Experimental demonstration for the influence of EUV pellicle wrinkles on the mask 3D effects

Dong gi Lee; Young Woong Kim; Seungchan Moon; Jinhyuk Choi; Seong Ju Wi; Jinho Ahn

doi:10.1117/12.2641801

11 November 2022 Experimental demonstration for the influence of EUV pellicle wrinkles on the mask 3D effects

Dong gi Lee, Young Woong Kim, Seungchan Moon, Jinhyuk Choi, Seong Ju Wi, Jinho Ahn

Proceedings Volume PC12292, International Conference on Extreme Ultraviolet Lithography 2022; PC122920I (2022) https://doi.org/10.1117/12.2641801
Event: SPIE Photomask Technology + EUV Lithography, 2022, Monterey, California, United States

Abstract

This study experimentally shows that wrinkles in EUV pellicles can degrade the M3D effect. EUV ptychography microscopy was used to measure the amplitude and phase imbalance between the -1 and +1 diffraction orders due to the wrinkles of the pellicle. Degradation of amplitude and phase imbalance of 0.5% and 0.08 π was confirmed due to the optical path-length difference (OPD) of the diffracted light through the wrinkled pellicle. We also reconstructed aerial images using a phase reconstruction algorithm to determine the effect of amplitude and phase imbalances due to wrinkles on mask imaging performance.

Conference Presentation

Citation Download Citation

Dong gi Lee, Young Woong Kim, Seungchan Moon, Jinhyuk Choi, Seong Ju Wi, and Jinho Ahn "Experimental demonstration for the influence of EUV pellicle wrinkles on the mask 3D effects", Proc. SPIE PC12292, International Conference on Extreme Ultraviolet Lithography 2022, PC122920I (11 November 2022); https://doi.org/10.1117/12.2641801

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