PROCEEDINGS VOLUME 9517
SPIE MICROTECHNOLOGIES | 4-6 MAY 2015
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
Proceedings Volume 9517 is from: Logo
SPIE MICROTECHNOLOGIES
4-6 May 2015
Barcelona, Spain
Front Matter Vol. 9517
Proc. SPIE 9517, Front Matter: Volume 9517, 951701 (1 July 2015); doi: 10.1117/12.2199472
Harvesting
Proc. SPIE 9517, Vibration energy harvesting: fabrication, miniaturisation and applications, 951703 (21 May 2015); doi: 10.1117/12.2179783
Proc. SPIE 9517, Influence of process parameters on properties of piezoelectric AlN and AlScN thin films for sensor and energy harvesting applications, 951704 (21 May 2015); doi: 10.1117/12.2179468
Proc. SPIE 9517, From MEMS to macro-world: a micro-milling machined wideband vibration piezoelectric energy harvester, 951705 (21 May 2015); doi: 10.1117/12.2180143
Proc. SPIE 9517, Low-profile and wearable energy harvester based on plucked piezoelectric cantilevers, 951706 (21 May 2015); doi: 10.1117/12.2179574
Materials and Processes
Proc. SPIE 9517, High temperature performance of sputter-deposited piezoelectric aluminum nitride thin films, 951707 (21 May 2015); doi: 10.1117/12.2179442
Proc. SPIE 9517, Wafer bonding technology for new generation vacuum MEMS: challenges and promises, 951708 (21 May 2015); doi: 10.1117/12.2178920
Proc. SPIE 9517, 3D integration approaches for MEMS and CMOS sensors based on a Cu through-silicon-via technology and wafer level bonding, 951709 (21 May 2015); doi: 10.1117/12.2178598
Proc. SPIE 9517, Design and fabrication of indium phosphide air-bridge waveguides with MEMS functionality, 95170A (21 May 2015); doi: 10.1117/12.2178612
Resonators
Proc. SPIE 9517, Electrothermal piezoresistive cantilever resonators for personal measurements of nanoparticles in workplace exposure, 95170B (21 May 2015); doi: 10.1117/12.2180151
Proc. SPIE 9517, Out-of-plane piezoelectric microresonator and oscillator circuit for monitoring engine oil contamination with diesel, 95170C (21 May 2015); doi: 10.1117/12.2179251
Proc. SPIE 9517, Technology towards a SAW based phononic crystal sensor, 95170F (21 May 2015); doi: 10.1117/12.2178810
Proc. SPIE 9517, Experimental investigations of creep in gold RF-MEMS microstructures, 95170H (21 May 2015); doi: 10.1117/12.2181071
Optical Devices
Proc. SPIE 9517, The next generation of MEMS-based optical microspectrometers, 95170I (21 May 2015); doi: 10.1117/12.2179059
Proc. SPIE 9517, Input-shaped actuation of electromagnetic MEMS mirrors, 95170J (21 May 2015); doi: 10.1117/12.2181241
Proc. SPIE 9517, 2D stepping microdrive for hyperspectral imaging, 95170K (21 May 2015); doi: 10.1117/12.2178867
Proc. SPIE 9517, Design and fabrication of an endomicroscopic imaging module for minimally invasive medical devices, 95170L (21 May 2015); doi: 10.1117/12.2178866
Modeling
Proc. SPIE 9517, Acoustic high-frequency effects inside the package of capacitive silicon microphones and their impact on the device performance, 95170M (21 May 2015); doi: 10.1117/12.2179888
Proc. SPIE 9517, Assessment of MEMS energy harvester for medical applications, 95170N (21 May 2015); doi: 10.1117/12.2178473
Proc. SPIE 9517, Optimization method for designing multimodal piezoelectric MEMS energy harvesters, 95170O (21 May 2015); doi: 10.1117/12.2180953
Proc. SPIE 9517, Scaling effects for piezoelectric energy harvesters, 95170P (21 May 2015); doi: 10.1117/12.2178877
Devices
Proc. SPIE 9517, Thermal cycling reliability of RF-MEMS switches, 95170Q (21 May 2015); doi: 10.1117/12.2178763
Proc. SPIE 9517, Microsystem integration from RF to millimeter wave applications, 95170R (15 June 2015); doi: 10.1117/12.2180864
Proc. SPIE 9517, Tailoring design and fabrication of capacitive RF MEMS switches for K-band applications, 95170S (21 May 2015); doi: 10.1117/12.2179867
Proc. SPIE 9517, Investigation of diaphragm deflection of an absolute MEMS capacitive polysilicon pressure sensor, 95170T (21 May 2015); doi: 10.1117/12.2176188
Characterization
Proc. SPIE 9517, Smart sensors and calibration standards for high precision metrology, 95170V (21 May 2015); doi: 10.1117/12.2179455
Proc. SPIE 9517, Characterization of a dispersion-controlled approach to surface profilometry on wafers using a white-light interferometer, 95170W (21 May 2015); doi: 10.1117/12.2179022
Proc. SPIE 9517, Piezoresistive position microsensors with ppm-accuracy, 95170X (21 May 2015); doi: 10.1117/12.2178712
Systems
