PROCEEDINGS VOLUME 8789
SPIE OPTICAL METROLOGY 2013 | 13-16 MAY 2013
Modeling Aspects in Optical Metrology IV
Proceedings Volume 8789 is from: Logo
SPIE OPTICAL METROLOGY 2013
13-16 May 2013
Munich, Germany
Front Matter: Volume 8789
Proc. SPIE 8789, Front Matter: Volume 8789, 878901 (13 May 2013); doi: 10.1117/12.2028772
Scatterometry I
Proc. SPIE 8789, Assessment of the scatterometry capability to detect an etch process deviation, 878902 (13 May 2013); doi: 10.1117/12.2020486
Proc. SPIE 8789, Mueller matrix characterization using spectral reflectometry, 878903 (13 May 2013); doi: 10.1117/12.2022549
Proc. SPIE 8789, Numerical investigations of the influence of different commonly applied approximations in scatterometry, 878904 (13 May 2013); doi: 10.1117/12.2022108
Proc. SPIE 8789, Scatterometry sensitivity analysis for conical diffraction versus in-plane diffraction geometry with respect to the side wall angle, 878905 (13 May 2013); doi: 10.1117/12.2020487
Interferometry I
Proc. SPIE 8789, Phase unwrapping using geometric constraints for high-speed fringe projection based 3D measurements, 878906 (13 May 2013); doi: 10.1117/12.2020262
Proc. SPIE 8789, Sensitivity analysis of tilted-wave interferometer asphere measurements using virtual experiments, 878907 (13 May 2013); doi: 10.1117/12.2019986
Proc. SPIE 8789, A method to measure sub nanometric amplitude displacements based on optical feedback interferometry, 878908 (13 May 2013); doi: 10.1117/12.2019992
Proc. SPIE 8789, Influence of surface structure on shape and roughness measurement using two-wavelength speckle interferometry, 878909 (13 May 2013); doi: 10.1117/12.2020270
Optical Systems I
Proc. SPIE 8789, Design rules for a compact and low-cost optical position sensing of MOEMS tilt mirrors based on a Gaussian-shaped light source, 87890A (13 May 2013); doi: 10.1117/12.2019251
Proc. SPIE 8789, Extremum seeking control to avoid speckle-dropouts in a vibrometer, 87890B (13 May 2013); doi: 10.1117/12.2020118
Proc. SPIE 8789, Characterisation and comparison of ophthalmic instrument quality using a model eye with reverse ray-tracing, 87890C (13 May 2013); doi: 10.1117/12.2020129
Proc. SPIE 8789, Modelling PTB's spatial angle autocollimator calibrator, 87890D (13 May 2013); doi: 10.1117/12.2020279
Proc. SPIE 8789, Transmission functions of optical choppers for Gaussian beam distributions: modeling and simulations, 87890E (13 May 2013); doi: 10.1117/12.2020383
Microscopy and Imaging Systems
Proc. SPIE 8789, Deconvolution microscopy of living cells for phase-contrast imaging, 87890F (13 May 2013); doi: 10.1117/12.2020372
Proc. SPIE 8789, Measurement based simulation of microscope deviations for evaluation of stitching algorithms for the extension of Fourier-based alignment, 87890G (13 May 2013); doi: 10.1117/12.2020595
Proc. SPIE 8789, Reconstruction of SNOM near-field images from rigorous optical simulations by including topography artifacts, 87890I (13 May 2013); doi: 10.1117/12.2020276
Proc. SPIE 8789, Defect parameters retrieval based on optical projection images, 87890J (22 May 2013); doi: 10.1117/12.2018210
Maxwell Solver and Wave Propagation
Proc. SPIE 8789, Alternative discretization in the aperiodic Fourier modal method leading to reduction in computational costs, 87890K (13 May 2013); doi: 10.1117/12.2020851
Proc. SPIE 8789, Modeling and optimization of high index contrast gratings with aperiodic topologies, 87890L (13 May 2013); doi: 10.1117/12.2021018
Proc. SPIE 8789, Effect of imposed boundary conditions on the accuracy of transport of intensity equation based solvers, 87890N (13 May 2013); doi: 10.1117/12.2020662
