PROCEEDINGS VOLUME 8700
INTERNATIONAL CONFERENCE ON MICRO-AND NANO-ELECTRONICS 2012 | 1-5 OCTOBER 2012
International Conference Micro- and Nano-Electronics 2012
INTERNATIONAL CONFERENCE ON MICRO-AND NANO-ELECTRONICS 2012
1-5 October 2012
Zvenlgorod, Russian Federation
Front Matter: Volume 8700
Proc. SPIE 8700, Front Matter: Volume 8700, 870001 (8 January 2013); doi: 10.1117/12.2019787
Plasma and Thermal Processing
Proc. SPIE 8700, Formation of nanoscale structures by inductively coupled plasma etching, 870002 (10 January 2013); doi: 10.1117/12.2017609
Proc. SPIE 8700, The effects of additive gases (Ar, N2, H2, Cl2, O2) on HCl plasma parameters and composition, 870003 (8 January 2013); doi: 10.1117/12.2017138
Proc. SPIE 8700, Instrumented wafer as a Langmuir multiprobe tool for lateral plasma homogeneity measurements in processing plasma reactors, 870004 (3 January 2013); doi: 10.1117/12.2017556
Proc. SPIE 8700, Copper germanium alloys formation by the low temperature atomic hydrogen treatment , 870005 (3 January 2013); doi: 10.1117/12.2016882
Proc. SPIE 8700, Temperature oscillations in a silicon wafer under constant power of incoherent irradiation by heating lamps in a thermal chamber of RTP set up, 870006 (3 January 2013); doi: 10.1117/12.2018016
Micro- and Nanoelectronic Structures
Proc. SPIE 8700, Influence of metamorphic buffer design on electrophysical and structural properties of MHEMT nanoheterostructures In0.7Al0.3As/In0.7Ga0.3As/In0.7Al0.3As/GaAs, 870007 (3 January 2013); doi: 10.1117/12.2017272
Proc. SPIE 8700, Laser pulse crystallization and optical properties of Si/SiO2 and Si/Si3N4 multilayer nano-heterostructures, 870008 (3 January 2013); doi: 10.1117/12.2016834
Proc. SPIE 8700, Effect of nanodimensional polyethylenimine layer on surface potential barriers of hybrid structures based on silicon single crystal, 870009 (3 January 2013); doi: 10.1117/12.2017068
Proc. SPIE 8700, Formation of carbon nanotubes-silicon composite structure for high capacity battery electrode, 87000A (8 January 2013); doi: 10.1117/12.2017719
Proc. SPIE 8700, Formation of nanoelectrodes for high temperature single-electron sensors, 87000B (8 January 2013); doi: 10.1117/12.2017239
Proc. SPIE 8700, Fabrication of integrated electrodes of molecular transistor by lithographic techniques and electromigration, 87000C (8 January 2013); doi: 10.1117/12.2017106
Proc. SPIE 8700, High-resolution X-ray diffraction and electron microscopy study of porous GaAs substrates, 87000D (8 January 2013); doi: 10.1117/12.2017023
Proc. SPIE 8700, Features of formation of high-k dielectric layer in w/ultrathin HfO2/Si (100) structures under annealing, 87000E (8 January 2013); doi: 10.1117/12.2018205
Magnetic and Superconducting Structures
Proc. SPIE 8700, Thermodynamics of antiferromagnetic nanoparticles and macroscopic quantum effects observed by Mössbauer spectroscopy, 87000F (8 January 2013); doi: 10.1117/12.2016920
Proc. SPIE 8700, Characterization of nanoparticles in a media using multilevel models of magnetic dynamics , 87000G (8 January 2013); doi: 10.1117/12.2017337
Proc. SPIE 8700, Field-induced transitions in ferrimagnetic chain of spins: stability of ferromagnetic and antiferromagnetic phases, 87000H (8 January 2013); doi: 10.1117/12.2017638
Proc. SPIE 8700, Macroscopic quantum effects in transmission of signals along the superconducting microwave slotline. Towards quantum transmission lines, 87000I (8 January 2013); doi: 10.1117/12.2017882
Micro- and Nanoscale Devices
Proc. SPIE 8700, Terahertz-wave generation using graphene: toward the creation of graphene injection lasers, 87000J (8 January 2013); doi: 10.1117/12.2017063
Proc. SPIE 8700, Characterization and qualification of deep-submicron OTP poly-fuse memory, 87000K (18 July 2013); doi: 10.1117/12.2017548
Proc. SPIE 8700, Recording of information in nanostructures of transition metal silicides, 87000L (18 July 2013); doi: 10.1117/12.2017618
Proc. SPIE 8700, A gold free fully copper metalized GaAs pHEMT for the high frequency applications, 87000M (8 January 2013); doi: 10.1117/12.2016911
Proc. SPIE 8700, Noise characteristics of nanoscaled SOI MOSFETs, 87000N (8 January 2013); doi: 10.1117/12.2017358
Proc. SPIE 8700, Narrowing of nanogap for purpose of molecular single-electronics , 87000O (8 January 2013); doi: 10.1117/12.2017090
