PROCEEDINGS VOLUME 8975
SPIE MOEMS-MEMS | 1-6 FEBRUARY 2014
Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII
IN THIS VOLUME

0 Sessions, 22 Papers, 0 Presentations
Session 1  (4)
Session 2  (6)
Session 3  (5)
Session 4  (5)
Proceedings Volume 8975 is from: Logo
SPIE MOEMS-MEMS
1-6 February 2014
San Francisco, California, United States
Front Matter: Volume 8975
Proc. SPIE 8975, Front Matter: Volume 8975, 897501 (24 March 2014); doi: 10.1117/12.2062762
Session 1
Proc. SPIE 8975, Implementation of wireless battery-free microgyrosensor by utilizing one-port SAW delay line and an antenna with double resonant frequencies, 897503 (7 March 2014); doi: 10.1117/12.2041892
Proc. SPIE 8975, Design and fabrication of net flux radiometers for Mars exploration, 897504 (7 March 2014); doi: 10.1117/12.2040030
Proc. SPIE 8975, Low spring index, large displacement Shape Memory Alloy (SMA) coil actuators for use in macro- and micro-systems, 897505 (7 March 2014); doi: 10.1117/12.2044406
Proc. SPIE 8975, MEMS tactile display: from fabrication to characterization, 897506 (7 March 2014); doi: 10.1117/12.2044127
Session 2
Proc. SPIE 8975, Characterization of gallium nitride microsystems within radiation and high-temperature environments, 897507 (7 March 2014); doi: 10.1117/12.2046690
Proc. SPIE 8975, Improved test setup for MEMS mechanical strength investigations and fabrication process qualification, 897509 (7 March 2014); doi: 10.1117/12.2044212
Proc. SPIE 8975, Investigation of a novel approach for the cross-linking characterization of SU-8 photoresist materials by means of optical dispersion measurements, 89750A (7 March 2014); doi: 10.1117/12.2039052
Proc. SPIE 8975, Measuring Young's modulus using a self-mixing laser diode, 89750B (7 March 2014); doi: 10.1117/12.2039004
Proc. SPIE 8975, Wafer-level radiometric performance testing of uncooled microbolometer arrays, 89750C (7 March 2014); doi: 10.1117/12.2040201
Proc. SPIE 8975, Measurements of thermal conductivity of La0.95Sr0.05CoO3 nanofibers using MEMS devices, 89750D (7 March 2014); doi: 10.1117/12.2054464
Session 3
Proc. SPIE 8975, Heterogeneous MEMS device assembly and integration, 89750E (7 March 2014); doi: 10.1117/12.2041576
Proc. SPIE 8975, Contact resistance evolution of highly cycled, lightly loaded micro-contacts, 89750F (7 March 2014); doi: 10.1117/12.2037355
Proc. SPIE 8975, Studies on the dynamics of vacuum encapsulated 2D MEMS scanners by laser Doppler vibrometry, 89750H (7 March 2014); doi: 10.1117/12.2037182
Proc. SPIE 8975, Evaluation of silicon tuning-fork resonators under space-relevant radiation conditions, 89750I (7 March 2014); doi: 10.1117/12.2044209
Proc. SPIE 8975, HALT to qualify electronic packages: a proof of concept, 89750J (7 March 2014); doi: 10.1117/12.2038319
Session 4
Proc. SPIE 8975, The mechanical properties and stabilities of pristine, hydrogenated, and fluorinated silicene under tension, 89750K (7 March 2014); doi: 10.1117/12.2038401
Proc. SPIE 8975, Effective data processing in the frequency-domain based self-mixing approach for measuring alpha factor, 89750L (7 March 2014); doi: 10.1117/12.2038985
Proc. SPIE 8975, Optical properties of plasmonic nanoantenna arrays based on H-shaped nanoparticles with extended arms, 89750M (7 March 2014); doi: 10.1117/12.2039464
Proc. SPIE 8975, Acoustic and optoelectronic nature and interfacial durability of modified CNT and GnP-PVDF composites with nanostructural control, 89750O (7 March 2014); doi: 10.1117/12.2035661
Proc. SPIE 8975, Electrothermally tunable MEMS filters, 89750P (7 March 2014); doi: 10.1117/12.2038822
Poster Session
Proc. SPIE 8975, Quantitative thermal characterization of microelectronic devices by using CCD-based thermoreflectance microscopy, 89750Q (7 March 2014); doi: 10.1117/12.2041052
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