Proc. SPIE 8789, Rigorous Dyson equation and quasi-separable T-scattering operator technique for study of magnetic response from ordered and disordered non-magnetic particles' ensembles at electromagnetic wave multiple scattering, 87890O (13 May 2013); doi: 10.1117/12.2020501
Proc. SPIE 8789, The influence of nonlinear modal propagation analysis on MMI power splitters for miniaturization, 87890P (13 May 2013); doi: 10.1117/12.2021558
New Materials and Scatterometry II
Proc. SPIE 8789, Multi resonant platform based on modified metallic nanoparticles for biological tissue characterization, 87890Q (13 May 2013); doi: 10.1117/12.2020522
Proc. SPIE 8789, Investigation of microstructured fiber geometries by scatterometry, 87890R (13 May 2013); doi: 10.1117/12.2020526
Proc. SPIE 8789, Simulation based optimization of scatterometric signatures by designed near field structures, 87890S (13 May 2013); doi: 10.1117/12.2020569
Proc. SPIE 8789, Alternative methods for uncertainty evaluation in EUV scatterometry, 87890T (13 May 2013); doi: 10.1117/12.2020677
Proc. SPIE 8789, The effect of line roughness on DUV scatterometry, 87890U (13 May 2013); doi: 10.1117/12.2020761
Optical II
Proc. SPIE 8789, A simulation environment for assisting system design of coherent laser doppler wind sensor for active wind turbine pitch control, 87890V (13 May 2013); doi: 10.1117/12.2020594
Interferometry and Phase II
Proc. SPIE 8789, Modelling laser interferometers for the measurement of the Avogadro constant, 87890W (13 May 2013); doi: 10.1117/12.2020282
Proc. SPIE 8789, Fundamental performance determining factors of the ultrahigh-precision space-borne optical metrology system for the LISA Pathfinder mission, 87890X (13 May 2013); doi: 10.1117/12.2020498
Proc. SPIE 8789, EFPI signal processing method providing picometer-level resolution in cavity length measurement, 87890Y (13 May 2013); doi: 10.1117/12.2020255
Poster Session
Proc. SPIE 8789, Comparative analysis of absolute methods to test rotationally asymmetric surface deviation, 87890Z (13 May 2013); doi: 10.1117/12.2018219
Proc. SPIE 8789, A new method for adjusting the lateral transfer hollow retroreflector, 878910 (13 May 2013); doi: 10.1117/12.2018396
Proc. SPIE 8789, Absolute testing of flats with all terms by using even and odd functions, 878911 (13 May 2013); doi: 10.1117/12.2019722
Proc. SPIE 8789, Modeling of Risley prisms devices for exact scan patterns, 878912 (13 May 2013); doi: 10.1117/12.2020386
Proc. SPIE 8789, Efficient and stable numerical method for evaluation of Zernike polynomials and their Cartesian derivatives, 878913 (13 May 2013); doi: 10.1117/12.2020389
Proc. SPIE 8789, Mathematical model of a galvanometer-based scanner: simulations and experiments, 878915 (13 May 2013); doi: 10.1117/12.2020462
Proc. SPIE 8789, Design of soft x-ray gratings for free electron lasers: from specification to characterization, 878916 (13 May 2013); doi: 10.1117/12.2020520
Proc. SPIE 8789, Super-resolution imaging based on liquid crystal on silicon displays technology, 878918 (13 May 2013); doi: 10.1117/12.2020608
Proc. SPIE 8789, S-Genius, a universal software platform with versatile inverse problem resolution for scatterometry, 878919 (13 May 2013); doi: 10.1117/12.2020674
Proc. SPIE 8789, Phase recovery from interferograms under severe vibrations, 87891B (13 May 2013); doi: 10.1117/12.2020788
Proc. SPIE 8789, Diffractive optical element for optical data storage, 87891E (13 May 2013); doi: 10.1117/12.2020591
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