PROCEEDINGS VOLUME 9890
SPIE PHOTONICS EUROPE | 3-7 APRIL 2016
Optical Micro- and Nanometrology VI
Proceedings Volume 9890 is from: Logo
SPIE PHOTONICS EUROPE
3-7 April 2016
Brussels, Belgium
Front Matter: Volume 9890
Proc. SPIE 9890, Front Matter: Volume 9890, 989001 (17 May 2016); doi: 10.1117/12.2243899
Digital Holography
Proc. SPIE 9890, Digital holographic microscopy for the characterization of microelectromechanical systems, 989002 (26 April 2016); doi: 10.1117/12.2230967
Proc. SPIE 9890, Photon counting digital holography, 989003 (3 May 2016); doi: 10.1117/12.2227063
Proc. SPIE 9890, Partial spatial coherence illumination in digital holographic microscopy: quantitative analysis of the resulting noise reduction, 989004 (26 April 2016); doi: 10.1117/12.2227706
Proc. SPIE 9890, Perspectives of multimode fibers and digital holography for optogenetics, 989005 (26 April 2016); doi: 10.1117/12.2231583
Proc. SPIE 9890, Digital holography with electron wave: measuring into the nanoworld, 989006 (26 April 2016); doi: 10.1117/12.2235172
Proc. SPIE 9890, Measurement of hygroscopic strain in deodar wood during convective drying using lensless Fourier transform digial holography, 989007 (26 April 2016); doi: 10.1117/12.2227464
3D Metrology
Proc. SPIE 9890, Structured light optical microscopy for three-dimensional reconstruction of technical surfaces, 989008 (26 April 2016); doi: 10.1117/12.2227756
Proc. SPIE 9890, Triangulation-based 3D surveying borescope, 989009 (26 April 2016); doi: 10.1117/12.2225203
Proc. SPIE 9890, High-contrast 3D image acquisition using HiLo microscopy with an electrically tunable lens, 98900A (26 April 2016); doi: 10.1117/12.2225596
Proc. SPIE 9890, Three-dimensional measurements with a novel technique combination of confocal and focus variation with a simultaneous scan, 98900B (26 April 2016); doi: 10.1117/12.2227054
Optical Tomography
Proc. SPIE 9890, Array-type miniature interferometer as the core optical microsystem of an optical coherence tomography device for tissue inspection, 98900C (26 April 2016); doi: 10.1117/12.2229477
Proc. SPIE 9890, Vertical comb-drive microscanner with 4x4 array of micromirrors for phase-shifting Mirau microinterferometry, 98900D (26 April 2016); doi: 10.1117/12.2230487
Proc. SPIE 9890, High-resolution full-field optical coherence tomography using high dynamic range image processing, 98900E (26 April 2016); doi: 10.1117/12.2227114
Proc. SPIE 9890, Space-domain, filtered backpropagation algorithm for tomographic configuration with scanning of illumination, 98900F (26 April 2016); doi: 10.1117/12.2229732
Nanoscale Metrology, Nanoimaging, and Near-field Microscopy
Proc. SPIE 9890, Overview of label-free far field optical nanoscopy techniques for nanometrology, 98900G (26 April 2016); doi: 10.1117/12.2227582
Proc. SPIE 9890, A silicon superlens with a simple design working at visible wavelengths, 98900I (26 April 2016); doi: 10.1117/12.2228349
Proc. SPIE 9890, High-resolution photocurrent mapping of thin-film solar cells using scanning near-field optical microscopy, 98900J (26 April 2016); doi: 10.1117/12.2227761
Proc. SPIE 9890, Optical properties of spray coated layers with carbon nanotubes and graphene nanoplatelets, 98900K (26 April 2016); doi: 10.1117/12.2227371
Scatterometry
Proc. SPIE 9890, Wavefront shaping for flow-field measurements through varying phase boundaries, 98900L (26 April 2016); doi: 10.1117/12.2227052
