PROCEEDINGS VOLUME 8612
SPIE MOEMS-MEMS | 2-7 FEBRUARY 2013
Micromachining and Microfabrication Process Technology XVIII
Proceedings Volume 8612 is from: Logo
SPIE MOEMS-MEMS
2-7 February 2013
San Francisco, California, United States
Front Matter: Volume 8612
Proc. SPIE 8612, Front Matter: Volume 8612, 861201 (1 April 2013); doi: 10.1117/12.2022901
Direct Laser Processing
Proc. SPIE 8612, Design of microcantilever sensors using SLM based holographic lithography, 861203 (9 March 2013); doi: 10.1117/12.2003206
Proc. SPIE 8612, Graphene-based inkjet printing of flexible bioelectronic circuits and sensors, 861204 (9 March 2013); doi: 10.1117/12.2003936
Proc. SPIE 8612, Laser direct write system for fabricating seamless roll-to-roll lithography tools, 861205 (9 March 2013); doi: 10.1117/12.2004738
Proc. SPIE 8612, Plateau-Rayleigh instability triggered transformation in thin chromium film on glass substrate under nanosecond laser irradiation, 861206 (9 March 2013); doi: 10.1117/12.2005303
Laser-Assisted Processing
Proc. SPIE 8612, Silicon backside machining using a nanosecond 2-µm Tm:fiber laser, 861207 (9 March 2013); doi: 10.1117/12.2004878
Proc. SPIE 8612, Use of laser transfer processing for producing Al-Bi doped silicon electronic devices, 861208 (9 March 2013); doi: 10.1117/12.2004777
Proc. SPIE 8612, Doping method to glass material using a CO2 laser, 861209 (9 March 2013); doi: 10.1117/12.2005463
Microfabrication Technology
Proc. SPIE 8612, Deep silicon etch for biology MEMS fabrication: review of process parameters influence versus chip design, 86120A (9 March 2013); doi: 10.1117/12.2003765
Proc. SPIE 8612, Eliminating stiction in NEMS and MEMS release: parameter optimization for an HF vapor process operating at room temperature and ambient pressure, 86120B (9 March 2013); doi: 10.1117/12.2004135
Proc. SPIE 8612, Fabrication of thin vertical mirrors through plasma etch and KOH:IPA polishing for integration into MEMS electrostatic actuators, 86120D (9 March 2013); doi: 10.1117/12.2005119
Proc. SPIE 8612, High-quality surface micromachining of LiNbO3 by ion implantation-assisted etching, 86120E (9 March 2013); doi: 10.1117/12.2002095
Proc. SPIE 8612, Characteristics of a tapered hollow micro-tube emitting a Bessel light beam, 86120F (9 March 2013); doi: 10.1117/12.2003498
Device and Fabrication Simulation
Proc. SPIE 8612, Practical implementation of broadband diffractive optical elements, 86120G (9 March 2013); doi: 10.1117/12.2013204
Proc. SPIE 8612, Piezoelectric resonant micromirror with high frequency and large deflection applying mechanical leverage amplification, 86120I (9 March 2013); doi: 10.1117/12.2001620
Proc. SPIE 8612, Thermopower of phases and states of Si under high pressure, 86120K (9 March 2013); doi: 10.1117/12.2007724
Poster Session
Proc. SPIE 8612, Method of creating microscale rapid prototypes using SLM based holographic lithography, 86120L (9 March 2013); doi: 10.1117/12.2003164
Proc. SPIE 8612, Super-hydrophobicity of PMMA and PDMS surfaces structured by femtosecond laser pulses, 86120M (9 March 2013); doi: 10.1117/12.2004368
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