PROCEEDINGS VOLUME 8977
SPIE MOEMS-MEMS | 1-6 FEBRUARY 2014
MOEMS and Miniaturized Systems XIII
Proceedings Volume 8977 is from: Logo
SPIE MOEMS-MEMS
1-6 February 2014
San Francisco, California, United States
Front Matter: Volume 8977
Proc. SPIE 8977, Front Matter: Volume 8977, 897701 (27 March 2014); doi: 10.1117/12.2063251
Microscanner
Proc. SPIE 8977, Micro-scanning mirrors for high-power laser applications in laser surgery, 897705 (8 March 2014); doi: 10.1117/12.2042671
Proc. SPIE 8977, Two-dimensional scanning using two single-axis low-voltage PZT resonant micromirrors, 897706 (7 March 2014); doi: 10.1117/12.2036565
Proc. SPIE 8977, Analysis of capacitive sensing for 2D-MEMS scanner laser projection, 897707 (7 March 2014); doi: 10.1117/12.2038606
Proc. SPIE 8977, Tunable External Cavity Quantum Cascade Lasers (EC-QCL): an application field for MOEMS based scanning gratings, 897708 (7 March 2014); doi: 10.1117/12.2039950
Proc. SPIE 8977, High speed focus control capability of electrostatic-pneumatic MEMS deformable mirrors, 897709 (7 March 2014); doi: 10.1117/12.2042195
Proc. SPIE 8977, Wafer-level vacuum-packaged two-axis MEMS scanning mirror for pico-projector application, 89770A (7 March 2014); doi: 10.1117/12.2038249
Proc. SPIE 8977, Rapidly analyzing parametric resonance and manufacturing yield of MEMS 2D scanning mirrors using hybrid finite-element/behavioral modeling, 89770B (7 March 2014); doi: 10.1117/12.2041067
MOEMS for Imaging Applications
Proc. SPIE 8977, A robust design and fabrication of micromachined electro-absorptive optical modulator for 3D imaging, 89770C (7 March 2014); doi: 10.1117/12.2039054
Proc. SPIE 8977, Next generation miniature simultaneous multi-hyperspectral imaging systems, 89770D (7 March 2014); doi: 10.1117/12.2035244
Proc. SPIE 8977, MEMS based miniature FT-IR engine with built-in photodetector, 89770E (7 March 2014); doi: 10.1117/12.2038588
Proc. SPIE 8977, A new generation of MEMS middle-infrared spectrometers, 89770F (7 March 2014); doi: 10.1117/12.2042679
Proc. SPIE 8977, MEMS Fabry-Perot interferometer with Si-air mirrors for mid- and thermal infrared, 89770G (7 March 2014); doi: 10.1117/12.2037915
MOEMS Components and Systems
Proc. SPIE 8977, High-speed 32×32 MEMS optical phased array, 89770H (7 March 2014); doi: 10.1117/12.2044197
Proc. SPIE 8977, Newly developed broadband plasmonic absorber for uncooled infrared detectors, 89770I (7 March 2014); doi: 10.1117/12.2036406
Proc. SPIE 8977, Three-dimensional collimation of in-plane-propagating light using silicon micromachined mirror, 89770J (7 March 2014); doi: 10.1117/12.2038671
Proc. SPIE 8977, Analog of electromagnetically induced transparency in coupled one-dimensional photonic crystal cavities, 89770K (7 March 2014); doi: 10.1117/12.2039455
Proc. SPIE 8977, Nano-scale optical actuation based on coupled one-dimensional photonic crystal cavities, 89770L (7 March 2014); doi: 10.1117/12.2039511
Proc. SPIE 8977, A bi-material microbeam based thermal actuator for out-of-plane rotation, 89770M (7 March 2014); doi: 10.1117/12.2040728
Spatial Light Modulator
Proc. SPIE 8977, Holographic display with a FPD-based complex spatial light modulator, 89770N (7 March 2014); doi: 10.1117/12.2037621
Proc. SPIE 8977, High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications , 89770O (7 March 2014); doi: 10.1117/12.2036533
Proc. SPIE 8977, Speckle reduction technique for embeddable MEMS-laser pico-projector, 89770P (7 March 2014); doi: 10.1117/12.2040331
Proc. SPIE 8977, Large array of 2048 tilting micromirrors for astronomical spectroscopy: optical and cryogenic characterization, 89770Q (7 March 2014); doi: 10.1117/12.2041692
Microspectrometer and Optical Filters
Proc. SPIE 8977, MMI-based MOEMS FT spectrometer for visible and IR spectral ranges, 89770R (7 March 2014); doi: 10.1117/12.2038641
Proc. SPIE 8977, On-chip NIR optical spectrometer based on polymeric waveguide and metallic nano-structures, 89770S (7 March 2014); doi: 10.1117/12.2037218
Proc. SPIE 8977, Resolution and speed improvements of mid-infrared Fabry-Perot microspectrometers for the analysis of hydrocarbon gases, 89770T (7 March 2014); doi: 10.1117/12.2038235
Proc. SPIE 8977, MEMS Fabry-Perot interferometer-based spectrometer demonstrator for 7.5 µm to 9.5 µm wavelength range, 89770U (7 March 2014); doi: 10.1117/12.2036272
Proc. SPIE 8977, MEMS optical tunable filter based on free-standing subwavelength silicon layers, 89770V (7 March 2014); doi: 10.1117/12.2040767
MOEMS for Sensing Applications
Proc. SPIE 8977, MEMS infrared approaches to detector based on nonlinear oscillation and wavelength selective emitter using surface plasmon polariton, 89770W (7 March 2014); doi: 10.1117/12.2044314
Proc. SPIE 8977, Tunable MOEMS Fabry-Perot interferometer for miniaturized spectral sensing in near-infrared, 89770X (7 March 2014); doi: 10.1117/12.2035732
Proc. SPIE 8977, Planar integrated polymer-based optical strain sensor, 89770Y (7 March 2014); doi: 10.1117/12.2037295
Proc. SPIE 8977, Mechanically amplified MEMS optical accelerometer with FPI readout, 89770Z (7 March 2014); doi: 10.1117/12.2040022
Poster Session
Proc. SPIE 8977, Efficient grating simulation for general incident beam, 897710 (7 March 2014); doi: 10.1117/12.2039961
Proc. SPIE 8977, Parabasal thin element approximation for the analysis of the diffractive optical elements, 897711 (7 March 2014); doi: 10.1117/12.2040294
Proc. SPIE 8977, 120° silicon double mirrors for use in a micro-optical gyroscope, 897712 (7 March 2014); doi: 10.1117/12.2035484
Additional Manuscript
Proc. SPIE 8977, Quasi-static microscanner with linearized scanning for an adaptive 3D laser camera, 897717 (8 March 2014); doi: 10.1117/12.2064898
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