PROCEEDINGS VOLUME 9132
SPIE PHOTONICS EUROPE | 14-17 APRIL 2014
Optical Micro- and Nanometrology V
Proceedings Volume 9132 is from: Logo
SPIE PHOTONICS EUROPE
14-17 April 2014
Brussels, Belgium
Front Matter
Proc. SPIE 9132, Front Matter: Volume 9132, 913201 (29 May 2014); doi: 10.1117/12.2070007
Profilometry and Surface Measurement
Proc. SPIE 9132, Optical frequency comb profilometry using a single-pixel camera, 913202 (1 May 2014); doi: 10.1117/12.2051953
Proc. SPIE 9132, Comparison of areal measurements of the same zone of etched Si and hydroxyapatite layers on etched Si using different profiling techniques, 913204 (1 May 2014); doi: 10.1117/12.2051476
Proc. SPIE 9132, Remote laboratory for phase-aided 3D microscopic imaging and metrology, 913205 (1 May 2014); doi: 10.1117/12.2052068
Proc. SPIE 9132, 3D-optical measurement system using a new vignetting aperture procedure, 913206 (1 May 2014); doi: 10.1117/12.2052631
Scatterometry
Proc. SPIE 9132, Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry, 913208 (1 May 2014); doi: 10.1117/12.2052819
Proc. SPIE 9132, Inspection technique of latent flaws on fine polished glass substrates using stress-induced light scattering method, 913209 (1 May 2014); doi: 10.1117/12.2052046
Proc. SPIE 9132, Development of a scatterometry reference standard, 91320A (1 May 2014); doi: 10.1117/12.2052278
Nanoscale Metrology
Proc. SPIE 9132, Advanced metrology for the 14 nm node double patterning lithography, 91320D (1 May 2014); doi: 10.1117/12.2051480
Proc. SPIE 9132, Optical measurements of selected properties of nanocomposite layers with graphene and carbon nanotubes fillers, 91320E (1 May 2014); doi: 10.1117/12.2052693
Proc. SPIE 9132, Comparative scanning near-field optical microscopy studies of plasmonic nanoparticle concepts, 91320F (1 May 2014); doi: 10.1117/12.2051760
Proc. SPIE 9132, Investigation of the influence of the scanning probe on SNOM near-field images using rigorous simulations including the probe, 91320G (1 May 2014); doi: 10.1117/12.2052300
Traceability and Sensitivity Enhancement
Proc. SPIE 9132, Investigation of error compensation in CGH-based form testing of aspheres, 91320H (1 May 2014); doi: 10.1117/12.2052968
Proc. SPIE 9132, Interferometric sensors based on sinusoidal optical path length modulation, 91320I (1 May 2014); doi: 10.1117/12.2051508
Proc. SPIE 9132, Reconstruction-free wavefront measurements with enhanced sensitivity, 91320J (1 May 2014); doi: 10.1117/12.2049695
Proc. SPIE 9132, Ray-based calibration for the micro optical metrology system, 91320K (1 May 2014); doi: 10.1117/12.2051918
Optical Microscopy and Tomography
Proc. SPIE 9132, Optical design of a vertically integrated array-type Mirau-based OCT system, 91320L (1 May 2014); doi: 10.1117/12.2054573
Proc. SPIE 9132, Optical diffraction tomography: accuracy of an off-axis reconstruction, 91320M (1 May 2014); doi: 10.1117/12.2052227
Proc. SPIE 9132, Time-frequency analysis in optical coherence tomography for technical objects examination, 91320N (1 May 2014); doi: 10.1117/12.2052142
Proc. SPIE 9132, Limited-angle hybrid diffraction tomography for biological samples, 91320O (1 May 2014); doi: 10.1117/12.2051973
Proc. SPIE 9132, Effects of axial scanning in confocal microscopy employing adaptive lenses (CAL), 91320P (1 May 2014); doi: 10.1117/12.2052152
Phase Reconstruction
Proc. SPIE 9132, Phase aided 3D imaging and modeling: dedicated systems and case studies, 91320Q (1 May 2014); doi: 10.1117/12.2051850
Proc. SPIE 9132, A benchmark system for the evaluation of selected phase retrieval methods, 91320R (1 May 2014); doi: 10.1117/12.2057472
Proc. SPIE 9132, Size measurement of a pure phase object, 91320S (1 May 2014); doi: 10.1117/12.2052858
Proc. SPIE 9132, Optimum phase retrieval using the transport of intensity equation, 91320T (1 May 2014); doi: 10.1117/12.2052561
Proc. SPIE 9132, Digital holography to light field, 91320U (1 May 2014); doi: 10.1117/12.2059775
Optical Surface and Volume Metrology
Proc. SPIE 9132, Measurement of the surface shape and optical thickness variation of a polishing crystal wafer by wavelength tuning interferometer, 91320V (1 May 2014); doi: 10.1117/12.2051193
