PROCEEDINGS VOLUME 8763
SPIE MICROTECHNOLOGIES | 24-26 APRIL 2013
Smart Sensors, Actuators, and MEMS VI
IN THIS VOLUME

0 Sessions, 99 Papers, 0 Presentations
Packaging  (4)
Materials  (4)
Fluidic MEMS  (2)
Resonators  (4)
Bio-MEMS  (3)
Proceedings Volume 8763 is from: Logo
SPIE MICROTECHNOLOGIES
24-26 April 2013
Grenoble, France
Front Matter: Volume 8763
Proc. SPIE 8763, Front Matter: Volume 8763, 876301 (30 May 2013); doi: 10.1117/12.2029711
Plenary Session
Proc. SPIE 8763, An autonomous structural health monitoring solution, 876302 (17 May 2013); doi: 10.1117/12.2018401
Proc. SPIE 8763, Biologically inspired large scale chemical sensor arrays and embedded data processing, 876303 (17 May 2013); doi: 10.1117/12.2018402
Energy Scavengers
Proc. SPIE 8763, A MEMS vibration energy harvester for automotive applications, 876305 (17 May 2013); doi: 10.1117/12.2016916
Proc. SPIE 8763, Wearable and flexible thermoelectric generator with enhanced package, 876306 (24 May 2013); doi: 10.1117/12.2017385
Proc. SPIE 8763, Hybrid energy storage system for wireless sensor node powered by aircraft specific thermoelectric energy harvesting, 876307 (17 May 2013); doi: 10.1117/12.2017691
Proc. SPIE 8763, ZnO nanogenerators: energy generation through scavenging vibration, advantages of using a diode, 876308 (17 May 2013); doi: 10.1117/12.2015234
Packaging
Proc. SPIE 8763, Ceramic joints for pressure sensors development, 876309 (17 May 2013); doi: 10.1117/12.2014229
Proc. SPIE 8763, Cu-Sn transient liquid phase wafer bonding for MEMS applications, 87630A (17 May 2013); doi: 10.1117/12.2017350
Proc. SPIE 8763, Analysis of thermal vias in molded interconnect devices, 87630B (17 May 2013); doi: 10.1117/12.2017361
Proc. SPIE 8763, Characterization of quartz-based package for RF MEMS, 87630C (17 May 2013); doi: 10.1117/12.2017856
Materials
Proc. SPIE 8763, Novel applications of piezoresistive thin film systems based on hydrogenated carbon, 87630D (17 May 2013); doi: 10.1117/12.2017374
Proc. SPIE 8763, Optical properties of copper oxide thin films as selective sensing principle for hydrogen sulfide detection, 87630E (17 May 2013); doi: 10.1117/12.2017330
Proc. SPIE 8763, Electrically conductive Pt-Rh/ZrO2 and Pt-Rh/HfO2 nanocomposite electrodes for high temperature harsh environment sensors , 87630F (17 May 2013); doi: 10.1117/12.2017596
Proc. SPIE 8763, Fabrication and properties of SmFe2-PZT magnetoelectric thin films, 87630G (17 May 2013); doi: 10.1117/12.2016769
Optical Devices and Systems
Proc. SPIE 8763, High-speed ultra-broad tuning MEMS-VCSELs for imaging and spectroscopy, 87630H (17 May 2013); doi: 10.1117/12.2018345
Proc. SPIE 8763, High-precision optoelectronic sensor device for monitoring fermentation kinetics and maceration of wine, 87630I (17 May 2013); doi: 10.1117/12.2016935
Proc. SPIE 8763, Optical position feedback of quasi-static 2D MOEMS mirrors, 87630J (17 May 2013); doi: 10.1117/12.2016852
Fluidic MEMS
Proc. SPIE 8763, Influence of fluid-structure interaction on microcantilever vibrations: applications to rheological fluid measurement and chemical detection, 87630K (17 May 2013); doi: 10.1117/12.2018327
Proc. SPIE 8763, Comparison of quartz tuning forks and AlN-based extensional microresonators for viscosity measurements in oil/fuel mixtures, 87630L (17 May 2013); doi: 10.1117/12.2016998
Thermal Sensors
Proc. SPIE 8763, Flexible hot-film anemometer arrays for flow measurements on curved structures, 87630N (17 May 2013); doi: 10.1117/12.2016755
Proc. SPIE 8763, Microthermal sensors for determining fluid composition and flow rate in fluidic systems, 87630O (17 May 2013); doi: 10.1117/12.2017293
Proc. SPIE 8763, A high thermal resistance MEMS-based Pirani vacuum sensor chip, 87630P (17 May 2013); doi: 10.1117/12.2017345
Microactuators
Proc. SPIE 8763, Electromagnetic microactuators, 87630R (17 May 2013); doi: 10.1117/12.2018391
Proc. SPIE 8763, Thermal design of a tristable electromagnetic linear microactuator with high displacement and low actuation force for mass storage applications, 87630S (17 May 2013); doi: 10.1117/12.2017559
Proc. SPIE 8763, Highly sensitive thermal actuators for temperature sensing, 87630T (17 May 2013); doi: 10.1117/12.2016828
Resonators
Proc. SPIE 8763, Design of high-efficiency vibration energy harvesters and experimental functional tests for improving bandwidth and tunability, 87630U (17 May 2013); doi: 10.1117/12.2016774
Proc. SPIE 8763, Fabrication of vertical nanowire resonators for aerosol exposure assessment, 87630V (17 May 2013); doi: 10.1117/12.2016932
