Dielectric metasurfaces for DUV surface-enhanced spectroscopy

Bo Ray Lee; Ting An Hsu; Pei Ying Ho; Yu Chieh Peng; Yu Chia Chung; Yu Jie Wang; Yao Wei Huang; Ming Lun Tseng

doi:10.1117/12.2676762

5 October 2023 Dielectric metasurfaces for DUV surface-enhanced spectroscopy

Bo Ray Lee, Ting An Hsu, Pei Ying Ho, Yu Chieh Peng, Yu Chia Chung, Yu Jie Wang, Yao Wei Huang, Ming Lun Tseng

Proceedings Volume PC12654, Enhanced Spectroscopies and Nanoimaging 2023; PC1265407 (2023) https://doi.org/10.1117/12.2676762
Event: SPIE Nanoscience + Engineering, 2023, San Diego, California, United States

Abstract

Deep ultraviolet (DUV) light plays a critical role in many spectroscopy and imaging techniques. To advance these techniques, it is essential to develop devices that can provide substantial field enhancement within the DUV range. This presentation will introduce metasurfaces composed of various dielectric materials. Specifically, we will showcase Si metasurfaces demonstrating plasmonic modes induced by the "photon-doping effect," resulting in significant field enhancement at 266 nm. Furthermore, we will discuss DUV metasurfaces made of low-loss dielectric material HfO2, which exhibit multiple high-quality-factor quasi-bound-state-in-the-continuum resonances. Potential applications of the reported metasurfaces will be discussed.

Conference Presentation

Citation Download Citation

Bo Ray Lee, Ting An Hsu, Pei Ying Ho, Yu Chieh Peng, Yu Chia Chung, Yu Jie Wang, Yao Wei Huang, and Ming Lun Tseng "Dielectric metasurfaces for DUV surface-enhanced spectroscopy", Proc. SPIE PC12654, Enhanced Spectroscopies and Nanoimaging 2023, PC1265407 (5 October 2023); https://doi.org/10.1117/12.2676762

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