PROCEEDINGS VOLUME 9173
SPIE NANOSCIENCE + ENGINEERING | 17-21 AUGUST 2014
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII
Proceedings Volume 9173 is from: Logo
SPIE NANOSCIENCE + ENGINEERING
17-21 August 2014
San Diego, California, United States
Front Matter: Volume 9173
Proc. SPIE 9173, Front Matter: Volume 9173, 917301 (9 September 2014); doi: 10.1117/12.2081270
Nanomanufacturing Metrology I
Proc. SPIE 9173, Nanomanufacturing metrology for cellulosic nanomaterials: an update, 917302 (27 August 2014); doi: 10.1117/12.2064023
Proc. SPIE 9173, Recent advances of the metrological AFM at INRIM, 917304 (27 August 2014); doi: 10.1117/12.2061954
Proc. SPIE 9173, Technique for AFM tip characterization, 917305 (8 September 2014); doi: 10.1117/12.2062759
Tools for Nanomanufacturing Metrology
Proc. SPIE 9173, Nanomanufacturing concerns about measurements made in the SEM Part III: vibration and drift, 917306 (27 August 2014); doi: 10.1117/12.2062032
Proc. SPIE 9173, Developing detection efficiency standards for atom probe tomography, 917307 (27 August 2014); doi: 10.1117/12.2062211
Proc. SPIE 9173, Recent advances in scanning Microwave Impedance Microscopy (sMIM) for nano-scale measurements and industrial applications, 917308 (27 August 2014); doi: 10.1117/12.2063138
Nanomanufacturing Metrology II
Proc. SPIE 9173, Standardization of methods for extracting statistics from surface profile measurements, 917309 (27 August 2014); doi: 10.1117/12.2063113
Proc. SPIE 9173, Improved quality control of silicon wafers using novel off-line air pocket image analysis, 91730A (27 August 2014); doi: 10.1117/12.2060227
Proc. SPIE 9173, Interferometric measurement of dimensional and thermal stability of joints, 91730B (27 August 2014); doi: 10.1117/12.2060382
Nanomanufacturing Metrology III
Proc. SPIE 9173, The refractive index of non-absorbing nanofluids and applications, 91730C (27 August 2014); doi: 10.1117/12.2064153
Proc. SPIE 9173, Mass sensing AlN sensors for waste water monitoring, 91730E (27 August 2014); doi: 10.1117/12.2061966
Poster Session
Proc. SPIE 9173, Scatterometric characterization of diffractive optical elements, 91730I (27 August 2014); doi: 10.1117/12.2061699
Back to Top