.1117/12.931646
Benders
Proc. SPIE 8501, Optimal setting of bendable optics based on FEA calculations, 850107 (15 October 2012); doi: 10.1117/12.929098
Proc. SPIE 8501, Methodology for optimal in situ alignment and setting of bendable optics for diffraction-limited focusing of soft x-rays, 850108 (15 October 2012); doi: 10.1117/12.930023
Proc. SPIE 8501, Ex situ tuning of bendable x-ray mirrors for optimal beamline performance, 850109 (15 October 2012); doi: 10.1117/12.930156
Profilers
Proc. SPIE 8501, Development of a high-speed nanoprofiler using normal vector tracing, 85010A (15 October 2012); doi: 10.1117/12.929221
Proc. SPIE 8501, Progress of multi-beam long trace-profiler development, 85010B (15 October 2012); doi: 10.1117/12.930056
Proc. SPIE 8501, Dynamic surface roughness profiler, 85010D (15 October 2012); doi: 10.1117/12.956503
Scatter
Proc. SPIE 8501, Roughness characterization of EUV multilayer coatings and ultra-smooth surfaces by light scattering, 85010F (19 October 2012); doi: 10.1117/12.929887
Proc. SPIE 8501, Improved thermal stability of Mg/Co multilayer by introducing Zr barrier layer, 85010G (19 October 2012); doi: 10.1117/12.929448
Calibration and Multilayers Metrology
Proc. SPIE 8501, Microroughness measurements and EUV calibration of the solar ultraviolet imager multilayer-coated mirrors, 85010I (15 October 2012); doi: 10.1117/12.953571
Proc. SPIE 8501, Development of grating-based hard x-ray Talbot interferometry for optics and beam wavefront characterization at the advanced photon source, 85010J (15 October 2012); doi: 10.1117/12.974896
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