Front Matter: Volume 9760
Proc. SPIE 9760, Front Matter: Volume 9760, 976001 (18 August 2016); doi: 10.1117/12.2240460
Miniature Instruments for Endoscopic Microscopy: Joint Session with Conferences 9691A and 9760
Proc. SPIE 9760, A microfabricated water-immersible scanning mirror with a small form factor for handheld ultrasound and photoacoustic microscopy, 976002 (15 March 2016); doi: 10.1117/12.2211746
Proc. SPIE 9760, A two-axis water-immersible MEMS scanning mirror for scanning optical and acoustic microscopy, 976003 (15 March 2016); doi: 10.1117/12.2211752
Spatial Light Modulator Technologies for 3D Applications: Joint Session with Conferences 9760 and 9761
Proc. SPIE 9760, Wearable and augmented reality displays using MEMS and SLMs, 976004 (15 March 2016); doi: 10.1117/12.2216633
Microscanner
Proc. SPIE 9760, MEMS-mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies, 976006 (15 March 2016); doi: 10.1117/12.2212965
Proc. SPIE 9760, Modeling of biaxial gimbal-less MEMS scanning mirrors, 976008 (15 March 2016); doi: 10.1117/12.2213518
Proc. SPIE 9760, Real-time closed-loop control for micro mirrors with quasistatic comb drives, 976009 (15 March 2016); doi: 10.1117/12.2208431
MOEMS Components and Systems
Proc. SPIE 9760, Mechanically flexible waveguide arrays for optical chip-to-chip coupling, 97600D (15 March 2016); doi: 10.1117/12.2205227
Proc. SPIE 9760, Mechanically tunable photonic crystal split-beam nanocavity, 97600E (15 March 2016); doi: 10.1117/12.2214140
Microspectrometer and Optical Filters
Proc. SPIE 9760, Tunable MEMS Fabry-Pérot filters for infrared microspectrometers: a review, 97600H (15 March 2016); doi: 10.1117/12.2209288
Proc. SPIE 9760, VIS Fabry-Pérot-Interferometer with (HL)4 PE-Si3N4/PE-SiO2 reflectors on freestanding LP-Si3N4 membranes for surface enhanced Raman spectroscopy, 97600I (15 March 2016); doi: 10.1117/12.2208567
Proc. SPIE 9760, Deeply-etched micromirror with vertical slit and metallic coating enabling transmission-type optical MEMS filters, 97600J (15 March 2016); doi: 10.1117/12.2211323
Proc. SPIE 9760, Mid infrared MEMS FTIR spectrometer, 97600K (15 March 2016); doi: 10.1117/12.2210973
Proc. SPIE 9760, Novel Fourier transform infrared spectrometer architecture based on cascaded Fabry-Perot interferometers, 97600L (15 March 2016); doi: 10.1117/12.2211614
Proc. SPIE 9760, MOEMS FPI sensors for NIR-MIR microspectrometer applications, 97600M (15 March 2016); doi: 10.1117/12.2214710
MOEMS for Sensing and Imaging Applications I
Proc. SPIE 9760, Ultra-slim 2D- and depth-imaging camera modules for mobile imaging, 97600N (15 March 2016); doi: 10.1117/12.2214062
Proc. SPIE 9760, Study on sputtered a-Si:H for micro optical diffusion sensor using laser-induced dielectrophoresis, 97600P (15 March 2016); doi: 10.1117/12.2216748
Proc. SPIE 9760, Low power and highly precise closed-loop driving circuits for piezoelectric micromirrors with embedded capacitive position sensors, 97600Q (15 March 2016); doi: 10.1117/12.2209573
MOEMS for Sensing and Imaging Applications II
Proc. SPIE 9760, Novel multi-aperture approach for miniaturized imaging systems, 97600S (15 March 2016); doi: 10.1117/12.2211698
Proc. SPIE 9760, Miniature electrically tunable rotary dual-focus lenses, 97600U (15 March 2016); doi: 10.1117/12.2211581
Proc. SPIE 9760, NEMS-based MIM plasmonics tunable filter, 97600V (15 March 2016); doi: 10.1117/12.2218432
Proc. SPIE 9760, Transition of optical regime in miniaturized optical systems: light interactions beyond the refraction limit, 97600W (15 March 2016); doi: 10.1117/12.2225366
Poster Session
Proc. SPIE 9760, Optically pumped 1550nm wavelength tunable MEMS VCSEL, 97600X (15 March 2016); doi: 10.1117/12.2209563
Proc. SPIE 9760, Analyzing effects of aperture size and applied voltage on the response time, 97600Y (15 March 2016); doi: 10.1117/12.2209258
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