Proc. SPIE 8700, The novel THz generation and detection possibilities of resonant-tunneling based semiconductor multiple-quantum well nanostructures, 87000P (8 January 2013); doi: 10.1117/12.2017876
Proc. SPIE 8700, Mechanism of sensitivity of a three-collector magnetotransistor , 87000Q (8 January 2013); doi: 10.1117/12.2018388
Microelectromechanical Systems
Proc. SPIE 8700, Design and fabrication of piezoelectric MEMS, 87000R (8 January 2013); doi: 10.1117/12.2016968
Proc. SPIE 8700, Resonance properties of multilayer metallic nanocantilevers, 87000S (8 January 2013); doi: 10.1117/12.2016751
Proc. SPIE 8700, The mode matching technology for MEMS gyroscopes with mutually spaced eigenfrequencies, 87000T (8 January 2013); doi: 10.1117/12.2016784
Characterization and Metrology
Proc. SPIE 8700, Natural oxide thickness measurements on the test silicon relief pitch structure, 87000U (8 January 2013); doi: 10.1117/12.2017079
Proc. SPIE 8700, Determining the state of non-volatile memory cells with floating gate using scanning probe microscopy, 87000V (8 January 2013); doi: 10.1117/12.2017156
Proc. SPIE 8700, Mechanisms of image formation in SEM, 87000W (8 January 2013); doi: 10.1117/12.2016850
Proc. SPIE 8700, Virtual scanning electron microscope, 87000X (8 January 2013); doi: 10.1117/12.2016977
Proc. SPIE 8700, Effective probe for scanning electron microscope, 87000Y (8 January 2013); doi: 10.1117/12.2016917
Proc. SPIE 8700, Detection of processes inducing profile changes of relief structures in SEM by analysis of their distorted images, 87000Z (8 January 2013); doi: 10.1117/12.2016999
Proc. SPIE 8700, Atomic force microscopy for line edge roughness measurements, 870010 (10 January 2013); doi: 10.1117/12.2017529
Simulation and Modeling
Proc. SPIE 8700, Ionization energy oscillations in metallic and semiconducting nanotubes of ultra small diameters, 870011 (8 January 2013); doi: 10.1117/12.2017060
Proc. SPIE 8700, Computationally efficient method for optical simulation of solar cells and their applications, 870012 (8 January 2013); doi: 10.1117/12.2017154
Proc. SPIE 8700, Simulation of resonant tunneling devices based on different materials, 870013 (8 January 2013); doi: 10.1117/12.2016758
Proc. SPIE 8700, A universal model for single-electron device simulation, 870014 (8 January 2013); doi: 10.1117/12.2016757
Proc. SPIE 8700, Gold nanoparticle single-electron transistor simulation, 870015 (8 January 2013); doi: 10.1117/12.2017078
Proc. SPIE 8700, TCAD analysis of self-heating effects in bulk silicon and SOI n-MOSFETs , 870016 (8 January 2013); doi: 10.1117/12.2017550
Proc. SPIE 8700, Numerical model of parallel nano-FET on Coulomb blockade in M55 "magic" crystals, 870017 (8 January 2013); doi: 10.1117/12.2017306
Proc. SPIE 8700, Capacitance properties of MOS capacitors with oxide-hosted Si nanoparticles , 870018 (8 January 2013); doi: 10.1117/12.2016966
Quantum Informatics
Proc. SPIE 8700, Mathematical models of quantum noise, 870019 (8 January 2013); doi: 10.1117/12.2017396
Proc. SPIE 8700, Modeling of quantum noise and the quality of hardware components of quantum computers, 87001A (8 January 2013); doi: 10.1117/12.2017414
Proc. SPIE 8700, Creating, maintaining, and breaking of quantum entanglement in quantum operations, 87001B (8 January 2013); doi: 10.1117/12.2017517
Proc. SPIE 8700, Mathematical modeling and experimental study of polarization echo in optically anisotropic media, 87001C (8 January 2013); doi: 10.1117/12.2017619
Proc. SPIE 8700, Quantum and classical correlations in high temperature dynamics of two coupled large spins, 87001D (3 January 2013); doi: 10.1117/12.2016982
Proc. SPIE 8700, Quantum information transfer between two-component Bose-Einstein condensates connected by optical fiber, 87001E (3 January 2013); doi: 10.1117/12.2017104
Proc. SPIE 8700, Quantum register based on structured diamond waveguide with NV centers, 87001F (3 January 2013); doi: 10.1117/12.2017727
Proc. SPIE 8700, On the time-optimal implementation of quantum Fourier transform for qudits represented by quadrupole nucleus, 87001G (3 January 2013); doi: 10.1117/12.2016983
Proc. SPIE 8700, Measure of decoherence in quantum error correction for solid-state quantum computing, 87001H (3 January 2013); doi: 10.1117/12.2016639
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