Proceedings Volume 8616 is from: Logo
SPIE MOEMS-MEMS
2-7 February 2013
San Francisco, California, United States
Front Matter: Volume 8616
Proc. SPIE 8616, Front Matter: Volume 8616, 861601 (13 March 2013); doi: 10.1117/12.2022906
MOEMS-MEMS Plenary Session
Proc. SPIE 8616, Towards future systems with nano-optics contributions, 861602 (13 March 2013); doi: 10.1117/12.2013138
Proc. SPIE 8616, MOEMS pressure sensors for geothermal well monitoring, 861603 (13 March 2013); doi: 10.1117/12.2013141
Microscopy: Joint Session with Conferences 8616 and 8575
Proc. SPIE 8616, Optical probe design with extended depth-of-focus for optical coherence microscopy and optical coherence tomography , 861604 (13 March 2013); doi: 10.1117/12.2005833
Proc. SPIE 8616, 3D micro-optical lens scanner made by multi-wafer bonding technology, 861605 (13 March 2013); doi: 10.1117/12.2002422
Proc. SPIE 8616, Electrostatic MEMS resonating micro-polygonal scanner for circumferential endoscopic bio-imaging, 861606 (13 March 2013); doi: 10.1117/12.2003972
Proc. SPIE 8616, A water-immersible two-axis scanning mirror microsystem for ultrasound and photoacoustic microscopic imaging applications, 861607 (13 March 2013); doi: 10.1117/12.2003087
Microscanner I
Proc. SPIE 8616, Optical scanners based on thermo-optical tuning of an integrated-optical waveguide mode, 86160A (13 March 2013); doi: 10.1117/12.2003625
Proc. SPIE 8616, Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning, 86160C (13 March 2013); doi: 10.1117/12.2006189
Microscanner II
Proc. SPIE 8616, Position sensing and tracking with quasistatic MEMS mirrors, 86160D (13 March 2013); doi: 10.1117/12.2009439
Proc. SPIE 8616, Aluminum nitride supported 1D micromirror with static rotation angle >11°, 86160E (13 March 2013); doi: 10.1117/12.2002288
Proc. SPIE 8616, Wide steering angle microscanner based on curved surface, 86160F (13 March 2013); doi: 10.1117/12.2003000
Proc. SPIE 8616, SOI based electromagnetic MEMS scanners and applications in laser systems, 86160G (13 March 2013); doi: 10.1117/12.2004911
Spatial Light Modulator: Joint Session with Conferences 8616 and 8618
Proc. SPIE 8616, Arrayed beam steering device for advanced 3D displays, 86160H (13 March 2013); doi: 10.1117/12.2005516
Proc. SPIE 8616, 2D electrostatic micromirror array with high field factor for high-power application, 86160I (13 March 2013); doi: 10.1117/12.2002990
Proc. SPIE 8616, Fabrication of vertical moving micro-optical switch for display applications, 86160J (13 March 2013); doi: 10.1117/12.2002262
Proc. SPIE 8616, Development of a fully programmable MEMS diffraction grating, 86160K (13 March 2013); doi: 10.1117/12.2007290
Microspectrometer and Optical Filters
Proc. SPIE 8616, Design and characterization of a hybrid-integrated MEMS scanning grating spectrometer, 86160L (13 March 2013); doi: 10.1117/12.2004215
Proc. SPIE 8616, SWIFTS: a groundbreaking integrated technology for high-performance spectroscopy and optical sensors, 86160M (13 March 2013); doi: 10.1117/12.2000451
Proc. SPIE 8616, Fabrication and evaluation of a 500 W cladding-light stripper, 86160N (13 March 2013); doi: 10.1117/12.2001984
Proc. SPIE 8616, Spatial beam splitting for fully integrated MEMS interferometer, 86160O (13 March 2013); doi: 10.1117/12.2002236
Proc. SPIE 8616, In-plane diffraction loss free optical cavity using coated optical fiber and silicon micromachined spherical mirror , 86160P (13 March 2013); doi: 10.1117/12.2002994
Proc. SPIE 8616, A tunable split-ladder photonic crystal cavity by nanoelectromechanical actuator, 86160Q (13 March 2013); doi: 10.1117/12.2005606
MOEMS Components and Systems I
Proc. SPIE 8616, Compact holographic printer using RGB waveguide holographic optical elements, 86160R (13 March 2013); doi: 10.1117/12.2002926
Proc. SPIE 8616, Innovative approach to high stroke electrostatic actuators, 86160T (13 March 2013); doi: 10.1117/12.2004119
Proc. SPIE 8616, Tunable MEMS diffraction gratings with improved displacement profile of the fixed-fixed beams, 86160U (13 March 2013); doi: 10.1117/12.2004363
Proc. SPIE 8616, Optimization of biogas production using MEMS based near infrared inline-sensor, 86160V (13 March 2013); doi: 10.1117/12.2008183
MOEMS Components and Systems II
Proc. SPIE 8616, InGaAsP optical device integration on SOI platform by Ar/O2 plasma assisted bonding, 86160X (13 March 2013); doi: 10.1117/12.2008337
Proc. SPIE 8616, A new fabrication method for nano-gratings based on the high flexibility of PDMS, 86160Y (13 March 2013); doi: 10.1117/12.2008389
Proc. SPIE 8616, Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology, 86160Z (13 March 2013); doi: 10.1117/12.2001229
Microlenses and Microlens Arrays
Proc. SPIE 8616, Development of adaptive liquid microlenses and microlens arrays, 861610 (13 March 2013); doi: 10.1117/12.2004353
Proc. SPIE 8616, Tunable cylindrical microlenses based on aluminum nitride membranes, 861611 (13 March 2013); doi: 10.1117/12.2005131
Proc. SPIE 8616, Liquid lens based on electrowetting: actual developments on larger aperture and multiple electrodes design for image stabilization or beam steering, 861612 (13 March 2013); doi: 10.1117/12.2006847
Proc. SPIE 8616, The fabrication of out of plane aspherical microlens arrays, 861613 (13 March 2013); doi: 10.1117/12.2008330
Imaging
Proc. SPIE 8616, MOEMS-based time-of-flight camera for 3D video capturing, 861614 (13 March 2013); doi: 10.1117/12.2001934
Proc. SPIE 8616, Simultaneous multispectral imaging using lenslet arrays, 861615 (13 March 2013); doi: 10.1117/12.2000585
Proc. SPIE 8616, Batch fabrication of micro-optical sensing and imaging devices, 861616 (13 March 2013); doi: 10.1117/12.2002289
Proc. SPIE 8616, Diffraction and photometric limits in today's miniature digital camera systems, 861617 (13 March 2013); doi: 10.1117/12.2003819
Proc. SPIE 8616, Optical MEMS in space instruments for Earth observation and astronomy, 861618 (13 March 2013); doi: 10.1117/12.2007292
Poster Session
Proc. SPIE 8616, Closed-loop control driver for quasi-static MOEMS mirrors, 861619 (13 March 2013); doi: 10.1117/12.2004167
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