Proc. SPIE 9517, Multifunctional thin film sensor system as monitoring system in production, 95170Y (21 May 2015); doi: 10.1117/12.2178914
Proc. SPIE 9517, Passive microsensor for binary counting of numerous threshold events, 95170Z (1 June 2015); doi: 10.1117/12.2178726
Proc. SPIE 9517, Car glass microphones using piezoelectric transducers for external alarm detection and localization, 951710 (21 May 2015); doi: 10.1117/12.2179049
Proc. SPIE 9517, Autonomous solutions for powering wireless sensor nodes in rivers, 951712 (21 May 2015); doi: 10.1117/12.2178250
Chemical Sensors
Proc. SPIE 9517, The effect of sensor temperature and MOx layer thickness on the sensitivity of SnO2- and WO3-based chemiresistive sensors to ethylene gas, 951713 (21 May 2015); doi: 10.1117/12.2179235
Proc. SPIE 9517, MEMS-based platform optimized for inkjet printing of nano-sized, gas sensitive functional metal oxides to enable the measurement of gas induced changes of the heating power, 951714 (21 May 2015); doi: 10.1117/12.2178976
Proc. SPIE 9517, Photoacoustic CO2 sensor system: design and potential for miniaturization and integration in silicon, 951715 (21 May 2015); doi: 10.1117/12.2179157
Proc. SPIE 9517, Novel SH-SAW gas sensor based on graphene, 951716 (21 May 2015); doi: 10.1117/12.2178260
Poster Session
Proc. SPIE 9517, Real-time synchronization of wireless sensor network by 1-PPS signal, 951718 (21 May 2015); doi: 10.1117/12.2179479
Proc. SPIE 9517, An active reference spring array for in-situ calibration of the normal spring constant of AFM cantilevers, 951719 (21 May 2015); doi: 10.1117/12.2178850
Proc. SPIE 9517, Noise spectroscopy of nano- and microscopic periodic material structures, 95171A (21 May 2015); doi: 10.1117/12.2177798
Proc. SPIE 9517, High temperature stability of ScxAl1-xN (x=0.27) thin films, 95171C (21 May 2015); doi: 10.1117/12.2178503
Proc. SPIE 9517, Impact of titanium layer and silicon substrate properties on the microstructure of c-axis oriented AlN thin films, 95171E (21 May 2015); doi: 10.1117/12.2179156
Proc. SPIE 9517, Nonlinear numerical modelling and experimental validation of multilayer piezoelectric vibration energy scavengers, 95171F (21 May 2015); doi: 10.1117/12.2178138
Proc. SPIE 9517, Relaxation phenomena in nematic liquid crystals with multiwall carbon nanotubes adding, 95171G (21 May 2015); doi: 10.1117/12.2178333
Proc. SPIE 9517, Efficiency of electromagnetic vibration energy harvesting system, 95171H (21 May 2015); doi: 10.1117/12.2178448
Proc. SPIE 9517, Finite element analysis of AlGaN/GaN micro-diaphragms with diamond coating, 95171I (21 May 2015); doi: 10.1117/12.2179126
Proc. SPIE 9517, In-liquid characterization of high order out-of-plane modes in piezoelectric square plates, 95171J (21 May 2015); doi: 10.1117/12.2179493
Proc. SPIE 9517, Numerical model a graphene component for the sensing of weak electromagnetic signals, 95171K (21 May 2015); doi: 10.1117/12.2177797
Proc. SPIE 9517, Modeling distributed electrostatic effects in silicon microphones and their impact on the performance, 95171L (21 May 2015); doi: 10.1117/12.2180898
Proc. SPIE 9517, Optical characterization of MEMS-based multiple air-dielectric blue-spectrum distributed Bragg reflectors, 95171M (21 May 2015); doi: 10.1117/12.2178609
Proc. SPIE 9517, Optical design and characterization of a gas filled MEMS Fabry-Perot filter, 95171N (21 May 2015); doi: 10.1117/12.2178773
Proc. SPIE 9517, Low loss optomechanical cavities based on silicon oscillator, 95171O (21 May 2015); doi: 10.1117/12.2178821
Proc. SPIE 9517, Optoelectronic sensor device for monitoring ethanol concentration in winemaking applications, 95171P (21 May 2015); doi: 10.1117/12.2179341
Proc. SPIE 9517, Force monitoring transducers with more than 100,000 scale intervals, 95171Q (21 May 2015); doi: 10.1117/12.2178719
Proc. SPIE 9517, Impact of different polyimide-based substrates on the soft magnetic properties of NiFe thin films, 95171R (21 May 2015); doi: 10.1117/12.2178765
Proc. SPIE 9517, Parameters influencing focalization spot in time reversal of acoustic waves, 95171S (21 May 2015); doi: 10.1117/12.2178963
Proc. SPIE 9517, Experimental verification of a novel MEMS multi-modal vibration energy harvester for ultra-low power remote sensing nodes, 95171T (21 May 2015); doi: 10.1117/12.2177669
Proc. SPIE 9517, A comparative study between SMS interferometers and lossy mode resonace optical fiber devices for sensing applications, 95171U (21 May 2015); doi: 10.1117/12.2179684