Proc. SPIE 9890, Robust determination of asymmetric side wall angles by means of coherent scanning Fourier scatterometry, 98900M (26 April 2016); doi: 10.1117/12.2230380
Proc. SPIE 9890, Structure and mesoscopic characterization of laser ablated carbon nanoparticles in water by Raman scattering, 98900N (3 May 2016); doi: 10.1117/12.2231116
Proc. SPIE 9890, Speckle decorrelation study of phase heterogeneous liquid medium, 98900O (26 April 2016); doi: 10.1117/12.2223723
Proc. SPIE 9890, Inverse scattering spectroscopic method for the fast measurement of the number and mass concentrations of metal nanoparticle colloid, 98900P (26 April 2016); doi: 10.1117/12.2227493
Topography and Surface Measurements
Proc. SPIE 9890, Local reflectance spectra measurements of surfaces using coherence scanning interferometry, 98900Q (26 April 2016); doi: 10.1117/12.2227625
Proc. SPIE 9890, Two-dimensional low-coherence interferometry for the characterization of nanometer wafer topographies, 98900R (3 May 2016); doi: 10.1117/12.2227887
Proc. SPIE 9890, Sensing roughness and polish direction, 98900S (26 April 2016); doi: 10.1117/12.2229440
Specialized Techniques
Proc. SPIE 9890, Production of arbitrary polarized light beams with a liquid crystal spatial modulator, 98900T (26 April 2016); doi: 10.1117/12.2229298
Proc. SPIE 9890, Evaluation of single-shot and two-shot fringe pattern phase demodulation algorithms aided by the Hilbert-Huang transform, 98900V (26 April 2016); doi: 10.1117/12.2228350
Proc. SPIE 9890, Effective generation of unidirectional SPP beam with arbitrary profile, 98900W (26 April 2016); doi: 10.1117/12.2227668
Interferometry Applications
Proc. SPIE 9890, Influences of edges and steep slopes in 3D interference and confocal microscopy, 98900X (26 April 2016); doi: 10.1117/12.2228307
Proc. SPIE 9890, Systemic errors calibration in dynamic stitching interferometry, 98900Z (16 May 2016); doi: 10.1117/12.2231397
Poster Session
Proc. SPIE 9890, Vertical integration of array-type miniature interferometers at wafer level by using multistack anodic bonding, 989011 (26 April 2016); doi: 10.1117/12.2229884
Proc. SPIE 9890, Measurement of defects by measuring of light scattering from surfaces using focused illumination, 989012 (26 April 2016); doi: 10.1117/12.2220422
Proc. SPIE 9890, Precision topographic inspection of MOEMS by moiré interferometry, 989013 (26 April 2016); doi: 10.1117/12.2227051
Proc. SPIE 9890, Optical characterization of SiO2 thin films using universal dispersion model over wide spectral range, 989014 (26 April 2016); doi: 10.1117/12.2227580
Proc. SPIE 9890, 3D through silicon via profile metrology based on spectroscopic reflectometry for SOI applications, 989015 (26 April 2016); doi: 10.1117/12.2227651
Proc. SPIE 9890, Application of laser radiation for investigation of oriented polypropylene membranes, 989016 (26 April 2016); doi: 10.1117/12.2227776
Proc. SPIE 9890, Subaperture method for aspheric surface metrology using curvature data, 989018 (26 April 2016); doi: 10.1117/12.2227961
Proc. SPIE 9890, Aberration retrieval for the characterization of micro-optical components, 98901A (26 April 2016); doi: 10.1117/12.2228847
Proc. SPIE 9890, Capillary-scale interferometry at high angles of scattering for refractive index measurements of small volumes, 98901B (26 April 2016); doi: 10.1117/12.2228858
Proc. SPIE 9890, Optical properties of polymer microtips investigated with workshop tomographic system, 98901D (26 April 2016); doi: 10.1117/12.2235405
Back to Top