PROCEEDINGS VOLUME 9375
SPIE OPTO | 7-12 FEBRUARY 2015
MOEMS and Miniaturized Systems XIV
Proceedings Volume 9375 is from: Logo
SPIE OPTO
7-12 February 2015
San Francisco, California, United States
Front Matter Vol. 9375
Proc. SPIE 9375, Front Matter: Volume 9375, 937501 (26 March 2015); doi: 10.1117/12.2190576
Microscanner I
Proc. SPIE 9375, Hybrid assembled micro scanner array with large aperture and their system integration for a 3D ToF laser camera, 937505 (25 March 2015); doi: 10.1117/12.2076440
Proc. SPIE 9375, MEMS scanner mirror based system for retina scanning and in eye projection, 937506 (27 February 2015); doi: 10.1117/12.2079468
Proc. SPIE 9375, Rotational MEMS mirror with latching arm for silicon photonics, 937507 (27 February 2015); doi: 10.1117/12.2077033
Microscanner II
Proc. SPIE 9375, Centimeter-scale MEMS scanning mirrors for high power laser application, 937509 (27 February 2015); doi: 10.1117/12.2079600
Proc. SPIE 9375, High brightness MEMS mirror based head-up display (HUD) modules with wireless data streaming capability, 93750A (27 February 2015); doi: 10.1117/12.2082848
Proc. SPIE 9375, A study of integrated position sensors for PZT resonant micromirrors, 93750B (27 February 2015); doi: 10.1117/12.2076764
Proc. SPIE 9375, 2D tilting MEMS micro mirror integrating a piezoresistive sensor position feedback, 93750C (27 February 2015); doi: 10.1117/12.2078618
MOEMS for Sensing Applications
Proc. SPIE 9375, Spatially resolved contrast measurement of diffractive micromirror arrays, 93750D (27 February 2015); doi: 10.1117/12.2076921
Proc. SPIE 9375, Image based wavefront compensation with deformable mirror for small satellite remote sensing, 93750E (27 February 2015); doi: 10.1117/12.2078572
Proc. SPIE 9375, Advanced MEMS spectral sensor for the NIR, 93750F (27 February 2015); doi: 10.1117/12.2078635
Proc. SPIE 9375, Far infrared microbolometers for radiometric measurements of ice cloud, 93750G (27 February 2015); doi: 10.1117/12.2076219
Proc. SPIE 9375, Compact MEMS mirror based Q-switch module for pulse-on-demand laser range finders, 93750H (27 February 2015); doi: 10.1117/12.2082212
Proc. SPIE 9375, Tuning mechanical resonant frequencies of nanoelectromechanical systems with light, 93750I (27 February 2015); doi: 10.1117/12.2081123
MOEMS for Imaging Applications
Proc. SPIE 9375, Large-aperture MOEMS Fabry-Perot interferometer for miniaturized spectral imagers, 93750J (27 February 2015); doi: 10.1117/12.2075308
Proc. SPIE 9375, Large size MOEMS Fabry-Perot interferometer filter for focal plane array hyperspectral imaging, 93750K (27 February 2015); doi: 10.1117/12.2076615
Proc. SPIE 9375, Technological platform for vertical multi-wafer integration of miniature imaging instruments, 93750L (27 February 2015); doi: 10.1117/12.2078007
Proc. SPIE 9375, A biaxial PZT optical scanner for pico-projector applications, 93750M (27 February 2015); doi: 10.1117/12.2085637
MOEMS Components and Systems I
Proc. SPIE 9375, CMOS compatible fabrication of 3D photonic crystals by nanoimprint lithography, 93750N (25 March 2015); doi: 10.1117/12.2084583
Proc. SPIE 9375, Piezoelectrically driven translatory optical MEMS actuator with 7mm apertures and large displacements, 93750O (27 February 2015); doi: 10.1117/12.2077101
Proc. SPIE 9375, Multi-wafer bonding technology for the integration of a micromachined Mirau interferometer, 93750P (27 February 2015); doi: 10.1117/12.2077641
Proc. SPIE 9375, Tunable optical buffer based on III-V MEMS design, 93750Q (27 February 2015); doi: 10.1117/12.2078224
Proc. SPIE 9375, Integrated packaging of 2D MOEMS mirrors with optical position feedback, 93750R (27 February 2015); doi: 10.1117/12.2079219
MOEMS Components and Systems II
Proc. SPIE 9375, Improvement of Varioptic's liquid lens based on electrowetting: how to obtain a short response time and its application in the design of a high resolution iris biometric system, 93750S (27 February 2015); doi: 10.1117/12.2075719
Proc. SPIE 9375, Volume refractometry of liquids using stable optofluidic Fabry-Pérot resonator with curved surfaces, 93750T (27 February 2015); doi: 10.1117/12.2076034
Proc. SPIE 9375, Fiber-coupled Fabry-Pérot notch filter combining in-plane axis, high speed MEMS tunability and large etching depth, 93750U (27 February 2015); doi: 10.1117/12.2078155
Proc. SPIE 9375, MEMS-based frequency modulation of fiber ring laser, 93750V (27 February 2015); doi: 10.1117/12.2078273
Proc. SPIE 9375, Large MOEMS diffraction grating results providing an EC-QCL wavelength scan of 20%, 93750W (27 February 2015); doi: 10.1117/12.2079640
Proc. SPIE 9375, Resonant micro optic gyro using tens of centimeters long optical fiber coil, 93750X (27 February 2015); doi: 10.1117/12.2080659
Proc. SPIE 9375, Modeling and simulations of new electrostatically driven, bimorph actuator for high beam steering micromirror deflection angles, 93750Y (27 February 2015); doi: 10.1117/12.2079390
Poster Session
Proc. SPIE 9375, Mechanical analysis and optimal design of a new kind of spherical mobile robot with two modes of locomotion, 93750Z (27 February 2015); doi: 10.1117/12.2078546
Proc. SPIE 9375, Optical metrology of AlN piezomachined ultrasonic transducer arrays and piezopumps, 937512 (27 February 2015); doi: 10.1117/12.2080721
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