PROCEEDINGS VOLUME 9206
SPIE OPTICAL ENGINEERING + APPLICATIONS | 17-21 AUGUST 2014
Advances in Metrology for X-Ray and EUV Optics V
Proceedings Volume 9206 is from: Logo
SPIE OPTICAL ENGINEERING + APPLICATIONS
17-21 August 2014
San Diego, California, United States
Front Matter vol. 9206
Proc. SPIE 9206, Front Matter: Volume 9206, 920601 (7 October 2014); doi: 10.1117/12.2084726
Slope Profilers
Proc. SPIE 9206, A new optical head tracing reflected light for nanoprofiler, 920602 (5 September 2014); doi: 10.1117/12.2061703
Proc. SPIE 9206, The developmental long trace profiler (DLTP) optimized for metrology of side-facing optics at the ALS, 920603 (17 September 2014); doi: 10.1117/12.2061969
Proc. SPIE 9206, Upgrade of surface profiler for x-ray mirror at SPring-8, 920604 (5 September 2014); doi: 10.1117/12.2063356
Proc. SPIE 9206, Ultra-high-precision surface processing techniques for nanofocusing ellipsoidal mirrors in hard x-ray region, 920605 (5 September 2014); doi: 10.1117/12.2063146
Proc. SPIE 9206, Design consideration for nano-accuracy long trace profiler at BSRF, 920606 (17 September 2014); doi: 10.1117/12.2065327
At-wavelength Metrology
Proc. SPIE 9206, A reflectometer for at-wavelength characterization of XUV-reflection gratings, 920607 (5 September 2014); doi: 10.1117/12.2061828
Proc. SPIE 9206, At-wavelength metrology of x-ray optics at Diamond Light Source, 920608 (5 September 2014); doi: 10.1117/12.2062828
Microscopes/Figure Interferometers
Proc. SPIE 9206, An extreme ultraviolet interferometer suitable to generate dense interference pattern, 92060D (5 September 2014); doi: 10.1117/12.2061858
Proc. SPIE 9206, Experimental results for absolute cylindrical wavefront testing, 92060E (5 September 2014); doi: 10.1117/12.2062320
Extreme Angle Measurements and Calibration
Proc. SPIE 9206, Pushing the limits: latest developments in angle metrology for the inspection of ultra-precise synchrotron optics, 92060F (5 September 2014); doi: 10.1117/12.2060953
Proc. SPIE 9206, Angular calibration of surface slope measuring profilers with a bendable mirror, 92060G (17 September 2014); doi: 10.1117/12.2061948
Proc. SPIE 9206, Design of a precision two-dimensional tip-tilting stage system for autocollimator-based long trace profiler angular calibration, 92060H (5 September 2014); doi: 10.1117/12.2062216
Facilities
Proc. SPIE 9206, A new x-ray optics laboratory (XROL) at the ALS: mission, arrangement, metrology capabilities, performance, and future plans, 92060I (17 September 2014); doi: 10.1117/12.2062042
Proc. SPIE 9206, An XUV optics beamline at BESSY II, 92060J (5 September 2014); doi: 10.1117/12.2061778
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