Proc. SPIE 9132, Metrology of undoped double-sided polished silicon wafer: surface, thickness and refractive index profile measurements, 91320W (1 May 2014); doi: 10.1117/12.2051373
Proc. SPIE 9132, Quantitative estimate of fs-laser induced refractive index changes in the bulk of various transparent materials, 91320X (1 May 2014); doi: 10.1117/12.2051590
Proc. SPIE 9132, Spectral properties of molecular iodine absorption cells filled to saturation pressure, 91320Y (1 May 2014); doi: 10.1117/12.2052910
New Interferometric Techniques
Proc. SPIE 9132, Single-shot two-channel Talbot interferometry using checker grating and Hilbert-Huang fringe pattern processing, 91320Z (1 May 2014); doi: 10.1117/12.2051383
Proc. SPIE 9132, Displacement measurement with intracavity interferometry, 913210 (1 May 2014); doi: 10.1117/12.2052923
Proc. SPIE 9132, A more robust and flexible approach to laterally chromatically dispersed, spectrally encoded interferometry (LCSI), 913211 (1 May 2014); doi: 10.1117/12.2054624
Proc. SPIE 9132, Suppression of frequency noise of single mode laser with unbalanced fiber interferometer for subnanometer interferometry, 913212 (1 May 2014); doi: 10.1117/12.2052966
Proc. SPIE 9132, Mapping a vibrating surface by using laser self- mixing interferometry, 913213 (1 May 2014); doi: 10.1117/12.2052172
Proc. SPIE 9132, Investigation of baseline measurement resolution of a Si plate-based extrinsic Fabry-Perot interferometer, 913214 (1 May 2014); doi: 10.1117/12.2052388
Poster Session
Proc. SPIE 9132, Polymer waveguide sensor with tin oxide thin film integrated onto optical-electrical printed circuit board, 913215 (1 May 2014); doi: 10.1117/12.2049681
Proc. SPIE 9132, Metrology of micro-optical components quality using direct measurement of 3D intensity point spread function, 913216 (1 May 2014); doi: 10.1117/12.2051122
Proc. SPIE 9132, Raman spectroscopy of nanostructured silicon fabricated by metal-assisted chemical etching, 913217 (1 May 2014); doi: 10.1117/12.2051489
Proc. SPIE 9132, Sub-kHz traceable characterization of stroboscopic scanning white light interferometer, 913218 (1 May 2014); doi: 10.1117/12.2051622
Proc. SPIE 9132, Three-dimensional surface reconstruction by combining a pico-digital projector for structured light illumination and an imaging system with high magnification and high depth of field, 913219 (1 May 2014); doi: 10.1117/12.2051833
Proc. SPIE 9132, Spectral ellipsometry studying of iron's optical and electronic properties, 91321B (1 May 2014); doi: 10.1117/12.2051965
Proc. SPIE 9132, Fingerprint authentication via joint transform correlator and its application in remote access control of a 3D microscopic system, 91321C (1 May 2014); doi: 10.1117/12.2052154
Proc. SPIE 9132, Towards traceable mechanical properties measurement of silicon nanopillars using contact resonance force microscopy, 91321D (1 May 2014); doi: 10.1117/12.2052475
Proc. SPIE 9132, Tilt angle measurement with a Gaussian-shaped laser beam tracking, 91321E (1 May 2014); doi: 10.1117/12.2052880
Proc. SPIE 9132, Development of a laser-speckle-based measurement principle for the evaluation of mechanical deformation of stacked metal sheets, 91321F (1 May 2014); doi: 10.1117/12.2052316
Proc. SPIE 9132, A dual-styli micro-machined system for precise determination of the thickness of free-standing thin films, 91321G (1 May 2014); doi: 10.1117/12.2052415
Proc. SPIE 9132, Automatic digital filtering for the accuracy improving of a digital holographic measurement system, 91321H (1 May 2014); doi: 10.1117/12.2052840
Proc. SPIE 9132, Common-path configuration in total internal reflection digital holography microscopy, 91321I (1 May 2014); doi: 10.1117/12.2052848
Proc. SPIE 9132, Active angular alignment of gauge block in system for contactless gauge block calibration, 91321J (1 May 2014); doi: 10.1117/12.2052901
Proc. SPIE 9132, In-beam tracking refractometry for coordinate interferometric measurement, 91321K (1 May 2014); doi: 10.1117/12.2052920
Proc. SPIE 9132, Asymmetric polarization-based frequency shifting interferometer for microelectronics, 91321L (1 May 2014); doi: 10.1117/12.2055046
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