PROCEEDINGS VOLUME 9962
SPIE OPTICAL ENGINEERING + APPLICATIONS | 28 AUGUST - 1 SEPTEMBER 2016
Advances in Metrology for X-Ray and EUV Optics VI
Proceedings Volume 9962 is from: Logo
SPIE OPTICAL ENGINEERING + APPLICATIONS
28 August - 1 September 2016
San Diego, California, United States
Front Matter: Volume 9962
Proc. SPIE 9962, Front Matter: Volume 9962, 996201 (23 November 2016); doi: 10.1117/12.2256408
1D and Pencil Beam Profilometry
Proc. SPIE 9962, New operational mode of the pencil beam interferometry based LTP, 996202 (8 September 2016); doi: 10.1117/12.2238298
Proc. SPIE 9962, Nanometer accuracy with continuous scans at the ALBA-NOM, 996203 (8 September 2016); doi: 10.1117/12.2238128
Proc. SPIE 9962, Development of a long trace profiler at SPring-8 using a newly developed slope sensor, 996204 (8 September 2016); doi: 10.1117/12.2239394
Proc. SPIE 9962, EPICS-based control and data acquisition for the APS slope profiler (Conference Presentation), 996205 (); doi: 10.1117/12.2240118
2D Profilometry, Interferometry, and Subaperture Stitching
Proc. SPIE 9962, Surface measurements in "grazing incidence" interferometry for long x-ray mirrors: theoretical limits and practical implementations, 996207 (8 September 2016); doi: 10.1117/12.2238623
Proc. SPIE 9962, Subaperture stitching interferometry with reduced reference errors for ultrasmooth surfaces, 996208 (8 September 2016); doi: 10.1117/12.2236629
Proc. SPIE 9962, Development of metrology for one-meter-long mirrors (Conference Presentation), 996209 (); doi: 10.1117/12.2239396
Novel Instrumentation and Techniques
Proc. SPIE 9962, Measurement of aspheric mirror by nanoprofiler using normal vector tracing, 99620B (12 October 2016); doi: 10.1117/12.2242408
Proc. SPIE 9962, Development of surface profiler for master mandrel of x-ray ellipsoidal mirror, 99620C (15 September 2016); doi: 10.1117/12.2235314
Modeling and Specifications of Optics
Proc. SPIE 9962, Fiber-optic based in situ atomic spectroscopy for manufacturing of x-ray optics, 99620F (8 September 2016); doi: 10.1117/12.2240406
Proc. SPIE 9962, Modeling surface topography of state-of-the-art x-ray mirrors as a result of stochastic polishing process: recent developments, 99620G (8 September 2016); doi: 10.1117/12.2238260
Proc. SPIE 9962, Ray-tracing as a tool for efficient specification of beamline optical components, 99620H (8 September 2016); doi: 10.1117/12.2237599
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