Liquid-assisted laser micromachining of glasses

Alexander M. Streltsov; David Lance

doi:10.1117/12.3009899

11 April 2024 Liquid-assisted laser micromachining of glasses

Alexander M. Streltsov, David Lance

Proceedings Volume PC12939, High-Power Laser Ablation VIII; PC129391G (2024) https://doi.org/10.1117/12.3009899
Event: SPIE High-Power Laser Ablation, 2024, Santa Fe, New Mexico, United States

Abstract

A liquid-assisted, laser machining process is described for high-aspect ratio micro-holes (<200-um diameter), which are produced in a variety of glass substrates with precise geometry control. Such features are difficult or impossible to fabricate using alternative approaches.

Conference Presentation

Citation Download Citation

Alexander M. Streltsov and David Lance "Liquid-assisted laser micromachining of glasses", Proc. SPIE PC12939, High-Power Laser Ablation VIII, PC129391G (11 April 2024); https://doi.org/10.1117/12.3009899

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