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Plateau-Rayleigh instability triggered transformation in thin chromium film on glass substrate under nanosecond laser irradiation
Deep silicon etch for biology MEMS fabrication: review of process parameters influence versus chip design
Eliminating stiction in NEMS and MEMS release: parameter optimization for an HF vapor process operating at room temperature and ambient pressure
Fabrication of thin vertical mirrors through plasma etch and KOH:IPA polishing for integration into MEMS electrostatic actuators
Piezoelectric resonant micromirror with high frequency and large deflection applying mechanical leverage amplification