Proc. SPIE 8763, Quality factor enhancement for resonant MEMS applying an analogue feedback circuit driven by a lock-in amplifier, 87630W (17 May 2013); doi: 10.1117/12.2017131
Proc. SPIE 8763, Multi-modal vibration based MEMS energy harvesters for ultra-low power wireless functional nodes, 87630X (17 May 2013); doi: 10.1117/12.2016766
Bio-MEMS
Proc. SPIE 8763, All-silicon microforce sensor for bio applications, 87630Y (17 May 2013); doi: 10.1117/12.2017368
Proc. SPIE 8763, Efficient nanoparticle filtering using bioinspired functional sufaces, 87630Z (17 May 2013); doi: 10.1117/12.2017434
Proc. SPIE 8763, A low complexity wireless microbial fuel cell monitor using piezoresistive sensors and impulse-radio ultra-wide-band, 876311 (17 May 2013); doi: 10.1117/12.2017553
Poster Session
Proc. SPIE 8763, On a high-potential variable flexural stiffness device, 876312 (17 May 2013); doi: 10.1117/12.2016928
Proc. SPIE 8763, A miniaturized linear shaker system for MEMS sensor characterization, 876315 (17 May 2013); doi: 10.1117/12.2017405
Proc. SPIE 8763, Controlled fabrication of advanced functional structures on the nanoscale by means of electron beam-induced processing, 876316 (17 May 2013); doi: 10.1117/12.2017430
Proc. SPIE 8763, Rotational microactuator for microsurgery, 876317 (17 May 2013); doi: 10.1117/12.2016877
Proc. SPIE 8763, Simulation and fabrication of integrated polystyrene microlens in microfluidic system, 876318 (17 May 2013); doi: 10.1117/12.2015509
Proc. SPIE 8763, Magnetic tunnel junction sensors with pTesla sensitivity for biomedical imaging, 87631A (17 May 2013); doi: 10.1117/12.2018070
Proc. SPIE 8763, Hydrogel plug for independent sample and buffer handling in continuous microchip capillary electrophoresis, 87631B (17 May 2013); doi: 10.1117/12.2018088
Proc. SPIE 8763, A new injection method for soil nutrient analysis in capillary electrophoresis, 87631C (17 May 2013); doi: 10.1117/12.2018098
Proc. SPIE 8763, Simulation and optimization of the magnetic field in an electroplated copper micro-coil, 87631D (17 May 2013); doi: 10.1117/12.2018216
Proc. SPIE 8763, Development of energy harvester system for avionics, 87631F (17 May 2013); doi: 10.1117/12.2017126
Proc. SPIE 8763, Optimized energy harvesting from mechanical vibrations through piezoelectric actuators, based on a synchronized switching technique, 87631G (17 May 2013); doi: 10.1117/12.2017255
Proc. SPIE 8763, CMOS compatible low-frequency aluminium nitride MEMS piezoelectric energy harvesting device, 87631I (17 May 2013); doi: 10.1117/12.2016469
Proc. SPIE 8763, Comparison of low-power single-stage boost rectifiers for sub-milliwatt electromagnetic energy harvesters, 87631J (17 May 2013); doi: 10.1117/12.2016536
Proc. SPIE 8763, Load optimised piezoelectric generator for powering battery-less TPMS, 87631K (17 May 2013); doi: 10.1117/12.2016870
Proc. SPIE 8763, Flat inductors for human motion energy harvesting, 87631L (17 May 2013); doi: 10.1117/12.2016995
Proc. SPIE 8763, Modeling, simulation and experimental testing of the MEMS thermoelectric generators in wide range of operational conditions, 87631M (17 May 2013); doi: 10.1117/12.2017134
Proc. SPIE 8763, Design and material aspects for thermoelectric energy harvesting devices in aircrafts, 87631N (17 May 2013); doi: 10.1117/12.2017311
Proc. SPIE 8763, A nano-power energy harvesting IC for arrays of piezoelectric transducers, 87631O (17 May 2013); doi: 10.1117/12.2017406
Proc. SPIE 8763, Design, fabrication and characterization of a very low frequency piezoelectric energy harvester designed for heart beat vibration scavenging, 87631P (17 May 2013); doi: 10.1117/12.2017439
Proc. SPIE 8763, A miniaturised autonomous sensor based on nanowire materials platform: the SiNAPS mote, 87631Q (17 May 2013); doi: 10.1117/12.2017520
Proc. SPIE 8763, Design, fabrication and characterization of a micromachined piezoelectric energy harvester excited by ambient vibrations, 87631S (17 May 2013); doi: 10.1117/12.2017814
Proc. SPIE 8763, Photovoltaic energy harvesting for smart sensor systems, 87631T (17 May 2013); doi: 10.1117/12.2018052
Proc. SPIE 8763, Parametrization of ambient energy harvesters for complementary balanced electronic applications, 87631U (17 May 2013); doi: 10.1117/12.2018490
Proc. SPIE 8763, Investigation on the dielectric behavior of aluminum nitride thin films at different temperatures applying a time-zero approach, 87631X (17 May 2013); doi: 10.1117/12.2017066